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A-9

Section A Essential Instructions

Installation and Operation Manual

X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017

Brooks

Digital MFC's and MFM's

Greek

ǺĮıȚțȑȢ

ȠįȘȖȓİȢ

ǻȚĮȕȐıĲİ

ʌȡȚȞ

ıȣȞİȤȓıİĲİ

Brooks Instrument

ıȤİįȚȐȗİȚ

ʌĮȡȐȖİȚ

țĮȚ

įȠțȚȝȐȗİȚ

ĲĮ

ʌȡȠȧȩȞĲĮ

ĲȘȢ

ıİ

ıȣȝȝȩȡĳȦıȘ

ȝİ

ʌȜȒșȠȢ

İșȞȚțȫȞ

țĮȚ

įȚİșȞȫȞ

ʌȡȠĲȪʌȦȞ

ıȦıĲȒ

İȖțĮĲȐıĲĮıȘ

ȤȡȒıȘ

țĮȚ

ıȣȞĲȒȡȘıȒ

ĲȠȣȢ

ĮʌȠĲİȜİȓ

ĮʌĮȡĮȓĲȘĲȘ

ʌȡȠȨʌȩșİıȘ

ĲȘȢ

ȜİȚĲȠȣȡȖȓĮȢ

İȞĲȩȢ

ĲȦȞ

țĮȞȠȞȚțȫȞ

ȠȡȓȦȞ

ȅȚ

ʌĮȡĮțȐĲȦ

ȠįȘȖȓİȢ

ʌȡȑʌİȚ

ȞĮ

ĲȘȡȠȪȞĲĮȚ

țĮȚ

ʌȡȑʌİȚ

ȞĮ

İȞıȦȝĮĲȦșȠȪȞ

ıĲȠ

ʌȡȩȖȡĮȝȝĮ

ĮıĳȐȜİȚĮȢ

ĲȘȢ

İȡȖĮıȓĮȢ

ıĮȢ

țĮĲȐ

ĲȘȞ

İȖțĮĲȐıĲĮıȘ

ȤȡȒıȘ

țĮȚ

ıȣȞĲȒȡȘıȘ

ʌȡȠȧȩȞĲȦȞ

ĲȘȢ

Brooks Instrument.

īȚĮ

ıȦıĲȩ

ĮʌȠĲȑȜİıȝĮ

İȖțĮĲȐıĲĮıȘ

ȜİȚĲȠȣȡȖȓĮ

İȞȘȝȑȡȦıȘ

ʌȡȠȖȡĮȝȝĮĲȚıȝȩȢ

țĮȚ

ıȣȞĲȒȡȘıȘ

ʌȡȑʌİȚ

ȞĮ

ȖȓȞİĲĮȚ

Įʌȩ

İȚįȚțİȣȝȑȞȠ

ʌȡȠıȦʌȚțȩ

ǻȚĮȕȐıĲİ

ȩȜİȢ

ĲȚȢ

ȠįȘȖȓİȢ

ʌȡȚȞ

İȖțĮĲĮıĲȒıİĲİ

ȜİȚĲȠȣȡȖȒıİĲİ

țĮȚ

ıȣȞĲȘȡȒıİĲİ

ĲȠ

ʌȡȠȧȩȞ

ǼȐȞ

ĲȠ

ʌĮȡȩȞ

İȖȤİȚȡȓįȚȠ

įİȞ

İȓȞĮȚ

ĲȠ

ıȦıĲȩ

İȖȤİȚȡȓįȚȠ

ıȣȝȕȠȣȜİȣșİȓĲİ

ĲȠ

ʌȓıȦ

İȟȫĳȣȜȜȠ

ȖȚĮ

ĲĮ

ıĲȠȚȤİȓĮ

İʌȚțȠȚȞȦȞȓĮȢ

ĲȠȣ

ĲȠʌȚțȠȪ

ĮȞĲȚʌȡȠıȫʌȠȣ

ĭȣȜȐȟĲİ

ĲȠ

İȖȤİȚȡȓįȚȠ

ĮȣĲȩ

ȖȚĮ

ȝİȜȜȠȞĲȚțȒ

ĮȞĮĳȠȡȐ

ȆȇȅǼǿǻȅȆȅǿǾȈǾ

ȂȘ

ȜİȚĲȠȣȡȖİȓĲİ

ĲȘ

ıȣıțİȣȒ

ĮȣĲȒ

țĮș

’

ȣʌȑȡȕĮıȘ

ĲȦȞ

ȠȡȓȦȞ

ʌȠȣ

ĮȞĮȖȡȐĳȠȞĲĮȚ

ıĲȠ

ǼȖȤİȚȡȓįȚȠ

ȅįȘȖȚȫȞ

țĮȚ

ȁİȚĲȠȣȡȖȓĮȢ

ȝȘ

ıȣȝȝȩȡĳȦıȘ

ȝİ

ĲȘȞ

ʌȡȠİȚįȠʌȠȓȘıȘ

ĮȣĲȒ

ȝʌȠȡİȓ

ȞĮ

ȠįȘȖȒıİȚ

ıİ

ıȠȕĮȡȩ

ʌȡȠıȦʌȚțȩ

ĲȡĮȣȝĮĲȚıȝȩ

țĮȚ

ȗȘȝȚȐ

ıĲȠȞ

İȟȠʌȜȚıȝȩ

Ȉİ

ʌİȡȓʌĲȦıȘ

ȝȘ

țĮĲĮȞȩȘıȘȢ

țȐʌȠȚĮȢ

Įʌȩ

ĲȚȢ

ȠįȘȖȓİȢ

ȗȘĲȒıĲİ

įȚİȣțȡȚȞȓıİȚȢ

Įʌȩ

ĲȠȞ

ĲȠʌȚțȩ

ĮȞĲȚʌȡȩıȦʌȠ

ĲȘȢ

Brooks Instrument.

