Installation, Operating & Maintenance Instructions
Series 650 DN 100-
250 (I.D. 4“ - 10”), DeviceNet
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
266341ED
2012-07-13
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1. Install valve [1] into the vacuum system. Valve seat side should face process chamber. The valve seat side is indicated
by the symbol " " on the valve flange.
Caution:
Do not tighten the flange screws stronger than indicated under «Tightening torque».
Caution:
Do not admit higher forces to the valve than indicated under «Admissible forces».
Note:
Make sure that enough space is kept free to do preventive maintenance work. The required space is indicated
on the dimensional drawing.
2. Connect compressed air supply
to connection labeled „
IN
‟ located at actuator, see Figure 1 below.
Connect compressed air return line
connection labeled „
OUT
‟ located at actuator, see Figure 1 below.
Caution:
Compressed air pressure must be in the range of:
4 - 7 bar / 55 - 100 psi (above ATM)
.
Note:
Use only clean, dry or slightly oiled air. IN / OUT connections are 1/8“ ISO/NPT internal threads.
3. Install the ground connection cable at controller. Refer to «Electrical connection»
4. Install pressure sensor(s) [2] according to the recommendations of the sensor manufacturer and directives given under
«Requirements to sensor connection».
5. Connect sensor cable [3] to sensor(s) and then to valve (connector: SENSOR).
Refer to chapter «Electrical connection» for correct wiring.
Note:
Input for second sensor is available on 650 . . - . . .
Q
- . . . . version only.
6. Connect valve to DeviceNet [4] (DeviceNet connector). Refer to «DeviceNet schematics» for correct wiring.
7. Connect power supply [5] to valve (connector: POWER). Refer to chapter «Electrical connection» for correct wiring.
Note:
To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the
valve enters the safety mode and is not operative. Refer also to «Safety mode».
8. This valve has a double sealed rotary feedthrough and optionally an intermediate pumping port for the actuator shaft.
This
port (1/8“ ISO/NPT) could be connected to the vacuum line, see Figure 2 below.
9. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of
respective heating device.
10. Perform «Setup procedure» to prepare valve for operation.
Note:
Without performing the setup procedure the valve will not be able to do pressure control.
Fig. 1
Fig. 2
intermediate
pumping port
IN
OUT
