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Model 2651A High Power
System SourceMeter

®

 Instrument

User’s Manual

2651A-900-01 Rev. A / March 2011

Summary of Contents for 2651A

Page 1: ...www keithley com E C N E D I F N O C F O E R U S A E M R E T A E R G A Model 2651A High Power System SourceMeter Instrument User s Manual 2651A 900 01 Rev A March 2011...

Page 2: ...strictly prohibited All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments Inc Other brand names are trademarks or registered trademarks of their respec...

Page 3: ...ll measurement control and data I O connections are for connection to Category I sources unless otherwise marked or described in the user documentation Exercise extreme caution when a shock hazard is...

Page 4: ...tation explains dangers that might result in personal injury or death Always read the associated information very carefully before performing the indicated procedure The CAUTION heading in the user do...

Page 5: ...guration tab 3 2 TSB Embedded 3 3 Create a script using TSB Embedded 3 3 Exercise Create and run a script with TSB Embedded 3 4 Reading buffers 3 7 Exercise Retrieve readings from a buffer 3 7 TSP Exp...

Page 6: ...2651A trigger model operation 6 7 Series 26xxA instrument s trigger model operation 6 9 Example program code 6 10 Example program usage 6 16 Increasing SMU current sourcing ability 7 1 Introduction to...

Page 7: ...al Table of Contents 2651A 900 01 Rev A March 2011 iii The internal web page of the instrument is not accessible 8 1 Save the present state of the instrument 8 2 LabVIEW driver for the Model 2651A 8 2...

Page 8: ...bility with the Series 2600A Extended warranty Additional years of warranty coverage are available on many products These valuable contracts protect you from unbudgeted service expenses and provide ad...

Page 9: ...ment to develop a test program but also the ability to load the test program onto the instrument Running a program loaded on the instrument eliminates the need to send individual commands from the hos...

Page 10: ...s and IGBTs This example introduces the interaction between two instruments trigger models The application performs pulsed measurements collecting IV curve data and placing it in a Microsoft Excel com...

Page 11: ...to work through the examples provided in this manual The front panel of the Keithley Instruments Model 2651A contains the following items 1 The POWER key 2 The display 3 The navigation wheel 4 The OUT...

Page 12: ...the instrument The items listed below represent the possible display indicators and what they mean Indicator Meaning EDIT Unit is in the source editing mode ERR Questionable reading or invalid calibra...

Page 13: ...also sets the measurement speed and accuracy by controlling the measurement aperture REL Controls relative measurements This allows a baseline value to be subtracted from a reading FILTER Enables or...

Page 14: ...ue 6 Press the ENTER key or the navigation wheel when finished changing all the characters To change a value using the numeric keypad NOTE The numeric entry method may only be used if the numeric keyp...

Page 15: ...e Connect to the instrument web interface NOTE The instrument web interface requires the web browser plug in JavaTM SE Runtime Environment Version 6 or later The latest version of the plug in is avail...

Page 16: ...use the following instructions to connect to the instrument web interface 1 Confirm the LAN light on the instrument is illuminated The LAN light is located on the rear panel as part of the LAN RJ 45 c...

Page 17: ...use to issue commands and interact with the instrument TSB Embedded also provides a convenient way to create and manage user scripts TSB Embedded resides in the instrument You can use TSB Embedded to...

Page 18: ...function and range Volts autorange Source output level 5 V Current compliance limit 10 mA Measure function and range Current 10 mA To create and run a sample script with TSB Embedded 1 From the naviga...

Page 19: ...urce function smua source func smua OUTPUT_DCVOLTS Set source range to auto smua source autorangev smua AUTORANGE_ON Set voltage source to 5 V smua source levelv 5 Set current limit to 10 mA smua sour...

Page 20: ...trument Output box displays any error messages and output from the script 10 If no errors appear but readings do click Run a few times to populate the buffer Each time the script is run readings appea...

Page 21: ...t with TSB Embedded on page 3 4 Exercise Retrieve readings from a buffer To retrieve readings from a populated buffer 1 From the navigation area on the left side of the web interface select Reading Bu...

