2-2
Brooks
®
Digital MFC's & MFM's
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Models
Maximum Flow Rate
Recommended Filter
SLA5850/60
100 ccm
2 micron
SLA5850/60
500 ccm
2 micron
SLA5850/60
1 to 5 lpm
10 micron
SLA5850/60
10 to 50 lpm
40 micron
SLA5851/61
15 to 100 lpm
40 micron
SLA5853/63
> 100 lpm
Consult factory
Note: Brooks provides many filter options. For those not listed here, please contact factory.
2-5
Transit Precautions
To safeguard against damage during transit, transport the instrument to the
installation site in the same container used for transportation from the
factory if circumstances permit.
2-6
Removal from Storage
Upon removal from storage, a visual inspection should be conducted to
verify the condition of the equipment is “as received.” If the equipment has
been in storage in conditions in excess of those recommended
(See Section 2-3), the device should be subjected to a pneumatic pressure
test in accordance with applicable vessel codes.
2-7
Gas Connections
Prior to installation ensure all piping is clean and free from obstructions.
Install piping in such a manner that permits easy access to the instrument
if removal becomes necessary.
2-8
In-Line Filter
Unless an integrated (internal) filter is already installed, it is recommended
that an in-line filter be installed upstream from the mass flow controller or
meter to prevent the possibility of any foreign material entering the flow
sensor or control valve MFC. The filtering element should be replaced
periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
