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EOP-D73-001-7-002-05E 

E.J. OZONE PRODUCTS 

 

(様式 

EO-H0523-10

 

 

 

 
 

INSTRUCTION MANUAL 

 

Installation-type Ozone Analyzer 

Model ME800 series

 

 

High Concentration Ozone Analyzer ME810 

(Type S / Type R)

 

Off-gas Ozone Analyzer ME820 

Type S

 

 

Published on January 24, 2017

 

 
 
 
 

EBARA JITSUGYO CO., LTD.

 

MEASURING INSTRUMENT   

AND MEDICAL DIVISION 

 
 
 
 

EAST JAPAN SALES DEPARTMENT:

 

 

 

 

WEST JAPAN SALES DEPARTMENT: 

 

 

 

 

RESEARCH AND DEVELOPMENT DEPARTMENT: 

 

 

 

2-3-12 Kurigi, Asao-ku, Kawasaki-shi,

Kanagawa, 215-0033 JAPAN 

Tel: +81-44-981-0560  Fax: +81-44-981-0561 

E-mail  [email protected]  

 

3-2-13, Hiranocho, Chuo-ku, Osaka-shi,   

Osaka, 541-0046 JAPAN 

Tel: +81-6-6231-3528  Fax: +81-6-6231-2929 

E-mail  [email protected] 

 

2-3-12 Kurigi, Asao-ku, Kawasaki-shi, 

Kanagawa, 215-0033 JAPAN 

Tel: +81-44-981-0560  Fax: +81-44-981-0561 

E-mail  [email protected] 

 

 

Summary of Contents for ME800 series

Page 1: ...MENT AND MEDICAL DIVISION EAST JAPAN SALES DEPARTMENT WEST JAPAN SALES DEPARTMENT RESEARCH AND DEVELOPMENT DEPARTMENT 2 3 12 Kurigi Asao ku Kawasaki shi Kanagawa 215 0033 JAPAN Tel 81 44 981 0560 Fax 81 44 981 0561 E mail ej ozone ejk co jp 3 2 13 Hiranocho Chuo ku Osaka shi Osaka 541 0046 JAPAN Tel 81 6 6231 3528 Fax 81 6 6231 2929 E mail ozon osaka ejk co jp 2 3 12 Kurigi Asao ku Kawasaki shi Ka...

Page 2: ...nderstood easily so please note that in advance e Contents of this manual may have to be changed without announcement for improvement of the products so please note that in advance f Author s right copyright of this manual is reserved by Ebara Jitsugyo Co Ltd Do not open all or a part of this manual to third persons in the public without permission of our company Composition of the product The com...

Page 3: ...uantity Note Model product code etc 6 Accessories Zero gas valve assembly 1 set 1 1 4 inch Ø6 m m BZ179A 3 8 inch Ø10 m m BZ179B Needle valve for zero gas Filter for zero gas transparent Silencer Zero gas valve bracket etc Zero gas port coupling 1 Accessories for external zero gas are packed for ME810 Type R only 1 The coupling Flowell is a selectable accessory which is mounted to the zero gas val...

Page 4: ...r Mounting band attached with rubber sheet Sample gas port coupling 1 4 Document Instruction manual 1 copy EOP See reference No 5 Document Test report 1 copy See product S N Contact your dealer if all the components are not supplied Place an order with your dealer if any lost or contaminated items should be found after the purchase 1 The coupling Flowell is a selectable accessory which is mounted ...

Page 5: ...A 1 pc External color Transparent For ME810 Type R only Enclosure mount Ozone destruct Optional parts BZ324B 1 pc With coupling Without cover for Ozone destruct External Ozone destruct Optional parts BZ325A 1 pc With coupling 1 1 4 inch Off gas Ozone Analyzer ME820 3 way solenoid valve assembly BZ144A 1 pc With coupling pipe Standard BZ144B With coupling pipe For mounting of an optional pressure s...

Page 6: ...e for medical treatment Property damage is defined as extended damage resulting from loss of properties and damage to equipment Mark Description DANGER DANGER indicates an imminently hazardous situation which if not avoided will result in death or serious injury WARNING WARNING indicates a potentially hazardous situation which if not avoided could result in death or serious injury CAUTION CAUTION ...