ȉȘȡİȓĲİ

ȩȜİȢ

ĲȚȢ

ʌȡȠİȚįȠʌȠȚȒıİȚȢ

ʌȡȠĳȣȜȐȟİȚȢ

țĮȚ

ȠįȘȖȓİȢ

ʌȠȣ

ĮȞĮȖȡȐĳȠȞĲĮȚ

ıȣȞȠįİȪȠȣȞ

ĲȠ

ʌȡȠȧȩȞ

ȆȇȅǼǿǻȅȆȅǿǾȈǾ

ȆȡȚȞ

Įʌȩ

ĲȘȞ

İȖțĮĲȐıĲĮıȘ

ȕİȕĮȚȦșİȓĲİ

ȩĲȚ

ĮȣĲȩ

ĲȠ

İȡȖĮȜİȓȠ

įȚĮșȑĲİȚ

ĲȚȢ

ĮʌĮȚĲȠȪȝİȞİȢ

İȖțİțȡȚȝȑȞİȢ

ʌȡȠįȚĮȖȡĮĳȑȢ

ȫıĲİ

ȞĮ

ıȣȝȝȠȡĳȫȞİĲĮȚ

ȝİ

ĲȠȣȢ

ĲȠʌȚțȠȪȢ

țĮȚ

İșȞȚțȠȪȢ

țĮȞȠȞȚıȝȠȪȢ

ĮʌȠĲȣȤȓĮ

ĲȒȡȘıȘȢ

ĲȘȢ

ʌĮȡȠȪıĮȢ

ʌȡȠİȚįȠʌȠȓȘıȘȢ

ȝʌȠȡİȓ

ȞĮ

ȠįȘȖȒıİȚ

ıİ

ıȠȕĮȡȩ

ĲȡĮȣȝĮĲȚıȝȩ

țĮȚ

ȗȘȝȚȐ

ıĲȠȞ

İȟȠʌȜȚıȝȩ

ǼȖțĮĲĮıĲȒıĲİ

ĲȘ

ıȣıțİȣȒ

ȩʌȦȢ

ʌȡȠȕȜȑʌİĲĮȚ

ıĲȚȢ

ȠįȘȖȓİȢ

İȖțĮĲȐıĲĮıȘȢ

ĲȠȣ

ıȦıĲȠȪ

İȖȤİȚȡȚįȓȠȣ

ȠįȘȖȚȫȞ

țĮȚ

ıĲȚȢ

țİȓȝİȞİȢ

ĲȠʌȚțȑȢ

țĮȚ

İșȞȚțȑȢ

įȚĮĲȐȟİȚȢ

ȈȣȞįȑıĲİ

ĲĮ

ʌȡȠȧȩȞĲĮ

ıĲȚȢ

İțȐıĲȠĲİ

ıȦıĲȑȢ

ʌĮȡȠȤȑȢ

ȡİȪȝĮĲȠȢ

țĮȚ

ʌȓİıȘȢ

ǻȚĮįȚțĮıȓĮ

: (1)

ǹĳȒıĲİ

ȞĮ

ȟİțȚȞȒıİȚ

ĮȡȖȐ

ȡȠȒ

ıĲȠ

ıȪıĲȘȝĮ

ǹȞȠȓȟĲİ

ĮȡȖȐ

ĲȚȢ

ȕĮȜȕȓįİȢ

ȜİȚĲȠȣȡȖȓĮȢ

ȖȚĮ

ȞĮ

ĮʌȠĳȪȖİĲİ

ĲȚȢ

ĮʌȩĲȠȝİȢ

ĮȣȟȠȝİȚȫıİȚȢ

ȡȠȒȢ

. (2)

ǼȜȑȖȟĲİ

ȖȚĮ

įȚĮȡȡȠȑȢ

ĲȚȢ

ıȣȞįȑıİȚȢ

İȚıȩįȠȣ

țĮȚ

İȟȩįȠȣ

ĲȠȣ

ȡȠȩȝİĲȡȠȣ

ǹȞ

įİȞ

ȣʌȐȡȤȠȣȞ

įȚĮȡȡȠȑȢ

ȖİȝȓıĲİ

ĲȠ

ıȪıĲȘȝĮ

ȝȑȤȡȚ

ʌȓİıȘ

ȞĮ

ĳĲȐıİȚ

ĲȘȞ

țĮȞȠȞȚțȒ

ʌȓİıȘ

İȡȖĮıȓĮȢ

ȆȡȚȞ

Įʌȩ

ĲȘ

ıȣȞĲȒȡȘıȘ

ȕİȕĮȚȦșİȓĲİ

ȩĲȚ

ȖȡĮȝȝȒ

İȡȖĮıȓĮȢ

ȑȤİȚ

Ĳİșİȓ

İțĲȩȢ

ʌȚȑıİȦȢ

Ȉİ

ʌİȡȓʌĲȦıȘ

ĮȞĲȚțĮĲȐıĲĮıȘȢ

ĮȞĲĮȜȜĮțĲȚțȫȞ

ȕİȕĮȚȦșİȓĲİ

ȩĲȚ

ĲȠ

ʌȡȠıȦʌȚțȩ

İȓȞĮȚ

İȚįȚțİȣȝȑȞȠ

țĮȚ

ȤȡȘıȚȝȠʌȠȚİȓ

ĮȞĲĮȜȜĮțĲȚțȐ

ʌȠȣ

ʌȡȠȕȜȑʌİȚ

Brooks Instrument.

