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Brooks
®
Digital MFC's & MFM's
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Internal Power Supply Failure
This alarm will occur when any internally generated power supply voltage
falls outside operational limits. Internal supply voltages must be within their
nominal limits.
Valve Drive Out of Limits
The Valve Drive Out of Limits alarm will occur when the valve drive is
below the low limit or above the high limit.
Device Calibration Due
The Device Calibration Due alarm occurs after the specified elapsed hours
indicating that the device requires recalibration. The default setting is 8760
hours, equivalent to one year. The alarm will be cleared either by disabling
it or changing the setting.
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Calibration/Configuration Sets
All Flow Calibration parameters and some of the device configuration
parameters are saved in the device Non-Volatile Memory as “sets”. Up to
6 sets of calibration/configuration sets can be saved in order to have a unit
pre-configured for multiple gas calibration, different pressure conditions,
multiple scalings of the same gas.
Calibration and configuration data sets may be adjusted by an advanced
user via the Diagnostics Port using a special software application available
from Brooks. Reference the Brooks Expert Support Tool User Manual
(BEST) for more information about the Diagnostic Port and software
application.
Flow Calibration Options
In addition to the factory calibration polynomial, the following calibration
options are provided to modify the factory calibration:
-
Gas Correction Factor
-
Calibration Scaling
-
User Calibration Polynomial
Configuration Options
The following configuration parameters are stored in the Calibration/
Configuration Sets:
-
P, I, and D
-
Valve Offset, Span, and Leaktight Offset
-
Pole Compensation and filtering
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Special Features
Special Features may be adjusted by an advanced user via the
Diagnostics Port using a special software application available from
Brooks. Reference the Brooks Expert Support Tool User Manual (BEST)
for more information about the Diagnostic Port and software application.