Page 7: ...s 50 Life of man will be jeopardized in one hour Report on Ozone Processing by Japan Water Works Association August 1984 p 40 Threshold limit value Japan 0 1 ppm recommendation by Japan Society for Occupational Health 2010 2011 USA 0 1 ppm TLV of TWA by ACGIH 1993 1994 TLV Threshold limit value TWA Time Weighted Average Concentration ACGIH American Conference of Governmental Industrial Hygienists ...

Page 8: ... may have an electrical shock when performing adjustment and repairing inside of the analyzer Let a specialist perform it If the front door is opened with the power kept ON UV ray emitted from the mercury lamp blinking inside may cause damage to your eyes or skin Do not see the UV ray with the low pressure mercury lamp kept ON When working near the low pressure mercury lamp be sure to wear protect...

Page 9: ... by the influence of other material than ozone note that the analyzer will not be guaranteed even if it is in the warranty term The analyzer should be used after complete installation The parts used inside of the analyzer have the end of their life Continuing to use them after replacement time may lead to the failure of the other parts Conduct their maintenance periodically Cautions on the low pre...

Page 10: ...ditions 43 6 2 Preparation for installation 44 6 2 1 Preparation for installation of High Concentration Ozone Analyzer 44 6 2 2 Preparation for installation of Off gas Ozone Analyzer 45 6 2 3 Mounting the common optional accessories Optional parts 46 6 3 Installation 47 6 4 Wiring 48 6 4 1 Connecting the power cable 48 6 4 2 Connecting the control cable 50 6 4 3 Connecting the signal cable 52 6 5 ...

Page 11: ... 11 Model code 78 12 Warranty 80 Figure Figure 1 Logic Diagram 13 Figure 2 Names of each part of ME810 Type S 19 Figure 3 Names of each part of ME810 Type R 20 Figure 4 Names of each part of ME820 Type S 21 Figure 5 Names of parts of the indicator 25 Figure 6 How to change modes 27 Figure 7 Typical setting mode transition 28 Figure 8 Typical check mode transition 37 Figure 9 Typical test mode tran...

Page 12: ...7 Solenoid valve assembly for Off gas Ozone Analyzer 67 Figure 48 Solenoid valve assembly for Off gas Ozone Analyzer 67 Figure 49 Pump assembly 67 Figure 50 How to replace the Ozone scrubber for High Concentration Ozone Analyzer 68 Figure 51 How to replace the Ozone destruct for Off gas Ozone Analyzer 69 Figure 52 How to replace the filter element 69 Figure 53 How to replace the zero gas filter fo...

Page 13: ...e the value of sensor 1 is 500 or higher Warm up operation time Less than 5 minutes 81 Table 10 State after the warm up operation is completed Warm up operation time 5 minutes or longer 82 Table 11 Lamp control operation at the time of recovery from error 3 or lamp control voltage error 82 Table 12 Pressure loss in each pipe diameter and pipe length 83 Reference material Reference material 1 Relat...

Page 14: ...ce Therefore this enables outdoor use 2 Measuring principle This Analyzer is an UV absorption type ozone analyzer which will detect and measure quantity of UV ray absorbed by ozone in the sample gas introduced into the detector A low pressure mercury lamp emission wavelength 253 7 nm is used for its light source and the quantity of light absorbed by ozone existing within the optical path T obeys t...

Page 15: ...portions inside of the analyzer that are exposed to gas may be eroded damaged or clouded Please note that failures or non measurable state resulting from such damage are not included in the warranty even during warranty period Sample Flow Rate 0 5 1 0 L min 0 5 L min recommended Normal Operating Pressure 0 01 0 10 MPa G internal supply pressure of piping of the analyzer pressure when the adjustmen...

Page 16: ...stance load 250 V AC 1 5 A induction load 30 V DC 5 A resistance load 30 V DC 1 5 A induction load MEASUREMENT Measurement signal c contact ALARM 1 Concentration alarm 1 signal c contact ALARM 2 Concentration alarm 2 signal c contact ERROR Analyzer error signal a contact Analyzer Input Zero calibration input signal insulation output Analog Output 0 1 V DC 0 10 V DC 1 5 V DC 4 20 mA DC One of the a...

Page 17: ...hin the case no condensation Temperature compensation Measurement range 0 C 50 C Temperature compensation 0 C Switchable to 20 C compensation Others Warm up time is settable for duration of 0 to 99 minutes default 10minute Option Pressure compensation Compensation range 80 130 kPa abs optional Pressure sensor Measurement range 0 35 MPa abs 2 Off gas Ozone Analyzer Model ME820 Type S Measuring prin...

