Installation, Operating & Maintenance Instructions
Series 650 DN 100-
250 (I.D. 4“ - 10”), DeviceNet
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
266341ED
2012-07-13
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3.9 Position control
The valve position is directly controlled according to the position setpoint.
Local operation
:
(„Control View‟, „Control Performance Analyzer‟ or
„Service Box 2„)
Remote operation
:
(Refer to chapter «Explicit messaging control
commands» for details)
Select or enter position setpoint
1. Send EXECUTING
(if not yet selected)
2. Send SETPOINT TYPE
= position control
3. Send CONTROL MODE for position
= control mode
4. Send POSITION SETPOINT
3.10 Pressure control
To prepare valve for PRESSURE CONTROL perform complete
«Setup procedure»
.
The valve has parameters that may be modified to tune pressure control performance.
Refer to
«Tuning of control performance»
.
The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve
position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow, gas
type).
Local operation
:
(„Control View‟ resp. „Control Performance Analyzer‟
or „Service Box 2„)
Remote operation
:
(Refer to chapter «Explicit messaging control
commands» for details)
Select or enter pressure setpoint
1. Send EXECUTING
(if not yet selected)
2. Send SETPOINT TYPE
= pressure control
3. Send CONTROL MODE for pressure
= control mode
4. Send PRESSURE SETPOINT