ȂȘ

İȖțİțȡȚȝȑȞĮ

ĮȞĲĮȜȜĮțĲȚțȐ

țĮȚ

İʌİȝȕȐıİȚȢ

İȞįȑȤİĲĮȚ

ȞĮ

İʌȘȡİȐıȠȣȞ

ĲȚȢ

İʌȚįȩıİȚȢ

ĲȠȣ

ʌȡȠȧȩȞĲȠȢ

țĮȚ

ȞĮ

ʌȡȠțĮȜȑıȠȣȞ

țȓȞįȣȞȠ

ȖȚĮ

ĲȘȞ

ĮıĳĮȜȒ

ȜİȚĲȠȣȡȖȓĮ

ǹȞĲȚțĮĲĮıĲȐıİȚȢ

ȝİ

ĳĮȚȞȠȝİȞȚțȐ

ȩȝȠȚĮ

ĮȞĲĮȜȜĮțĲȚțȐ

İȞįȑȤİĲĮȚ

ȞĮ

ʌȡȠțĮȜȑıȠȣȞ

ʌȣȡțĮȖȚȐ

țȓȞįȣȞȠ

ȘȜİțĲȡȠʌȜȘȟȓĮȢ

ĮȞİʌĮȡțȒ

ȜİȚĲȠȣȡȖȓĮ

ǺİȕĮȚȦșİȓĲİ

ȩĲȚ

ȩȜĮ

ĲĮ

ĮȞȠȓȖȝĮĲĮ

ĲȠȣ

İȟȠʌȜȚıȝȠȪ

İȓȞĮȚ

țȜİȚıĲȐ

țĮȚ

ĲĮ

ʌȡȠıĲĮĲİȣĲȚțȐ

țĮȜȪȝȝĮĲĮ

İȓȞĮȚ

ıĲȘ

șȑıȘ

ĲȠȣȢ

ʌȡȠțİȚȝȑȞȠȣ

ȞĮ

ĮʌȠĳİȣȤșİȓ

țȓȞįȣȞȠȢ

ȘȜİțĲȡȠʌȜȘȟȓĮȢ

țĮȚ

ʌȡȠıȦʌȚțȫȞ

ĲȡĮȣȝĮĲȚıȝȫȞ

İțĲȩȢ

İȐȞ

İțĲİȜȠȪȞĲĮȚ

İȡȖĮıȓİȢ

ıȣȞĲȒȡȘıȘȢ

Įʌȩ

İȚįȚțİȣȝȑȞȠ

ʌȡȠıȦʌȚțȩ

ȆȇȅǼǿǻȅȆȅǿǾȈǾ

ȆȡȠțİȚȝȑȞȠȣ

ȖȚĮ

ıȣıțİȣȑȢ

ȝİ

ȡȠȒ

ȡİȣıĲȠȪ

ȩĲĮȞ

ȖȚĮ

ȠʌȠȚȠȞįȒʌȠĲİ

ȜȩȖȠ

ʌȡȩțİȚĲĮȚ

ȞĮ

țȜİȓıȠȣȞ

ȠȚ

ȕĮȜȕȓįİȢ

İȚıĮȖȦȖȒȢ

țĮȚ

İȟĮȖȦȖȒȢ

țȠȞĲȐ

ıĲȚȢ

ıȣıțİȣȑȢ

ȠȚ

ıȣıțİȣȑȢ

ʌȡȑʌİȚ

ȞĮ

ĮʌȠıĲȡĮȖȖȚıĲȠȪȞ

İȞĲİȜȫȢ

ȝȘ

ıȣȝȝȩȡĳȦıȘ

ȝʌȠȡİȓ

ȞĮ

ʌȡȠțĮȜȑıİȚ

șİȡȝȚțȒ

įȚĮıĲȠȜȒ

ĲȠȣ

ȣȖȡȠȪ

ʌȠȣ

ʌİȡȚȑȤȠȣȞ

ȝİ

ĮʌȠĲȑȜİıȝĮ

ȞĮ

ȡĮȖȓıİȚ

ıȣıțİȣȒ

țĮȚ

ȞĮ

ʌȡȠțȜȘșȠȪȞ

ʌȡȠıȦʌȚțȠȓ

ĲȡĮȣȝĮĲȚıȝȠȓ

ǼȣȡȦʌĮȧțȒ

ȅįȘȖȓĮ

ȖȚĮ

ĲȠȞ

İȟȠʌȜȚıȝȩ

ȣʌȩ

ʌȓİıȘ

(PED)

ȀȐșİ

İȟȠʌȜȚıȝȩȢ

ȣʌȩ

ʌȓİıȘ

ȝİ

İıȦĲİȡȚțȒ

ʌȓİıȘ

ȐȞȦ

ĲȠȣ

0,5 bar (g)

țĮȚ

ȝİȖȑșȠȣȢ

ȝİȖĮȜȪĲİȡȠȣ

ĲȦȞ

25 mm

ĲȘȢ

ȓȞĲıĮȢ

İȝʌȓʌĲİȚ

ıĲȚȢ

įȚĮĲȐȟİȚȢ

ĲȘȢ

İȣȡȦʌĮȧțȒȢ

ȅįȘȖȓĮȢ

ȖȚĮ

ĲȠȞ

İȟȠʌȜȚıȝȩ

ȣʌȩ

ʌȓİıȘ

(PED).

ȉȠ

țİĳȐȜĮȚȠ

ȆȡȠįȚĮȖȡĮĳȑȢ

ĲȠȣ

ʌĮȡȩȞĲȠȢ

İȖȤİȚȡȚįȓȠȣ

ʌİȡȚȜĮȝȕȐȞİȚ

ȠįȘȖȓİȢ

ıȤİĲȚțȐ

ȝİ

ĲȘȞ

ȅįȘȖȓĮ

PED.

ȉĮ

ʌȡȠȧȩȞĲĮ

ʌȠȣ

ʌİȡȚȖȡȐĳȠȞĲĮȚ

ıĲȠ

ʌĮȡȩȞ

İȖȤİȚȡȓįȚȠ

ıȣȝȝȠȡĳȫȞȠȞĲĮȚ

ȝİ

ĲȘȞ

İȣȡȦʌĮȧțȒ

ȅįȘȖȓĮ

2014/34/EU.

ǵȜĮ

ĲĮ

ȡȠȩȝİĲȡĮ

ĲȘȢ

Brooks Instrument

ĮȞȒțȠȣȞ

ıĲȘȞ

ȠȝȐįĮ

ȡİȣıĲȫȞ

ȆȡȠȧȩȞĲĮ

ȝİȖĮȜȪĲİȡĮ

Įʌȩ

25 mm

ȓȞĲıĮ

ıȣȝȝȠȡĳȫȞȠȞĲĮȚ

ȝİ

ĲȚȢ

țĮĲȘȖȠȡȓİȢ

ǿǿ

țĮȚ

ǿǿǿ

ĲȘȢ

ȅįȘȖȓĮȢ

PED.

ȆȡȠȧȩȞĲĮ

ȝİȖȑșȠȣȢ

25 mm

ȓȞĲıĮȢ

țĮȚ

ȝȚțȡȩĲİȡĮ

țĮĲĮıțİȣȐȗȠȞĲĮȚ

ıȪȝĳȦȞĮ

ȝİ

ȠȡșȑȢ

ĲİȤȞȚțȑȢ

ʌȡĮțĲȚțȑȢ

(SEP).

ǼȣȡȦʌĮȧțȒ

ȅįȘȖȓĮ

ȖȚĮ

ĲȘȞ

ȘȜİțĲȡȠȝĮȖȞȘĲȚțȒ

ıȣȝȕĮĲȩĲȘĲĮ

(EMC)

(

ȘȜİțĲȡȚțȩȢ

ȘȜİțĲȡȠȞȚțȩȢ

)

İȟȠʌȜȚıȝȩȢ

ĲȘȢ

Brooks Instrument

ʌȠȣ

ĳȑȡİȚ

ĲȠ

ıȒȝĮ

ȑȤİȚ

ȣʌȠıĲİȓ

İʌȚĲȣȤȫȢ

ĲȚȢ

įȠțȚȝȑȢ

ʌȠȣ

ʌȡȠȕȜȑʌȠȣȞ

ȠȚ

įȚĮĲȐȟİȚȢ

ĲȘȢ

ȅįȘȖȓĮȢ

ȖȚĮ

ĲȘȞ

ȘȜİțĲȡȠȝĮȖȞȘĲȚțȒ

ıȣȝȕĮĲȩĲȘĲĮ

(

ȅįȘȖȓĮ

2014/30/EU

ȖȚĮ

ĲȘȞ

EMC).