Page 18: ... in auto operation Based on zero interval setting Display Main display Red Green 7 Segment LED 4 digits Sub display Red 7 Segment LED 4 digits MODE 5 LED Lamps MES MEASUREMENT Stays on during measurement blinks during zero calibration ALM ALARM1 2 Blinks at occurrence of an alarm ERR ERROR Blinks at occurrence of analyzer error CHK Turns on when check is being conducted blinks during setting mode ...

Page 19: ...IP65 Mass Approximately 15 kg Pipe Ports sample inlet sample exhaust outlet Rc 1 4 socket Sample inlet In the case of connecting the sample gas that can be measured without problems and has removed moisture without using accessory filter and valve assembly Pipe Ports diameter sample gas inlet Select one from the following Ø3 8 inch Ø10 mm switchable between Ø1 4 inch and Ø3 8 inch switchable betwe...

Page 20: ...onal parts 4 Names of each part and description of functions 1 High Concentration Ozone Analyzer Type S Figure 2 Names of each part of ME810 Type S 21 22 20 1 3 42 49 5 4 2 6 7 3 33 32 34 42 41 8 6 2 9 C 7 51 15 16 10 14 13 24 11 19 17 18 12 23 41 27 50 47 26 25 B A ...

Page 21: ...gh Concentration Ozone Analyzer Type R Figure 3 Names of each part of ME810 Type R 5 4 6 7 3 2 45 32 34 42 33 41 36 44 35 29 37 21 22 20 1 3 42 49 45 Optional parts C 7 8 6 2 9 15 16 10 14 13 24 11 19 17 18 44 12 23 41 27 50 25 47 51 Protective cover ...

Page 22: ... 3 Off gas Ozone Analyzer Type S Figure 4 Names of each part of ME820 Type S 3 5 4 2 6 7 41 43 38 39 46 40 48 1 3 21 22 20 49 46 48 Optional parts Protective cover C 7 8 6 2 9 15 51 23 10 18 16 14 13 17 12 19 24 11 41 46 30 29 50 27 26 31 28 25 ...

Page 23: ...ircuit board CNT PCB The control PCB amplifies each sensor signal and converts it to a digital signal 10 Relay input output printed circuit board RL I O PCB The RL I O PCB inputs outputs each control signal and outputs a concentration signal analog output The board is equipped with a power supply for the sample gas pump and the 3 way solenoid valve 11 Power supply printed circuit board P S PCB A p...

Page 24: ...emitting lamp for ozone absorption 26 Ozone scrubber Ozone destruct OZONE DESTRUCT The ozone destruct decomposes ozone in sample gas Ozone scrubber is for High Concentration Ozone Analyzer ME810 and the ozone destruct is for Off gas Ozone Analyzer ME820 They have the same contents with coupling for connection only being different 27 3 way solenoid valve The valve is used to automatically switch th...

Page 25: ...o gas inlet When the flow rate of the zero gas and supply pressure are adjusted the zero gas from which dust etc must be removed using a filter is connected to this zero gas inlet 46 Sample exhaust port EXHAUST OUTLET The exhaust outlet is provided to the Off gas Ozone Analyzer ME820 only and measured ozone gas is decomposed and then discharged from this outlet Ozone gas may be discharged dependin...

Page 26: ...asurement depending on the settings of the sub display In the check mode the light intensity of the sensor 2 and temperature or pressure value are displayed Table 1 Setting mode of sub display Setting mode of sub display AL TP ALTP dAFb Sub display 1 Alarm 1 setting Temperature value Alarm 1 setting or alarm 2 setting Setting control value Sub display 2 Alarm 2 setting Pressure value Temperature o...

Page 27: ...ting ERR Analyzer error indicator lamp Blinks at occurrence of analyzer error CHK Check operation indicator lamp Stays on in check mode and blinks in setting mode TES Test operation indicator lamp Stays on in test mode 5 Unit indicator lamp Selected unit display comes on Depending on the setting g m3 ppm mg L and wt can be displayed wt displays wt Air for air material or wt O2 for oxygen material ...

Page 28: ...ference material 1 for the relation between each mode and each input output signal Figure 6 How to change modes 5 2 1 Measurement mode Ozone concentration measurement is being made while MES mode indicator lamp stays on See 5 4 Zero calibration for details of zero calibration Measurement mode Ozone concentration measurement Setting mode Alarm value setting span setting etc Check mode Sensor output...

