3-4
Brooks
®
Digital MFC's & MFM's
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
3-4
Analog I/O Mode of Operation
The following paragraphs describe the basic features of the Brooks Digital
Series Mass Flow Meters/Controllers.
Functional Description
The analog interface may include any of the following I/O options as
specified by the user:
0 - 5 Vdc setpoint, 0 - 5 Vdc flow output
1 - 5 Vdc setpoint, 1 - 5 Vdc flow Output
0 - 20 mA setpoint, 0 - 20 mA flow output
4 - 20 mA setpoint, 4 - 20 mA flow output
0 - 10 Vdc setpoint, 0 - 10 Vdc flow output
Also included is the Valve Override input pin. All analog signals available
are on the 15 pin D-Connector. (See Fig. 2-1 for connections). The
contents of the ten calibrations are determined from the customer order.
Only those calibrations ordered will be available in the instrument. Unless
otherwise specified, a Brooks Digital MFC/MFM ordered with only one
calibration will have that calibration stored in calibration #1.
Before operating the MFC/MFM, apply power and warm-up the instrument
for approximately 45 minutes. After warm-up, apply gas pressure then
proceed by following the instructions in the following sections.
Analog I/O Setpoint (MFC Only)
This input allows the user to establish the MFC setpoint,. Several input
types are available as follows:
Analog I/O Flow Signal
This output is used to indicate the flow signal. A negative flow signal
indicates reverse flow through the device, but is NOT calibrated.
Several flow signal types are available:
Analog I/O Type
Full Scale
Minimum Signal
Maximum Signal
0 to 5 Vdc
5 Vdc
-0.5 V
5.5 Vdc = 110%
1 to 5 Vdc
5 Vdc
0.5 V
5.5 Vdc = 111%
0 to 20 mA
20 mA
0 mA
22 mA = 110%
4 to 20 mA
20 mA
3.8 mA
22 mA = 111%
0 to 10 Vdc
10 Vdc
0 V
11 Vdc = 110%
Setpoint Signal Type
Full Scale
Minimum Signal
Maximum Signal
0 to 5 Vdc
5 Vdc
0 V
5.5 Vdc = 110%
1 to 5 Vdc
5 Vdc
1 V
5.5 Vdc = 111%
0 to 20 mA
20 mA
0 mA
22 mA = 110%
4 to 20 mA
20 mA
4 mA
22 mA = 111%
0 to 10 Vdc
10 Vdc
0 V
11 Vdc = 110%
Valve Override (MFC Only)
Valve Override Input allows the valve to be forced to its most closed state
or its most open state, regardless of setpoint. If this input is not electrically
connected, the MFC will operate according to the current values of the
other MFC inputs. If this input is held at 0 Vdc or -15 Vdc the valve will be
forced to its most closed state. If this input is held at +5 Vdc or greater
(max. = 24 Vdc), the valve will be forced to its open state.