ȆȐȞĲȦȢ

ȤȡİȚȐȗİĲĮȚ

ȚįȚĮȓĲİȡȘ

ʌȡȠıȠȤȒ

ıĲȘȞ

İʌȚȜȠȖȒ

ĲȠȣ

țĮȜȦįȓȠȣ

ıȒȝĮĲȠȢ

ȖȚĮ

ĲȠȞ

İȟȠʌȜȚıȝȩ

ʌȠȣ

ĳȑȡİȚ

ĲȠ

ıȒȝĮ

CE.

ȆȠȚȩĲȘĲĮ

ĲȦȞ

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)

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ȤĮȡĮțĲȘȡȚıĲȚțȩ

ĲȘȢ

ıȣıțİȣȒȢ

ĮȣĲȒȢ

ȅȚ

ʌİȡȚııȩĲİȡİȢ

ıȪȖȤȡȠȞİȢ

ȘȜİțĲȡȠȞȚțȑȢ

ıȣıțİȣȑȢ

ʌİȡȚȑȤȠȣȞ

İȟĮȡĲȒȝĮĲĮ

ĲİȤȞȠȜȠȖȓĮȢ

ȝİĲĮȜȜȚțȫȞ

ȠȟİȚįȓȦȞ

(NMOS, SMOS

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.).

ʌİȓȡĮ

ȑȤİȚ

ĮʌȠįİȓȟİȚ

ȩĲȚ

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ȝȚțȡȒ

ʌȠıȩĲȘĲĮ

ıĲĮĲȚțȠȪ

ȘȜİțĲȡȚıȝȠȪ

Įȡțİȓ

ȖȚĮ

ȞĮ

ʌȡȠțĮȜȑıİȚ

ȕȜȐȕİȢ

ȞĮ

țĮĲĮıĲȡȑȥİȚ

ĲȚȢ

ıȣıțİȣȑȢ

ĮȣĲȑȢ

ǼȟĮȡĲȒȝĮĲĮ

ʌȠȣ

ȣʌȑıĲȘıĮȞ

ȕȜȐȕȘ

ĮțȩȝȘ

țĮȚ

ĮȞ

ȝȠȚȐȗȠȣȞ

ȞĮ

ȜİȚĲȠȣȡȖȠȪȞ

ıȦıĲȐ

țȚȞįȣȞİȪȠȣȞ

Įʌȩ

ʌȡȫȚȝȘ

ĮıĲȠȤȓĮ

Summary of Contents for SLA5850

Page 1: ...nuary 2017 Brooks Digital MFC s MFM s Brooks SLA5800 Series Elastomer Sealed Digital Thermal Mass Flow Meters and Controllers Model SLA5850 with RS485 Communications Model SLA5850 with DeviceNet Communications Model SLA5850 with Profibus Communications Model SLA5851 with EtherCAT Communications ...

Page 2: ...icable local and national codes Connect all products to the proper electrical and pressure sources Operation 1 Slowly initiate flow into the system Open process valves slowly to avoid flow surges 2 Check for leaks around the flow meter inlet and outlet connections If no leaks are present bring the system up to the operating pressure Please make sure that the process line pressure is removed prior ...

Page 3: ...ll research and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetim...

Page 4: ...Installation and Operation Manual X TMF SLA5800 Series RevB MFC eng Part Number 541B187AAG January 2017 Brooks Digital MFC s MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 5: ... DeviceNet Profibus Foundation Fieldbus EtherCAT 2 10 Section 3 Operation 3 1 Overview 3 1 3 2 Theory of Operation for Flow Measurement 3 1 3 3 Features 3 3 3 4 Analog I O Mode of Operation 3 4 3 5 Communications Features 3 5 3 5 1 RS485 Communications Features Analog versions only 3 5 3 5 2 DeviceNet Communications Features 3 6 3 5 3 Profibus Communications Features 3 6 3 5 4 EtherCAT Communicati...

Page 6: ...wnport RS485 1 12 1 10 Dimensions Model SLA5851 Thru Flow EtherCAT 1 13 1 11 Dimensions Model SLA5851 Thru Flow DeviceNet 1 13 1 12 Dimensions Model SLA5860 Thru Flow Profibus 1 14 1 13 Dimensions Model SLA5860 Thru Flow RS485 1 14 1 14 Dimensions Model SLA5861 Thru Flow RS485 1 15 1 15 Dimensions Model SLA5863 Thru Flow DeviceNet 1 15 1 16 Dimensions Model SLA5853 Thru Flow Profibus 1 16 1 17 Dim...

Page 7: ...ended that this manual be read in its entirety before attempting to operate or repair these Brooks Digital products 1 3 Description The SLA5800 Series provides a highly configurable platform based on a simple modular architecture The SLA5800 Series feature set was carefully selected to enable drop in replacement and upgrade of many brands of mass flow controllers With the wide range of options and...

Page 8: ...Brooks representative about your specific needs Advanced Thermal Flow Measurement Sensor Brooks sensor technology combines Excellent signal to noise performance for improved accuracy at low setpoints Superior long term stability through enhanced sensor manufacturing and burn in process Isothermal packaging to reduce sensitivity to external temperature changes Corrosion resistant sensor flow path A...

Page 9: ...nearity Linearity Linearity Linearity Included in accuracy Response Time Response Time Response Time Response Time Response Time Settling Time within Settling Time within Settling Time within Settling Time within Settling Time within 1 second 3 seconds 2 F S for 0 100 command step 2 F S for 0 100 command step 2 F S for 0 100 command step 2 F S for 0 100 command step 2 F S for 0 100 command step Ze...

Page 10: ... Input Impedence Input Impedence Input Impedence 100 Ohms N A N A Flow Output Voltage Specifications Flow Output Voltage Specifications Flow Output Voltage Specifications Flow Output Voltage Specifications Flow Output Voltage Specifications Nominal Range Nominal Range Nominal Range Nominal Range Nominal Range 0 5 Vdc 1 5 Vdc or 0 10 Vdc N A N A Full Range Full Range Full Range Full Range Full Rang...

Page 11: ...in an area of not more than pollution degree 2 as defined in IEC 60664 1 Reference Conditions Due to effects of pressure and temperature on the compressibility of gases specific reference conditions must be used when reporting volumetric flow rates in mass flow terms For example the unit of measure SCCM standard cubic centimeters per minute refers to a volumetric gas flow at a standard reference c...