Page 29: ...nalog output mode setting dA n Analog output lower limit value setting dA L Analog output upper limit value setting dA H Analog output offset value setting dA o 10 Enter Mode Enter 0000 Enter Mode Enter FFFF Enter Mode Enter 0000 Enter Mode Enter oFF on Enter Mode Enter oFF Mode Enter 0 30 0 10 2000 4000 Enter Mode Enter 4 20 0 10 0 1 1 5 Enter Mode Enter Analog output offset value setting dA o En...

Page 30: ...tly selected temperature pressure compensation setting is displayed To make the setting select a desired compensation mode using the increment switch When the specifications do not include pressure compensation select Ton oFF No compensation Ton Temperature compensation only Pon Pressure compensation only TPon Temperature pressure compensation 5 Offset setting oFF The currently selected offset set...

Page 31: ...ed measured concentration unit setting is displayed Press the increment switch and the unit is displayed in the order shown below Select a suitable unit for measured concentrations Select mg L as a concentration unit for liquid phase ppm g m3 wt Air and wt O2 are units for gas phase Precaution Do not change the unit setting Otherwise analog full scale setting is changed according to a unit when ch...

Page 32: ...lt setting is 0 0 C Precaution Do not change the temperature compensation type setting as far as possible 0 Temperature compensation 0 C 20 Temperature compensation 20 C 13 Pressure compensation type setting P The currently selected pressure compensation type setting is displayed Check the Temperature pressure compensation setting Precaution Do not change the pressure compensation type setting 0 3...

Page 33: ...ng selected at the time of purchase 4 20 4 20 mA DC output 0 10 0 10 V DC output 0 1 0 1 V DC output 1 5 1 5 V DC output 18 Analog output lower limit value setting dA L The currently selected analog output lower limit value setting is displayed Press the shift switch to decrease the value and press the increment switch to increase the value The setting range is from 0000 to FFFF Appropriate factor...

Page 34: ...ature value or pressure value is displayed in sub display 2 Operate the increment switch to switch the display on sub display 1 and operate the shift switch to switch the display on sub display 2 If temperature pressure compensation has not been set actual value is not displayed When dAFb is selected Setting control value is displayed in sub display 1 and lamp control voltage value is displayed in...

Page 35: ...elect a desired value The digit to be changed blinks If 0 min is selected zero calibration by timer is not performed 27 Intermittent zero purge time setting Pg The currently selected intermittent zero purge time setting value is displayed The setting range is from 0 to 99 seconds Press the shift switch to select the digit to be changed and press the increment switch to select a desired value The d...

Page 36: ...ding down the increment switch the sign is changed between plus and minus The settable pressure offset range is 500 hPa abs If the pressure offset range is exceeded Err is displayed 31 Pressure sensor span setting PA S The currently selected pressure span calibration ratio is displayed Select the digit to be changed using the shift switch and select a desired value using the increment switch The d...

Page 37: ...ll length setting Default setting Default setting Measured concentration unit setting Default setting Default setting Analog full scale setting Default setting Default setting Decimal point position setting Default setting Default setting E0 wait time setting Hold Default setting Temperature compensation type setting Pressure compensation type setting Hold Default setting Moving average setting Ho...

Page 38: ...re zero gas is fed Calibration values have been stored in nonvolatile memory even after the power is turned off 5 2 3 Check mode Press the mode switch and if CHK mode indicator lamp comes on the check mode has been entered Use the shift switch or increment switch to move to a desired parameter and press the enter switch to proceed to the check item Press the mode switch to exit the setting item Fi...

Page 39: ...egrated lamp ON time check LAMP Approximate integrated lamp ON time is displayed in unit of 10 hours Perform integrated lamp ON time clear setting when the lamp is replaced 6 Integrated analyzer usage time check ToTL Approximate integrated analyzer usage time is displayed in unit of 10 hours 7 Software version check vEr Software version is displayed 5 2 4 Test mode Press the shift switch and the i...

Page 40: ...nction is valid only in the measurement mode 5 4 Zero calibration As normal zero calibration manual zero calibration intermittent zero calibration and auto zero calibration can be performed Select appropriate one by zero calibration mode setting in accordance with intended use In addition perform zero calibration setting when want to let zero calibration in the state that maintained the signal out...

