1-5
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Mark Agency
Certification
Applicable
Standard Details
UL
(Recogonized)
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22
UL & CSA
Standards
E73889 Vol 3, Sec 4
ATEX
II 3 G Ex nA IIC T4 Gc
EN60079-0:2012
EN 60079-15:2010
KEMA 04ATEX 1118X
IECEx
II 3 G Ex nA IIC T4 Gc
IEC 60079-0:2011
IEC 60079-15:2010
IECEx DEK 14.0072X
KOSHA
Ex nA IIC T4
15-AV4BO-0641
15-AV4BO-0640
CE
EMC Directive 2014/30/EU
Directive 2011/65/EU
EN:61326-1:2013 EMC
RoHS
*ATEX/IECEx Special Conditions for safe use:
1. The module shall be installed in a suitable enclosure providing a degree of protection of
at least IP54 according to EN 60529 / IEC 60529, taking into account the environmental
conditions under which the equipment will be used.
2. When the temperature under rated condition exceeds 70 °C at the cable or conduit entry
point, or 80 °C at the branching point of the conductors, the temperature specification of
the selected cable shall be in compliance with the actual measured temperature values.
3. Provisions shall be made to prevent the rated voltage from being exceeded by transient
disturbances of more than 40%.
4. The equipment shall only be used in an area of not more than pollution degree 2, as
defined in IEC 60664-1.
Reference Conditions
Due to effects of pressure and temperature on the compressibility of
gases, specific reference conditions must be used when reporting
volumetric flow rates in mass flow terms. For example, the unit of measure
SCCM (standard cubic centimeters per minute) refers to a volumetric gas
flow at a standard reference condition, NOT the actual volumetric gas flow
at the actual operating pressure and temperature. The key point is that the
MASS FLOW of the gas is fixed, but the reference volumetric flow can be
reported differently based upon the standard reference condition used in
the calculation.
Throughout the world, there are differences in terminology when describing
reference conditions for gases. The words “normal conditions” and
“standard conditions” are sometimes used interchangeably to describe the
reference STP (Standard Temperature and Pressure) for gases. Further
note that temperature and pressure values for standard or normal
reference conditions vary in countries and industries worldwide. For
example, the Semiconductor Equipment Manufacturing Industry (SEMI)
defines standard temperature and pressure conditions as 273.15 K (0 °C)
and 101,325 Pa (760 torr). The main concern is that no matter what words
are used for descriptive purposes, a gas mass flow rate must have a
defined standard pressure and temperature reference condition when
performing a volumetric conversion.
Table 1-3 SLA5800 Series Certifications