Page 12: ...oltage signals to Pin 11 8 on Firmware Version 1 18 newer Selectable Soft Start Processes requiring injection of gases can be adversely affected by excessive initial gas flow This abrupt injection of gas can result in process damage from explosion or initial pressure impact These problems are virtually eliminated with the soft start feature Figure 1 1 General Wiring PC based Support Tools Brooks I...

Page 13: ...ry 2017 Figure 1 3 Linear Ramp up and or Ramp down from 200 Per Second Down to 0 5 Per Second Setpoint Change Figure 1 2 Response Performance of Brooks Digital MFC Linear ramp up or ramp up down Figure 1 3 set by user via software tools or digital commands Linear ramp up ramp down is adjustable at 200 per second down to 0 5 per second setpoint change ...

Page 14: ...sonal computers are not equipped with RS485 ports as standard An RS232 USB to RS485 converter or RS485 interface board is therefore required to connect an RS485 network to a standard personal computer The RS485 bus a daisy chain network meaning that the wires are connected at the units as in Figure 1 1 Figure 1 4 SLA5800 Series RS485 15 Pin Analog Connector and Pinouts Function PIN Setpoint Common...

Page 15: ...The communication electronics allows for automatic baud rate detection ranging from 9600 baud to 12 Mbaud thus making the need for any hardware baud rate selection methods not required For selecting the device address which must be unique on the network two rotary switches are provided This allows a user to easily select any address number ranging from 0 to 126 This can provide fast device replace...

Page 16: ...ing standard body for DeviceNet DeviceNetis similar to the RS485 standard in that it is a multi drop connection that allows a maximum of 64 devices to be connected on the same network Baud rate selections for DeviceNetproducts are 125K 250K and 500K and can be selected via a rate switch mounted on the device The DeviceNetcommunication link also provides access to many of the Brooks SLAMf Digital S...

Page 17: ... maintainability EtherCAT is an Ethernet based communication system and is known for its high cycle time and cost efficient cabling and master application solutions The available physical interfaces on the EtherCAT device are listed below 5 pin M8 threaded male connector for power andAnalog l O indicated by pwr ln and Out ports with RJ 45 connectors 2 5mm female jack for RS485 diagnostic port indi...

Page 18: ...00 Series RevB MFC eng Part Number 541B187AAG January 2017 Figure1 8 Dimensions Model SLA5850 Thru Flow RS485 Figure 1 9 Dimensions Model SLA5850 Downport RS485 Note Aux Input is used for Remote Transducer Pressure Controllers only Note Aux Input is used for Remote Transducer Pressure Controllers only ...

Page 19: ...ies RevB MFC eng Part Number 541B187AAG January 2017 Figure 1 10 Dimensions Model SLA5851 Thru Flow EtherCAT Figure 1 11 Dimensions Model SLA5851 Thru Flow DeviceNet Note Aux Input is used for Remote Transducer Pressure Controllers only Note Aux Input is used for Remote Transducer Pressure Controllers only ...

Page 20: ...and Operation Manual X TMF SLA5800 Series RevB MFC eng Part Number 541B187AAG January 2017 Figure 1 12 Dimensions Model SLA5860 Thru Flow Profibus Figure 1 13 Dimensions Model SLA5860 Thru Flow RS485 Note Aux Input is used for Remote Transducer Pressure Controllers only ...

Page 21: ...eries RevB MFC eng Part Number 541B187AAG January 2017 Figure 1 14 Dimensions Model SLA5861 Thru Flow RS485 Figure 1 15 Dimensions Model SLA5863 Thru Flow DeviceNet Note Aux Input is used for Remote Transducer Pressure Controllers only Note Aux Input is used for Remote Transducer Pressure Controllers only ...

Page 22: ...ries RevB MFC eng Part Number 541B187AAG January 2017 Figure 1 16 Dimensions Model SLA5853 Thru Flow Profibus Figure 1 17 Dimensions Model SLA5853 Thru Flow EtherCAT Note Aux Input is used for Remote Transducer Pressure Controllers only Note Aux Input is used for Remote Transducer Pressure Controllers only ...

Page 23: ...with the packing materials Inspect for damaged or missing parts 2 3 Recommended Storage Practice If intermediate or long term storage of equipment is required it is recommended that the equipment be stored in accordance with the following a Within the original shipping container b Stored in a sheltered area preferably a warm dry heated warehouse c 32 C 90 F maximum 45 F 7 C minimum d Relative humi...

Page 24: ... Upon removal from storage a visual inspection should be conducted to verify the condition of the equipment is as received If the equipment has been in storage in conditions in excess of those recommended See Section 2 3 the device should be subjected to a pneumatic pressure test in accordance with applicable vessel codes 2 7 Gas Connections Prior to installation ensure all piping is clean and fre...

Page 25: ...equires servicing d The Brooks Digital MFC or MFM can be installed in any position However mounting in orientations other than the original factory calibration see calibration data sheet supplied with the instrument can result in a 0 2 maximum full scale shift after re zeroing e When installing a mass flow controller or meter with full scale flow rates of 10 lpm or greater be aware that sharp abru...

Page 26: ...e which in turn controls the flow through the device The main valve is a pressure operated valve that utilizes a bellows spring and diaphragm to control flow This bellows and diaphragm assembly can be susceptible to damage by pressure spikes or surges For this reason it is recommended that process line startups are handled with care The bellows spring is offered in two levels A low force for low d...

Page 27: ...mbient temperature the bypass ratio accuracy will be affected When a hot or cold process fluid is being measured ensure that the piping system is designed to allow the gas temperature to equalize with the flow controller ambient temperature For more information please contact the Brooks Technical Service group 2 10 Electrical Interface The setpoint signal is supplied as a 0 1 to 5 Vdc 0 to 10 Vdc ...

Page 28: ...l MFC s MFM s Section 2 Installation Installation and Operation Manual X TMF SLA5800 Series RevB MFC eng Part Number 541B187AAG January 2017 Figure 2 1 RS485 D Connector Shielded Cable Hookup Diagram Voltage I O Version ...

Page 29: ... Operation Manual X TMF SLA5800 Series RevB MFC eng Part Number 541B187AAG January 2017 Figure 2 2 Recommended I O Wiring Configuration for Current Signals Non Isolated Power Supply Figure 2 3 Recommended I O Wiring Configuration for Current Signals Isolated Power Supply ...

Page 30: ...ter system Personal computers are not equipped with RS485 ports as standard An RS232 to RS485 converter or RS485 interface board is therefore required to connect an RS485 to a standard PC Figure 2 4 is an interconnection diagram showing two TMFs linked to a PC via RS485 and RS485 to RS232 converter The RS485 bus a daisy chain network meaning that the wires are connected at the units as in Figure 2...