Page 41: ...veral seconds at the time of the hourly memory Enter switch operation and zero calibration with the zero calibration input signal are memorized just after calibration 1 Zero calibration time Zero calibration time in this mode is the sum of zero gas purge replacement time and the measurement time which is as long as the purge time This purge time can be selected arbitrarily by intermittent zero pur...

Page 42: ...t 3 Auto zero calibration Auto zero Zero calibration is performed sequentially at intervals with the internally set auto zero interval time regarded as one cycle The measurement period can be arbitrarily set by auto zero interval setting between 10 to 60 seconds in increment of 1 second See 5 2 2 Setting mode 25 Auto zero interval setting for details This does not accept enter switch operation and...

Page 43: ...analyzer has temperature compensation function as standard equipment The factory default setting of the compensation temperature is 0 C Compensation is made based on the following formula Temperature compensation formula Ct C 273 15 t 273 15 t0 Ct g m3 N Concentration value after temperature compensation value displayed on the analyzer C g m3 Concentration value at t C and 1013 15 hPa abs uncompen...

Page 44: ...s In such cases pressure compensation must be performed The pressure compensation function can be made valid or invalid but do not change the compensation value of the pressure compensation type setting See 5 2 2 Setting mode 4 Temperature pressure compensation setting for details See 5 2 2 Setting mode 13 Pressure compensation type setting for details See 5 2 2 Setting mode 30 Pressure sensor atm...

Page 45: ...nvex portion on the bottom face of the enclosure and fasten with screws in two places 3 Loosen the mounting nuts of the needle valve insert the coupling on the outlet side of the valve into the coupling of the sample inlet SAMPLE INLET while aligning it with the mounting groove of the needle valve bracket and fasten it with the nuts 4 Fasten the mounting nuts of the needle valve 5 Check that there...

Page 46: ...ening the water trap stopper and the mounting band 3 Fasten the water trap assembly to the enclosure with screws in two places At that time insert the coupling on the side of the water trap outlet securely into the coupling of the sample inlet and fasten it with nuts 4 Fasten the water trap in the order from the water trap stopper and then the mounting band by fastening the loosened four screws At...

Page 47: ...he analyzer sandwich the roof assembly between the analyzer mounting bracket top two positions and the M8 screw and fasten them together in order that the roof assembly becomes parallel with the top face of the enclosure See 6 3 Installation 2 Installation method for details Figure 20 Roof assembly Sandwich between the mounting bracket and M8 screw ...

Page 48: ...d easily Select a sturdy and stable wall or anchor that can endure the weight of the analyzer and select a place where the analyzer can be mounted vertically without fail Figure 21 Maintenance space The maintenance space shown in Figure 21 illustrates the minimum required space not including piping and wiring installation space Install the analyzer taking these conditions into consideration 60 330...

Page 49: ...installation If the enclosure mount Ozone destruct is mounted remove the cover and after the analyzer is installed attach the cover to the original position See 6 2 Preparation for installation for details CAUTION Select a wall or anchor that has strength enduring four times or higher the weight of the analyzer Mount the analyzer at a stable installation place If the analyzer is mounted at a shaky...

Page 50: ...e by approximately 30 mm from the end face of the nut so that it is held by the sheath of the power cable and fasten it with screws in two places 6 Insert the conductor portion of the power cable into L and N of the power terminal block TB1 securely and fasten it with a clamp including PE wire 7 Connect the protective ground wire PE wire to the protective conductor terminal PE terminal securely an...

Page 51: ...om face of the analyzer Also remove the control cable fixing bracket placed within the enclosure 4 Pass the control cable through the fastening nut and the rubber bush in that order and draw the cable into the enclosure through the control cable port 5 Allow the control cable fixing bracket to protrude by approximately 50 mm from the end face of the nut so that it is held by the sheath of the cont...

Page 52: ...due to an error etc In the case of output operation on the b contact side the operation is reversed The contact capacity is 250 V AC 30 V DC 5 A resistance load and 250 V AC 30 V DC 1 5 A inductive load 2 Concentration alarm output ALARM This signal is a no voltage c contact output ALARM 1 AL1 and ALARM 2 AL2 series are available as concentration alarm signals The a contact is made ON when the ozo...

Page 53: ...rminal GND terminal in front of the terminal block See Figure 31 for the functional ground terminal 7 Insert the signal cable into the cable guide and fasten it by the signal cable fixing clamp screw in one place 8 Attach the rubber bush being careful not to apply stress to the signal cable and fasten it using the fastening nut 9 Mount the analog output analyzer input terminal block cover Specific...