Page 22: ...ue column is not populated To collect source values before taking readings use TSB Embedded to set the following attribute smua nvbuffer1 collectsourcevalues 1 Figure 8 Sample downloaded reading buffe...

Page 23: ...rea on the left side of the web interface select TSP Express The TSP Express page is displayed 2 Click the Launch button The TSP Express window opens 3 There is a help pane on the right side of the ma...

Page 24: ...Section 3 Using the web interface Model 2651A High Power System SourceMeter Instrument User s Manual 3 10 2651A 900 01 Rev A March 2011 Figure 10 TSP Express...

Page 25: ...lues are used Equipment needed for this example To run this example you will need the following equipment Model 2651A High Power System SourceMeter Instrument Additional cable and connector assemblies...

Page 26: ...he lowest possible range for the best accuracy 4 Set the source value to 10 0000 V and then press the ENTER key or the navigation wheel to complete editing Step 2 Set compliance limit Perform the foll...

Page 27: ...readings The readings are on the top line and source and limit values are on the bottom line For the 10 k resistor typical display values are 1 00000mA SrcA 10 0000 V LimA 010 0000mA 2 Press the MEAS...

Page 28: ...ffers 18 bit resolution providing for high accuracy even at high speed The fast ADC of the Model 2651A allows this instrument to be used in a broad range of applications such as negative bias temperat...

Page 29: ...rated in the following figure To ensure good contact use care when making connections Figure 13 Connections for fast ADC example G G G G S LO SENSE GUARD S HI LO HI OUTPUT 40V 50A MAX S HI HI S LO LED...

Page 30: ...e pulse When the trigger model of the Model 2651A is initialized the following occurs 1 The source measure unit SMU trigger model Leaves the idle state Flows through the Arm Layer Enters the Trigger L...

Page 31: ...owever modification of the example code may be required to do so The following script contains all the code necessary to output and capture a current or voltage pulse using the Model 2651A fast ADC Th...

Page 32: ...numPulses nil then numPulses 1 end Configure the SMU reset smua reset smua source func smua OUTPUT_DCVOLTS smua sense smua SENSE_REMOTE smua source rangev pulseLevel smua source levelv 0 The bias leve...

Page 33: ...rv pulseLevel pulseLevel 2 smua trigger source limiti pulseLimit smua trigger measure action smua ASYNC We want to start the measurements before the source action takes place so we must configure the...

Page 34: ...numPulses nil then numPulses 1 end Configure the SMU reset smua reset smua source func smua OUTPUT_DCAMPS smua sense smua SENSE_REMOTE smua source rangei pulseLevel smua source leveli 0 The bias leve...

Page 35: ...neari pulseLevel pulseLevel 2 smua trigger source limitv pulseLimit smua trigger measure action smua ASYNC We want to start the measurements before the source action takes place so we must configure t...

Page 36: ...ts Description pulseLevel Volts The voltage level of the pulse pulseWidth Seconds The width of the pulse pulseLimit Amperes The current limit of the pulses to output numPulses Not applicable The numbe...

Page 37: ...urePulseI 50 300e 6 50 5 This call will output five 50 A pulses with a 300 s pulse width The pulses will be limited to 10 V and have a 1 duty cycle At the completion of the pulsed outputs the SMU outp...

Page 38: ...mance of the device under test DUT at various gate voltages In this test the gate of the device is held at a constant voltage while the voltage on the drain or collector of the device is swept and cur...

Page 39: ...this test you will need the following equipment Model 2651A High Power System SourceMeter Instrument Series 2600A System SourceMeter Instrument see NOTE TSP Link cable Keithley Instruments part numbe...

Page 40: ...using the front panel interface 1 Press the MENU key 2 Select TSPLink 3 Select NODE 4 Use the navigation wheel to adjust the node number 5 Press the ENTER key to save the TSP Link node number On the...

Page 41: ...red Gate resistor if required HI LO LO S LO LO S LO Model 2651A master node 1 Series 26xxA subordinate node 2 Equivalent SMU subordinate node 2 SMU master node 1 HI S HI HI S HI LO S LO LO S LO Model...