Page 31: ...0 000 mA 40 μA 0 20 mA output 4 000 mA 40 μA 4 20 mA output f Turn on the gas supply A positive flow signal may be present due to slight valve leak thru MFC only g Supply a setpoint signal between 0 to 5 Vdc 0 5 Vdc setpoint or 0 to 10 Vdc 0 10 Vdc setpoint 1 to 5 Vdc 1 5 Vdc setpoint 0 to 20 mA 0 20 mA setpoint 4 to 20 mA 4 20 mA setpoint h Check the analog output signal The output signal should ...

Page 32: ...as type When checking with a surrogate gas ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas Example Checking an MFC calibrated for 100 ccm SF6 sulfur hexafluoride The sensor factor N2 nitrogen is 0 27 therefore the equivalent N2 needed is 100 0 27 370 4 ccm This may require a pressure increase to make this flow rate 2 13 Bus Network DeviceNet...

Page 33: ...the same linear pressure difference versus flow relationship The ratio of sensor flow to the flow through the restrictor remains constant over the range of the MFC MFM A B constant The full scale flow rate of the MFC MFM is established by selecting a restrictor with the correct pressure differential for the desired flow The flow sensor is a very narrow thin walled stainless steel tube Onto this tu...

Page 34: ...igital MFC s MFM s Section 3 Operation Installation and Operation Manual X TMF SLA5800 Series RevB MFC eng Part Number 541B187AAG January 2017 Figure 3 1 Flow Sensor Operational Diagram VCRTM End Connections Shown ...

Page 35: ...ibration data Each set includes a calibration curve PID controller settings valve performance data and information about the calibration conditions The Brooks Digital equipment can contain calibrations for different gases or for the same gas at multiple conditions pressures full scale flow rates The DeviceNet Profibus EtherCAT and RS485 Instruction Manuals describe further details on specific comm...

Page 36: ...p apply gas pressure then proceed by following the instructions in the following sections Analog I O Setpoint MFC Only This input allows the user to establish the MFC setpoint Several input types are available as follows Analog I O Flow Signal This output is used to indicate the flow signal A negative flow signal indicates reverse flow through the device but is NOT calibrated Several flow signal t...

Page 37: ...ero flow reading This will result in calibration inaccuracy during normal operation Once zero differential pressure is established and verified press the recessed momentary push button zero button located on the side of the device See Figure 3 2 to start the zero function 3 5 Communications Features 3 5 1 RS485 Communications Features Analog versions only Digital communication designed to emulate ...

Page 38: ...ction ranging from 9600 baud to 12 Mbaud thus making the need for any hardware baud rate selection methods not required For selecting the device address which must be unique on the network two rotary switches are provided This allows a user to easily select any address number ranging from 0 to 126 This can provide fast device replacement without complex network configurations The Profibus DP commu...

Page 39: ...setpoint actuator override etc Read Diagnostics information warning alarm status Check Device configuration Calibration due status Hardware Software versions etc Various companies provide EtherCAT master applications e g TwinCAT from Beckoff or offer EtherCAT master stacks to develop a master application e g Acontis A P C can be used to run most EtherCAT master applications but needs dedicated Eth...

Page 40: ...the specified conditions When the alarm is set to latching This means that the alarm will be indicated when the monitored value first exceeds the specified conditions and will be indicated until the user clears the alarm If the user clears the alarm while the monitored value still exceeds the specified conditions then the alarm will be re latched and continue to be indicated Contact Enable If the ...

Page 41: ...larm The Setpoint Deviation Alarm monitors the difference between Setpoint and Flow and sets the alarm when the difference exceeds the specified limits for more than the specified delay period The user specifies a minimum and maximum limit in percent of Setpoint This alarm is disabled if the valve override is active Temperature Out of Limits The Temperature Out of Limits alarm will occur when the ...

Page 42: ...tion configuration sets can be saved in order to have a unit pre configured for multiple gas calibration different pressure conditions multiple scalings of the same gas Calibration and configuration data sets may be adjusted by an advanced user via the Diagnostics Port using a special software application available from Brooks Reference the Brooks Expert Support Tool User Manual BEST for more info...

Page 43: ... the Low Flow Output Cutoff parameter the Flow Output will be set to zero 3 8 4 Adaptive Control Adaptive Valve Control is a means of dynamically adjusting valve offset and span in response to changing process conditions Options for Adaptive Control are On Off Adjust Offset Only Adjust Offset and Span 3 8 5 Flow Totalizer A Flow Totalizer will be provided and maintained in Non Volatile Memory The ...

Page 44: ...3 12 Brooks Digital MFC s MFM s Section 3 Operation Installation and Operation Manual X TMF SLA5800 Series RevB MFC eng Part Number 541B187AAG January 2017 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 45: ...Operation Manual X TMF SLA5800 Series RevB MFC eng Part Number 541B187AAG June 2016 4 1 Maintenance and Troubleshooting No routine maintenance is required on the Brooks Digital MFC s and MFM s If an in line filter is used the filtering elements should be periodically replaced or cleaned ...

Page 46: ...s maximum rate also the valve is likely to drive to max opening 100 4 Flow signal matched setpoint but actual flow is not correct Clogged restrictor If the MFC s restrictor becomes clogged a much larger flow stream will pass through the sensor rather than going straight through the restrictor The symptom of this condition is a substantially reduced actual flow with a flow signal which matches the ...

Page 47: ...dress of the device on the network The possible range of addresses is 00 to 63 The out of box MAC ID setting is 63 The third rotary switch is labeled RATE This switch sets the baud rate of the MFC for communicating over the DeviceNet network The out of box default setting is 125K baud For more complete details on these switches reference the Brooks DeviceNet Supplement Instruction Manual Q What is...

Page 48: ...e MFC MFM related problems in the gas distribution system and answers commonly asked questions Remove the sensor connector from the PC Board for this procedure OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL Open circuit on ohmmeter If either heater 1 or Pin 1 or 4 to meter body sensor common 4 are shorted an ohmmeter reading will be obtained Pin 4 to Pin 2 Nominal 1100 ohms reading dependin...

Page 49: ... Connect the instrument to a source of the same gas used for it s original calibration Regulate the Setpoint to 100 flow and adjust the inlet and outlet pressures to calibration conditions Verify that the output signal reaches its full scale value and stabilizes at that value Vary the command voltage over the 1 to 100 range and verify that the output signal follows the Setpoint If possible connect...

