3-3
Brooks
®
Digital MFC's & MFM's
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
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Features
Note: Not all features are available on all instruments.
The Brooks Digital MFC/MFMs are full-featured digital devices. The Brooks
Digital MFC/MFMs perform much like traditional analog MFCs, but with
improved accuracy, step response and valve control. The analog interface
matches that of Brooks' popular analog MFCs so it can be retrofitted into
tools using analog MFCs. Other versions of the Delta Class can provide a
variety of digital protocols.
The Brooks Digital equipment is capable of storing up to 6 different sets of
gas calibration data. Each set includes a calibration curve, PID controller
settings, valve performance data, and information about the calibration
conditions. The Brooks Digital equipment can contain calibrations for
different gases or for the same gas at multiple conditions (pressures, full-
scale flow rates).
The DeviceNet, Profibus, EtherCAT and RS485 Instruction Manuals
describe further details on specific communication features.
Calibrations will appear in the calibration table in the same order as they
appeared on the customer order, unless otherwise specified. The first
listed gas will appear as calibration #1 the second as calibration #2 and so
on. Note that unless specified otherwise on the customer order any unit
containing a single calibration will have that calibration stored in calibration
position 1.
Figure 3-2 Externally Accessible Adjustment (Zero Button) for all Meters/Controllers.
Zero Button