Page 42: ...sweep The Series 2600A is configured to sweep the voltage applied to the gate of the device The Model 2651A is configured to sweep the voltage across the drain or collector of the device The Model 265...

Page 43: ...gger 2 EVENT_ID stimulus mode tsplink TRIG_FALLING tsplink trigger 1 EVENT_ID stimulus mode tsplink TRIG_SYNCHRONOUSM tsplink trigger 2 EVENT_ID stimulus mode tsplink TRIG_FALLING tsplink trigger 1 EV...

Page 44: ...ount 21 IDLE_EVENT_ID SWEEPING_EVENT_ID SWEEP_COMPLETE_EVENT_ID ARMED_EVENT_ID SOURCE_COMPLETE_EVENT_ID MEASURE_COMPLETE_EVENT_ID PULSE_COMPLETE_EVENT_ID arm stimulus source stimulus measure stimulus...

Page 45: ...Pulse Event Detector receives the event trigger from timer 2 sets the SMU output to the bias level and then continues 12 The trigger model checks the current Trigger Layer iteration number against th...

Page 46: ...Link trigger 1 2 A TSP Link trigger is received by TSP Link trigger 1 Because TSP Link trigger 1 is configured as a synchronous acceptor it latches the line low and outputs an event trigger to the SM...

Page 47: ...nd IGBT devices The script contains all the code necessary to Initialize the TSP Link connection Configure the output and trigger models of the source measure unit SMU as described in the previous sec...

Page 48: ...sweep dstart The starting voltage of the drain sweep dstop The ending voltage of the drain sweep dsteps The number of steps in the drain sweep pulseWidth The width of the drain pulse in seconds pulseP...

Page 49: ...gger timer 2 clear Configure Drain SMU 2651A trigger model smua trigger source linearv dstart dstop dsteps smua trigger source limiti pulseLimit smua trigger measure action smua ENABLE smua trigger me...

Page 50: ...ighc to node 2 smua ENABLE can improve stability Configure Gate SMU 26xxA Trigger Model node 2 smua trigger source linearv gstart gstop gsteps node 2 smua trigger source limiti 100e 3 node 2 smua trig...

Page 51: ...mode nil then node 2 smua nvbuffer1 fillmode node 2 smua FILL_ONCE end The SMUs are configured and ready to run the test Outputs on node 2 smua source output node 2 smua OUTPUT_ON smua source output s...

Page 52: ...number of steps in the gate sweep dsteps The number of steps in the drain sweep Example Usage PrintIVcurveData 5 21 function PrintIVcurveData gsteps dsteps line1 line2 for i 1 gsteps do line1 line1 s...

Page 53: ...el of the last step in the drain collector sweep dsteps Not applicable The number of steps in the drain collector sweep pulseWidth Seconds The width of the pulse in the drain collector sweep pulsePeri...

Page 54: ...erformed on power MOSFETs characterizes the resistance of the device under test DUT In this test the gate of the DUT is held at a constant voltage representing the on state of the device while a curre...

Page 55: ...d configure the appropriate output off state source and compliance levels before connecting the Model 2651A High Power System SourceMeter Instrument to a device that can deliver energy for example oth...

Page 56: ...under test DUT for example Model 2651A KIT and Model 2600 KIT see Device connections on page 7 4 for a schematic of required connections NOTE The Model 2651A High Power System SourceMeter Instruments...

Page 57: ...eset from the remote command interface by sending tsplink reset to the Model 2651A This method is used in the example program Device connections To run the test make the connections as illustrated in...

Page 58: ...3 G D S Equivalent SMU subordinate node 3 SMU master node 1 HI S HI HI S HI S LO LO S LO LO SMU subordinate node 2 HI S HI S LO LO Model 260xA Model 261xA or Model 263xA Gate resistor if required Gat...

Page 59: ...f this trigger model In this trigger model the master Model 2651A node 1 is configured to control the overall timing of the sweep Subordinate Model 2651A node 2 is configured to wait for signals from...

