2-3
Brooks
®
Digital MFC's & MFM's
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
2-9
Installation
Recommended installation procedures:
a. The Brooks Digital MFC or MFM should be located in a clean,
dry atmosphere relatively free from shock and vibration.
b. Leave sufficient room for access to Self-zero function push-button.
c. Install in such a manner that permits easy removal if the instrument
requires servicing.
d. The Brooks Digital MFC or MFM can be installed in any position.
However, mounting in orientations other than the original factory
calibration(see calibration data sheet supplied with the instrument) can
result in a<±0.2% maximum full scale shift after re-zeroing.
e. When installing a mass flow controller or meter with full scale flow rates
of 10 lpm or greater, be aware that sharp, abrupt angles in the system
piping directly upstream of the controller may cause a small shift in
accuracy. If possible, have at least ten pipe diameters of straight tubing
upstream of the mass flow controller or meter. This is not required for
meters with an integrated filter.