Page 50: ... tube can then be flushed with a solvent that leaves no residue This can be accomplished conveniently using a hypodermic needle filled with solvent NOTE Do not soak the sensor assembly in a cleaning solvent If solvent seeps into the sensor assembly it will likely damage or significantly alter the sensor s operating characteristics 4 1 4 Calibration Procedure The calibration of Brooks Digital Serie...

Page 51: ...utput signal follows Setpoint Control valve leaks or is stuck Clean the control valve or return the device at higher Setpoints but will not open to the factory Section 4 1 2 go below 2 Output signal follows Setpoint Insufficient inlet pressure or Adjust pressures inspect in line filters and at lower Setpoints but does pressure drop clean replace as necessary not reach full scale Partially clogged ...

Page 52: ... Brooks Digital MFC s MFM s Section 4 Maintenance Troubleshooting Installation and Operation Manual X TMF SLA5800 Series RevB MFC eng Part Number 541B187AAG June 2016 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 53: ...ɢ ɢ ɜɯɨɞɧɢ ɤɥɚɩɚɧɢ ɨɛɨɪɭɞɜɚɧɟɬɨ ɬɪɹɛɜɚ ɧɚɩɴɥɧɨ ɞɚ ɫɟ ɢɡɩɪɚɡɧɢ ɇɟɢɡɩɴɥɧɟɧɢɟɬɨ ɧɚ ɬɨɜɚ ɦɨɠɟ ɞɚ ɩɪɢɱɢɧɢ ɬɨɩɥɢɧɧɨ ɪɚɡɲɢɪɟɧɢɟ ɧɚ ɬɟɱɧɨɫɬɬɚ ɤɨɟɬɨ ɦɨɠɟ ɞɨ ɫɩɭɤɚ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢ ɞɚ ɞɨɜɟɞɟ ɞɨ ɬɟɥɟɫɧɢ ɩɨɜɪɟɞɢ ȿɜɪɨɩɟɣɫɤɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ PED ȼɫɢɱɤɢ ɫɴɨɪɴɠɟɧɢɹ ɩɨɞ ɧɚɥɹɝɚɧɟ ɫ ɜɴɬɪɟɲɧɨ ɧɚɥɹɝɚɧɟ ɧɚɞ 0 5 bar g ɢ ɫ ɪɚɡɦɟɪ ɩɨ ɝɨɥɹɦ ɨɬ 25 mm ɢɥɢ 1 inch ɩɨɩɚɞɚɬ ɩɨɞ ɞɟɣɫɬɜɢɟɬɨ ɧɚ ɟɜɪɨɩɟɣɫɤɚɬɚ ɞɢɪɟɤɬɢɜɚ ɡ...

Page 54: ...í kompletnČ vyprázdnit Pokud tak neuþiníte mĤže z dĤvodu teplotní roztažnosti zbytkĤ média v zaĜízení dojít k jeho poškození nebo k ohrožení zdraví osob Evropská smČrnice pro tlakové zaĜízení PED Na veškerá tlaková zaĜízení s vnitĜním tlakem vyšším než 0 5 baru g a velikosti vČtší než 25 mm nebo 1 palec se vztahuje platnost smČrnice o tlakovém zaĜízení PED Kapitola Technické údaje v této pĜíruþce ...

Page 55: ...entilen ikke bliver lukket på samme tid i forbindelse med aftapning Såfremt dette ikke overholdes er der risiko for at væsken på grund af varmeudvikling ekspanderer og dette kan forårsage skade på udstyr og personer Det Europæiske direktiv for trykudstyr PED På alt udstyr hvis indgangstryk er større end 0 5bar g og større end 25 mm eller en tomme gælder det europæiske direktiv for trykapparater Ma...

Page 56: ...n afgetapt Als dat wordt nagelaten kan dit leiden tot thermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken PED Pressure Equipment Directive Alle drukapparatuur met een interne druk van meer dan 0 5 barg en een diameter van meer dan 25 mm valt onder de PED richtlijn In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die ver...

Page 57: ...Vastasel korral võib vedelik soojuse mõjul paisuda niivõrd et seade puruneb See võib põhjustada raskeid kehavigastusi Euroopa surveseadmete direktiiv PED Euroopa surveseadmete direktiiv kohaldub kõikidele surveseadmetele mille sisesurve on üle 0 5 baari g ja läbimõõt üle 25 mm või 1 tolli x Selle kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid x Kasutusj...

Page 58: ...aiminlyönti aiheuttaa nesteen lämpölaajenemista joka saattaa johtaa laitteen rikkoutumiseen ja henkilövahingon vaaraan Eurooppalainen painelaitedirektiivi PED Painelaitteet joiden paine on suurempi kuin 0 5 bar g ja joiden koko on suurempi kuin 25 mm tai 1 tuuma kuuluvat eurooppalaiseen painelaitedirektiiviin PED x PED direktiiviä koskevat määräykset löytyvät käyttöoppaan Tekniset tiedot luvusta x...

Page 59: ... cela n est pas fait une éventuelle dilatation thermique du fluide peut casser l appareil et provoquer des blessures Directive européenne équipements sous pression PED Tous les équipements sous pression dont la pression interne est supérieure à 0 5 bar pression relative et dont la taille dépasse 25 mm ou un pouce entrent dans le cadre de la directive PED La section Spécifications de ce manuel cont...

Page 60: ...ntilen komplett entleert werden anderenfalls kann es zu einer thermischen Ausdehnung der Flüssigkeit und damit zum Bruch des Gerätes kommen Personenschäden können die Folge sein Europäische Druckgeräterichtlinie PED Alle Druckgeräte mit einem internen Druck von mehr als 0 5 bar g und einer Größe von mehr als 1in 1 in 25 4 mm unterliegen der Druckgeräterichtlinie Das Kapitel zu den technischen Date...

Page 61: ...ȠȪȞ İȞĲİȜȫȢ Ǿ ȝȘ ıȣȝȝȩȡĳȦıȘ ȝʌȠȡİȓ ȞĮ ʌȡȠțĮȜȑıİȚ șİȡȝȚțȒ įȚĮıĲȠȜȒ ĲȠȣ ȣȖȡȠȪ ʌȠȣ ʌİȡȚȑȤȠȣȞ ȝİ ĮʌȠĲȑȜİıȝĮ ȞĮ ȡĮȖȓıİȚ Ș ıȣıțİȣȒ țĮȚ ȞĮ ʌȡȠțȜȘșȠȪȞ ʌȡȠıȦʌȚțȠȓ ĲȡĮȣȝĮĲȚıȝȠȓ ǼȣȡȦʌĮȧțȒ ȅįȘȖȓĮ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ PED ȀȐșİ İȟȠʌȜȚıȝȩȢ ȣʌȩ ʌȓİıȘ ȝİ İıȦĲİȡȚțȒ ʌȓİıȘ ȐȞȦ ĲȠȣ 0 5 bar g țĮȚ ȝİȖȑșȠȣȢ ȝİȖĮȜȪĲİȡȠȣ ĲȦȞ 25 mm Ȓ ĲȘȢ 1 ȓȞĲıĮȢ İȝʌȓʌĲİȚ ıĲȚȢ įȚĮĲȐȟİȚȢ ĲȘȢ İȣȡȦʌĮȧțȒȢ ȅįȘȖȓĮȢ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓ...