Page 54: ...ctional ground wire GND wire to the GND terminal functional ground terminal in front of the terminal block Also connect the GND wire shield on the control side the side receiving signals from this analyzer to the functional ground terminal of the control side 2 Zero contact input signal By short circuiting this terminal zero calibration function is actuated A no voltage contact relay contact 1a is...

Page 55: ...he zero gas filter to the coupling on the inlet side of the zero gas valve assembly 3 Check that the resin coupling is connected to the zero gas filter and connect a PTFE tube or PFA tube for 1 4 inch Ø6 mm The 30 series for 1 4 inch Ø 6 mm coupling by Flowell is mounted as a standard equipment 4 Be sure to fasten the pipe Also check the pipe for leakage Connect the pipe paying attention not to ap...

Page 56: ... water trap sample gas inlet As the coupling for water trap sample gas inlet the 30 series for 3 8 inch Ø10 mm coupling by Flowell is mounted as standard equipment 3 Connect the PTFE tube or PFA tube to the resin coupling Pipes are not accessories Provide pipes matching the coupling 4 Be sure to fasten the pipes Also check the pipes for leakage Check that the manual drain valve is closed Pressure ...

Page 57: ...rged from the ozone gas exhaust Be sure to install an Ozone destruct Just in case the Ozone destruct of the Off gas Ozone Analyzer is broken provide an external Ozone destruct to the sample exhaust outlet Maintain the exhaust port of the Ozone destruct at the atmospheric pressure The temperature of the surface of the Ozone scrubber Ozone destruct optional Ozone destruct may increase Be careful not...

Page 58: ... on 3 Flow rate adjustment High Concentration Ozone Analyzer The ozone analyzer is available in the following two types Type S which adjusts the flow rate of sample gas only and Type R which adjusts the flow rate of the sample gas and that of the zero gas 1 Sample gas flow rate adjustment Feed gas from the sample gas port in a state where ozone is not generated and adjust the flow rate to 0 5 L mi...

Page 59: ...zone gas concentration Also check that the analog output current value or voltage value is proportional to the concentration value 4 Close the front door securely Lock the door as necessary 7 3 Restarting See 7 2 Measurement to restart measurement after the power is turned off 7 4 Storage If the analyzer is not operated for a long period of time perform the following Set the main power supply and ...

Page 60: ...ods 2 Finding concentration using a standard and cross check Concentrations are matched using an accurately calibrated standard and the analyzer installed within the same flow path This analyzer has been span calibrated adjusted before delivery To restore the default calibration value after calibration has been performed frequently see the test report which specifies the default span calibration r...

Page 61: ...terial 5 How to fasten the coupling for details 2 Inspection of the lamp light intensity Check that the lamp light intensity is within the appropriate range If it does not fall within the appropriate range adjust the sensor or replace the lamp Appropriate light intensity range 500 to 4900 measurement allowed See 5 2 3 Check mode 1 Sensor output check for details See 9 5 1 How to replace the lamp u...

Page 62: ... How to replace the filter for details Sample gas pump assembly BZ405A 1 pc 2 years See 9 5 5 How to replace the sample gas pump for details Ozone destruct 1 BZ326B 1 pc 3 years See 9 5 6 How to replace the Ozone scrubber and Ozone destruct for details The replacement cycle may be shorter depending on the operating environment and the state of operation In such cases set appropriate replacement cy...

Page 63: ...es and couplings may be contaminated or corroded due to contamination of sample gas or substances except ozone or materials deterioration by the ozone and thus proper measurement may be inhibited or major components may be adversely affected Severely contaminated or corroded pipes and couplings are handled as consumables and require replacement 2 Attachment detachment If the nuts of couplings are ...

Page 64: ...OFF Replacement work should be performed by educated trained workers 9 5 1 How to replace the lamp unit 1 Be sure to check that the main power circuit breaker and the power switch of the analyzer are set to OFF 2 Remove the connector UV CN while releasing the fitting nail of the connector CN3 of the power supply of the lamp 3 Loosen the knurled screw for fixing Lamp unit upwards and remove it whil...