Page 60: ...D passthrough true count 99 stimulus tsplink trigger 1 EVENT_ID stimulus mode tsplink TRIG_FALLING tsplink trigger 1 EVENT_ID stimulus mode tsplink TRIG_FALLING node 2 Model 2651A master node 1 Model...

Page 61: ...ns to count down 6 The SMU trigger model continues to the Measure Event where it waits a programmed measure delay if any takes a measurement and continues until it encounters the End Pulse Event where...

Page 62: ...Event where it waits for an event trigger 6 The timer 1 countdown expires and timer 1 outputs an event trigger to the SMU End Pulse Event 7 The SMU s End Pulse Event Detector receives the event trigg...

Page 63: ...cute the test To execute the test run the script to load the functions into test script memory and then call the functions Refer to the documentation for Test Script Builder or TSB Embedded for direct...

Page 64: ...e nodes are present reset Configure 2651A 1 Drain SMU 1 smua reset smua source func smua OUTPUT_DCAMPS smua sense smua SENSE_REMOTE smua source offmode smua OUTPUT_NORMAL smua source offfunc smua OUTP...

Page 65: ...ARMED_EVENT_ID trigger timer 1 clear Timer 2 controls the pulse width trigger timer 2 count 1 trigger timer 2 delay pulseWidth 3e 6 trigger timer 2 passthrough false trigger timer 2 stimulus smua trig...

Page 66: ...de 2 smua nvbuffer2 clear node 2 smua nvbuffer2 collecttimestamps 1 node 2 smua nvbuffer2 collectsourcevalues 1 node 2 smua nvbuffer2 fillmode node 2 smua FILL_ONCE Configure TSP Link Trigger 1 node 2...

Page 67: ...3 smua nvbuffer2 collectsourcevalues 1 if node 3 smua nvbuffer2 fillmode nil then node 3 smua nvbuffer2 fillmode node 3 smua FILL_ONCE end Ready to begin the test Outputs on node 3 smua source output...

Page 68: ...ltage 1 tCurrent 1 tVoltage 2 tCurrent 2 tVoltage tCurrent tRds on Loop through the reading buffer printing one row at a time for i 1 smua nvbuffer1 n do Combined Source Level SMU1 source level SMU2 s...

Page 69: ...ble The number of steps in the drain sweep pulseWidth Seconds The width of the pulse in the drain sweep pulsePeriod Seconds The time between the start of consecutive pulses in the drain sweep pulseLim...

Page 70: ...What do I need to do The Model 2651A supports a line frequency of either 50 Hz or 60 Hz The factory configures the Model 2651A to automatically detect and operate at line frequencies either 50 Hz or 6...

Page 71: ...ng the manual configuration method over a corporate network verify that you have entered the IP address gateway and subnet mask provided by your network administrator If you are using the manual confi...

Page 72: ...on for switch cards that are compatible with the Model 2651A The Keithley Instruments website http www keithley com Contains the most up to date information from the website you can access The Knowled...

Page 73: ...e readings from buffer 3 7 Export script 3 6 F Fast ADC CapturePulseI 5 9 CapturePulseV 5 9 Communication setup 6 2 Device connections 6 4 Example program code 6 10 6 16 High power pulse 5 1 Trigger m...

Page 74: ...Viewing 3 6 Node SMU TSP Link 6 2 Combining to increase current sourcing 7 1 Number keys 2 2 Source Level 4 2 O Speed Operation keys Fast sampling ADC 5 1 ENTER 2 2 Sweep EXIT 2 2 Parameters adjust 6...

Page 75: ...dex 2651A 900 01 Rev A March 2011 Index 3 TSP Link Nodes 6 2 V Voltage Source set level 4 2 W Warranty 1 1 Web interface 3 1 Accessing 3 1 Browser requirements 3 1 Home page 3 2 IP address configurati...

Page 76: ...of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies A G R E A T E R M E A S U R E O F C O N F I D E N C E Keithley Instruments Inc Corporate...

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