Page 62: ...ti ki és belépĘ szelepeket a berendezést teljesen le kell üríteni Ennek elmulasztása a folyadék hĘtágulását okozhatja ami károsíthatja a berendezést és személyi sérüléshez vezethet Nyomástartó berendezésekre vonatkozó európai irányelv PED Minden 0 5 bar nál g magasabb belsĘ nyomású és 25 mm nél vagy 1 hüvelyknél nagyobb nyomástartó berendezés a nyomástartó berendezésekre vonatkozó európai irányelv...

Page 63: ...si deve svuotare completamente l apparecchiatura L inosservanza può causare la dilatazione termica del liquido che può danneggiare l apparecchiatura e provocare lesioni alle persone Direttiva europea relativa alle apparecchiature a pressione PED Ogni apparecchiatura a pressione con pressione interna maggiore di 0 5 bar g e più grande di 25 mm o di 1 pollice ricade nell ambito della Direttiva Europ...

Page 64: ...as ierƯþu tuvumƗ esošos ieplǌdes un izplǌdes vƗrstus kƗda iemesla dƝƺ ir jƗaizver no ierƯcƝm ir jƗizlaiž viss šƷidrums PretƝjƗ gadƯjumƗ šƷidrums var termiski izplesties pƗrraut ierƯci un radƯt traumas Eiropas spiedieniekƗrtu direktƯva PED Uz visƗm spiedieniekƗrtƗm kuru iekšƝjais spriegums pƗrsniedz 0 5 bar g un ir lielƗkas par 25 mm jeb 1 collu attiecas Eiropas spiedieniekƗrtu direktƯva PED x ŠƯs ...

Page 65: ...vus iš Ƴrenginio reikia išleisti visą skystƳ To nepadarius galimas šiluminis skysþio plơtimasis galintis sugadinti ƳrenginƳ ir sužeisti žmonơs Europos slơginơs Ƴrangos direktyva PED Visa slơginơ Ƴranga kurios vidinis slơgis didesnis nei 0 5 bar g o dydis didesnis nei 25 mm arba 1 col yra reglamentuojama Slơginơs Ƴrangos direktyvos PED x Šios instrukcijos dalyje Techniniai duomenys pateikiami nurod...

Page 66: ...eczy jeĪeli znajdujące siĊ na nich zawory wejĞciowe i wyjĞciowe mają byü z jakiegoĞ powodu zamkniĊte to urządzenie musi zostaü caákowicie opróĪnione z ciekáego medium Niedopeánienie tego zalecenia moĪe doprowadziü do termicznego zwiĊkszenia objĊtoĞci cieczy co z kolei moĪe spowodowaü uszkodzenie urządzenia i obraĪenia personelu Europejska dyrektywa dotycząca urządzeĔ ciĞnieniowych PED Wszystkie ur...

Page 67: ...rio fechar as válvulas a montante e jusante do equipamento tenha em atenção que o mesmo deverá ser previamente esvaziado do fluído que o atravessa Esta obrigação surge do facto de existir a possibilidade de ocorrer dilatação térmica do líquido no interior do aparelho podendo provocar danos pessoais ou materiais graves Directiva Europeia para equipamentos sob pressão PED Todos os equipamentos sujei...

Page 68: ...închiderea valvelor de intrare úi ieúire limitrofe instalaĠiei instalaĠia trebuie complet golită Neglijarea acestui lucru poate avea ca efect dilatarea termică a fluidului care poate defecta instalaĠia úi poate produce răniri de persoane Directiva europeană pentru instalaĠiile sub presiune PED Toate instalaĠiile úi sistemele presurizate ce se află sub presiuni interne ce depăúesc 0 5 mbar g úi au ...

Page 69: ...tné uzavrieĢ vstupné a výstupné ventily zariadenie je potrebné úplne vyprázdniĢ Zanedbanie vypúšĢania má za následok poškodenie zariadenia s možnosĢou zranenia obsluhy z dôvodu tepelnej rozĢažnosti náplne Európska smernica vzĢahujúca sa na tlakové zariadenia PED x Všetky zariadenia s vyšším vnútorným pretlakom ako 0 5 bar g a väþšieho rozmeru ako 25 mm alebo 1 anglický palec podliehajú pod Európsk...

Page 70: ...olnoma izprazniti ýe tega ne naredite lahko pride do toplotnega raztezanja tekoþine zaradi katerega se lahko naprava prelomi in povrzoþi telesne poškodbe Evropska direktiva o tlaþni opreni PED Vsa tlaþna oprema z notranjim tlakom ki je veþji od 0 5 bara g in velikostjo ki je veþja od od 25 mm ali 1 palca spada v direktivo o tlaþni opremi PED x V poglavju Tehniþni podatki v tem priroþniku najdete n...

Page 71: ...do del equipo dichas instalaciones deberán ser completamente vaciadas La omisión de esto último puede provocar la dilatación térmica del líquido lo que puede dañar al equipo y conducir a daños personales Directriz Europea de los Equipos de Presión PED Todos los equipos de presión con una presión interna que supere a 0 5 bar g con tamaño mayor a 25 mm o 1 pulgada entran el ámbito de la Directriz Eu...

Page 72: ...trustningen och orsaka personliga skador European Pressure Equipment Directive PED Rådets Direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckbärande anordningar Alla utrustning för tryck med ett tryck över 0 5 Bar g bar och större demensioner än 25 mm eller 1 inch faller under Tryck direktiv 99 36 EG av den 29 april 1999 1 om transportabla tryckbärande anordningar PED x Den här Instruk...

Page 73: ...Installation and Operation Manual X TMF SLA5800 Series RevB MFC eng Part Number 541B187AAG January 2017 Brooks Digital MFC s MFM s THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 74: ...Visit www BrooksInstrument com to locate the service location nearest to you START UP SERVICE AND IN SITU CALIBRATION Brooks Instrument can provide start up service prior to operation when required For some process applications where ISO 9001 Quality Certification is important it is mandatory to verify and or re calibrate the products periodically In many cases this service can be provided under i...

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