Page 65: ...nsity do not fall within the 3500 to 3800 range or the difference between S1 value and S2 value is 200 or larger adjust the light intensity in order that it falls within the 3500 to 3800 range using the variable resistor VR1 for S1 adjustment position and variable resistor VR2 for S2 adjustment position on CNT PCB the control board See 5 2 3 Check mode 1 Sensor output check for details 4 After the...

Page 66: ...ng nut on the pipe of the ports NC NO and COM of the solenoid valve and remove the pipes from NC and NO When the pressure option is mounted also remove the fittings and the clamp fastening the piping 4 While holding the solenoid valve bracket remove the two mounting screws and slowly move the solenoid valve downward being careful not to apply stress to the metal pipe of the coupling of COM and rem...

Page 67: ...lve for High Concentration Ozone Analyzer for 1 and 2 See 10 of 1 How to replace the solenoid valve for High Concentration Ozone Analyzer for 11 below 3 Remove the pipe of NO of the solenoid valve from the membrane drier coupling and remove the pipe of COM from the inlet coupling of the optical cell When the pressure option is mounted remove the piping on the COM side from the pressure sensor coup...

Page 68: ...Replacement method 1 Be sure to check that the main power circuit breaker and the power switch of the analyzer are set to OFF 2 Remove the pump cable from the cable clamp and remove the connector from CN5 of the relay printed circuit board RL I O PCB 3 Remove the pipe of IN of the pump from the membrane drier coupling and remove the pipe of OUT from the sample exhaust port 4 Loosen the two screws ...

Page 69: ...rming the work 1 How to replace the Ozone scrubber for High Concentration Ozone Analyzer 1 Check that the main power circuit breaker and the power switch of the analyzer are set to OFF If they are fastened with a banding band etc cut it with a nipper etc 2 Remove the clamp fastening the piping and loosen the nut of the coupling and remove the pipe of NC of the solenoid valve and the outlet side of...

Page 70: ...cing the filter 1 Replacement of the filter for High Concentration Ozone Analyzer As filter replacement of the High Concentration Ozone Analyzer the filter element within the stainless filter holder filter O ring and zero gas filter for zero gas valve assembly are replaced the stainless filter holder will hereafter be abbreviated as the filter holder How to replace the filter element 1 Remove the ...

Page 71: ...fastened with a banding band etc cut it with a nipper etc 3 Connect a new filter to the coupling being careful with the orientation of the arrow FLOW of the filter insert the inlet side of the filter into the filter clamp and fasten them 4 Check that no leakage is occurring set the main power and the power switch of the analyzer to ON close the door and perform concentration measurement How to rep...

Page 72: ... Mount a new flowmeter to the coupling fastened to the flowmeter bracket Be sure to fasten the coupling nut Be careful with the orientation of the flowmeter 7 Hang the flowmeter bracket assembly on the three fastening screws insert the flowmeter while holding the coupling at the bottom of the flowmeter fasten it with the nut check that the flowmeter remains upright and fasten it with the screws Be...

Page 73: ...er only Be sure to feed source gas or zero gas gas not containing ozone etc to make sure that no ozone gas exists within the piping and close a needle valve before replacing the membrane drier Replacement method 1 Check that the main power and the power switch of the analyzer are set to OFF 2 Loosen the four coupling nuts of the membrane drier and remove the pipes connected to the sample gas filte...

Page 74: ... the grooves on the right and left sides of the bracket 6 Set the main power and the power switch of the analyzer to ON close the door and perform concentration measurement 10 Error display 10 1 Self diagnostic error display By the self diagnostic function analyzer error is diagnosed error display is given and an abnormal signal is output The indicator displays the relevant error code the measurem...

Page 75: ...eration permitted Operation permitted 2 E6 ON OFF Maintained Maintained ON Operation only Maintained Operation only E6 blinks OFF Operated Operated ON Operation permitted Operated Operation permitted Sensor light intensity alarm ON Operated Operated OFF Operation permitted Operated Operation permitted Operated for 5 minutes Warm up operation OFF OFF OFF OFF OFF 0V 1V 4Ma S1 Less than 0 5V OFF Oper...

Page 76: ...ght intensity of sensor 1 and that of sensor 2 decrease to lower than 500 The analyzer enters the warm up operation mode once the light intensity returns to normal Not operated for 5 minutes after the power is turned on Lamp voltage control operation is not performed after the warm up operation See 5 2 3 Check mode 1 Sensor output check for details 5 E4 5 Not used 6 E6 1 E6 ON E6 comes on when the...

