Brooks SLA5850, Installation And Operation Manual

Page: 10 / 74

1-4
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Table 1-2 SLA5800 Series Electrical Specifications
Communication Protocol Communication Protocol Communication Protocol Communication Protocol Communication Protocol
RS485 RS485 RS485 RS485 RS485 Profibus Profibus Profibus Profibus Profibus ® ® ® ® ® DeviceNet DeviceNet DeviceNet DeviceNet DeviceNet TM TM TM TM TM EtherCAT EtherCAT EtherCAT EtherCAT EtherCAT ® ® ® ® ®
Electrical Connection Electrical Connection
Electrical Connection Electrical Connection
Electrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with 5-pin M8 with
(A) 1 x 9-pin Female threaded coupling nut threaded coupling nut
Sub-D (B) 2 x RJ45
Analog I/O Analog I/O Analog I/O Analog I/O Analog I/O 0-5 V, 1-5 V, 0-10 V, N/A 0-5V
0-20 mA, 4-20 mA
Power Max./Purge Power Max./Purge
Power Max./Purge Power Max./Purge Power Max./Purge From +13.5 Vdc to From +11 Vdc to From +13.5 Vdc to
+27 Vdc +25 Vdc +27 Vdc
Power Requirements Watts, Max. Power Requirements Watts, Max.
Power Requirements Watts, Max. Power Requirements Watts, Max.
Power Requirements Watts, Max. Valve Orifice > 0.032”: 8 W Valve Orifice > 0.032”: 10 W Valve Orifice > 0.032”: 8.5 W
Valve Orifice
≤
0.032”: 5 W Valve Orifice
≤
0.032”: 7 W Valve Orifice
≤
0.032”: 5.5 W
Without Valve: 2 W Without Valve: 4 W Without Valve: 2.5 W
Voltage Set Point Input Specifications Voltage Set Point Input Specifications Voltage Set Point Input Specifications Voltage Set Point Input Specifications Voltage Set Point Input Specifications
Nominal Range Nominal Range Nominal Range Nominal Range Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A N/A
Full Range Full Range
Full Range Full Range
Full Range (-0.5)-11 Vdc N/A N/A
Absolute Max. Absolute Max.
Absolute Max. Absolute Max. Absolute Max. 18 V (without damage) N/A N/A
Input Impedence Input Impedence Input Impedence Input Impedence Input Impedence >990 kOhms N/A N/A
Required Max. Sink Current Required Max. Sink Current Required Max. Sink Current Required Max. Sink Current Required Max. Sink Current 0.002 mA N/A N/A
Current Set Point Input Specifications Current Set Point Input Specifications Current Set Point Input Specifications Current Set Point Input Specifications Current Set Point Input Specifications
Nominal Range Nominal Range
Nominal Range Nominal Range Nominal Range 4-20 mA or 0-20 mA N/A N/A
Full Range Full Range Full Range Full Range Full Range 0-22 mA N/A N/A
Absolute Max. Absolute Max. Absolute Max. Absolute Max. Absolute Max. 24 mA (without damage) N/A N/A
Input Impedence Input Impedence Input Impedence Input Impedence Input Impedence 100 Ohms N/A N/A
Flow Output (Voltage) Specifications Flow Output (Voltage) Specifications
Flow Output (Voltage) Specifications Flow Output (Voltage) Specifications
Flow Output (Voltage) Specifications
Nominal Range Nominal Range
Nominal Range Nominal Range Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A N/A
Full Range Full Range Full Range Full Range Full Range (-1)-11 Vdc N/A N/A
Min Load Resistance Min Load Resistance Min Load Resistance Min Load Resistance Min Load Resistance 2 kOhms N/A N/A
Flow Output (Current) Specifications Flow Output (Current) Specifications
Flow Output (Current) Specifications Flow Output (Current) Specifications
Flow Output (Current) Specifications
Nominal Range Nominal Range
Nominal Range Nominal Range Nominal Range 0-20 mA or 4-20 mA N/A N/A
Full Range Full Range Full Range Full Range Full Range 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA) N/A N/A
Max. Load Max. Load Max. Load Max. Load Max. Load 380 Ohms (for supply voltage:
<
16 Vdc) N/A N/A
Analog I/O Alarm Ouput* Analog I/O Alarm Ouput* Analog I/O Alarm Ouput* Analog I/O Alarm Ouput* Analog I/O Alarm Ouput*
Type Type
Type Type
Type Open Collector N/A N/A
Max. Closed (On) Current Max. Closed (On) Current Max. Closed (On) Current Max. Closed (On) Current Max. Closed (On) Current 25 mA N/A N/A
Max. Open (Off) Leakage Max. Open (Off) Leakage Max. Open (Off) Leakage Max. Open (Off) Leakage Max. Open (Off) Leakage 1
μ
A N/A N/A
Max. Open (Off) Voltage Max. Open (Off) Voltage Max. Open (Off) Voltage Max. Open (Off) Voltage Max. Open (Off) Voltage 30 Vdc N/A N/A
Analog I/O Valve Override Signal Specifications** Analog I/O Valve Override Signal Specifications**
Analog I/O Valve Override Signal Specifications** Analog I/O Valve Override Signal Specifications**
Analog I/O Valve Override Signal Specifications**
Floating/Unconnected Floating/Unconnected
Floating/Unconnected Floating/Unconnected Floating/Unconnected Instrument controls valve to command set point N/A N/A
VOR < 0.3 Vdc VOR < 0.3 Vdc VOR < 0.3 Vdc VOR < 0.3 Vdc VOR < 0.3 Vdc Valve Closed N/A N/A
1 Vdc < VOR < 4 Vdc 1 Vdc < VOR < 4 Vdc 1 Vdc < VOR < 4 Vdc 1 Vdc < VOR < 4 Vdc 1 Vdc < VOR < 4 Vdc Valve Normal N/A N/A
VOR > 4.8 Vdc VOR > 4.8 Vdc VOR > 4.8 Vdc VOR > 4.8 Vdc VOR > 4.8 Vdc Valve Open N/A N/A
Input Impedence Input Impedence
Input Impedence Input Impedence
Input Impedence 800 kOhms N/A N/A
Absolute Max. Input Absolute Max. Input Absolute Max. Input Absolute Max. Input Absolute Max. Input (-25 Vdc) < VOR < 25 Vdc (without damage) N/A N/A
*The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active.
The Alarm Output may be set to indicate any one of various alarm conditions.
** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the
valve based upon the measured reading as shown in this section.