Page 77: ... the power is turned on See 5 2 3 Check mode 1 Sensor output check for details 2 Lamp control voltage alarm display The concentration display value turns red if the lamp control voltage value does not fall within the specified range in the measurement mode entered when 5 minutes elapse after the power is turned on due to break in interface cable poor contact circuit failure etc Not operated for 5 ...

Page 78: ... Zero calibration for details Check that no ozone gas is contained 2 Feed zero gas and check the light intensity of sensor 1 and that of sensor 2 See 5 2 3 Check mode 1 Sensor output check for details Cell contamination or mercury lamp or sensor error is considered Contact us if the symptom persists even after the lamp is replaced with a new one E3 Feed zero gas and check the light intensity of se...

Page 79: ...ing an order with us specify the model of your desired analyzer and select specifications from the above model codes Be sure to select mandatory items marked with If there is no designation standard selection will become applicable Normally in standard specification optional functions OP and optional codes are None ...

Page 80: ...with us specify the model of your desired analyzer and select specifications from the above model codes Be sure to select mandatory items marked with If there is no designation standard selection will become applicable Normally in standard specification optional functions OP and optional codes are None ...

Page 81: ...tence of high concentration acidic gases etc in the sample gas 7 Pump failure and performance degradation due to the effect of moisture and acidic gas Degradation of diaphragm material degradation and adhesion of valve material etc This product is covered by the warranty during the warranty period only We are not responsible for compensating any damage caused by its use such as lost earnings perso...

Page 82: ...er Warm up operation time Less than 5 minutes Item measurement value Concentra tion output Alarm output Error judgment Sensor light intensity alarm display Lamp control voltage alarm display Erroneous lamp ON judgment E1 E3 E6 E6 Blink E0 E2 Oper ation 0 Zero display 4mA 0V 1V Zero output Invalid No ALM ON Invalid ERR display No ERR ON Invalid No red display Valid Red display permitted Invalid Lam...

Page 83: ...r turns red when the voltage level does not fall within the specified control voltage range Types of signal output Measurement in progress signal MES Concentration alarm 1 2 signal AL1 2 Error signal E0 E1 E2 E3 E6 Blink Table 11 Lamp control operation at the time of recovery from error 3 or lamp control voltage error Error Operation E3 Lamp control voltage Lower limit error E6 blink Lamp control ...

Page 84: ...ons and measurement environment Install piping allowing sufficient pipe length Recommended pipe length is the one that allows pressure loss within the pipe to be ignored However in some cases pressure compensation may be necessary Reference material 4 Description of Pollution Degree 2 Only non conductive pollution occurs that occasionally a temporary conductivity caused by condensation to be expec...

Page 85: ...EOP D73 001 7 002 05E E J OZONE PRODUCTS 84 Outline drawing 1 Outline drawing of Type S High Concentration Ozone Analyzer Figure 62 Outline drawing of Type S High Concentration Ozone Analyzer ...

Page 86: ...EOP D73 001 7 002 05E E J OZONE PRODUCTS 85 2 Outline drawing of Type R High Concentration Ozone Analyzer Figure 63 Outline drawing of Type R High Concentration Ozone Analyzer ...

Page 87: ...EOP D73 001 7 002 05E E J OZONE PRODUCTS 86 3 Outline drawing of Type S Off gas Ozone Analyzer Figure 64 Outline drawing of Type S Off gas Ozone Analyzer ...

Page 88: ...EOP D73 001 7 002 05E E J OZONE PRODUCTS 87 Flow diagram 1 Flow diagram of High Concentration Ozone Analyzer Type S Figure 65 Flow diagram of High Concentration Ozone Analyzer Type S ...

Page 89: ...EOP D73 001 7 002 05E E J OZONE PRODUCTS 88 2 Flow diagram of High Concentration Ozone Analyzer Type R Figure 66 Flow diagram of High Concentration Ozone Analyzer Type R ...

Page 90: ...EOP D73 001 7 002 05E E J OZONE PRODUCTS 89 3 Flow diagram of Off gas Ozone Analyzer Type S Figure 67 Flow diagram of Off gas Ozone Analyzer Type S ...

Page 91: ...EOP D73 001 7 002 05E E J OZONE PRODUCTS 90 Circuit diagram Figure 68 Circuit diagram ...

Page 92: ...EOP D73 001 7 002 05E E J OZONE PRODUCTS 91 Memo ...

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