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VAT 650 AP Series, Инструкции по установке, эксплуатации и обслуживанию

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Installation, Operating & Maintenance Instructions 

Series 650 DN 100-

250 (I.D. 4“ - 10”), DeviceNet

 

 

 

 

VAT Vakuumventile AG, CH-9469 Haag, Switzerland 
Tel +41 81 771 61 61   Fax +41 81 771 48 30   [email protected]   www.vatvalve.com

 

266341ED

 

2012-07-13 

7/79 

 

Valve unit 

Pressure range at 20 C 

   

- Aluminum 

(650 . . - . 

A 

. . - . . . . ) 

1 x 10E-8 mbar to 1.2 bar (abs) 

- Aluminum hard anodized  (650 . . - . 

H 

. . - . . . . ) 

1 x 10E-6 mbar to 1.2 bar (abs) 

- Aluminum nickel coated 

(650 . . - . 

I 

. . - . . . . ) 

 

1 x 10E-8 mbar to 1.2 bar (abs) 

Leak rate to outside at 20 C

 

 

   

- Aluminum 

(650 . . - . 

A 

. . - . . . . ) 

1 x 10E-9 mbar l/s 

- Aluminum hard anodized  (650 . . - . 

H 

. . - . . . . ) 

1 x 10E-5 mbar l/s 

- Aluminum nickel coated 

(650 . . - . 

I 

. . - . . . . ) 

 

1 x 10E-9 mbar l/s 

Leak rate valve seat at 20 C

 

 

   

- Aluminum 

(650 . . - . 

A 

. . - . . . . ) 

1 x 10E-9 mbar l/s 

- Aluminum hard anodized  (650 . . - . 

H 

. . - . . . . ) 

1 x 10E-4 mbar l/s 

- Aluminum nickel coated 

(650 . . - . 

I 

. . - . . . . ) 

 

1 x 10E-9 mbar l/s 

Cycles until first service 
- Isolation cycles  

(open - closed - open) 

- Throttling cycles   (open - max. throttle - open) 

 

 
200‟000   (unheated and under clean conditions) 
1‟000‟000  (unheated and under clean conditions) 

Admissible operating temperature 

 

10°C to +120°C 

Mounting position 

 

any (valve seat on chamber side is recommended) (valve seat to face 
chamber is recommended) 

Wetted materials 

 

- Body 

(650 . . - . 

A 

. . - . . . . ) 

Aluminum 3.2315 (AA6082) 

- Body 

(650 . . - . 

H 

. . - . . . . ) 

Aluminum 3.2315 (AA6082) hard anodized 

- Body 

(650 . . - . 

I 

. . - . . . . ) 

Aluminum 3.2315 (AA6082) nickel coated 

- Pendulum plate 

(650 . . - . 

A 

. . - . . . . ) 

Aluminum 3.2315 (AA6082)

 

- Pendulum plate 

(650 . . - . 

H 

. . - . . . . ) 

Aluminum 3.2315 (AA6082) hard anodized 

- Pendulum plate 

(650 . . - . 

I 

. . - . . . . ) 

Aluminum 3.2315 (AA6082) nickel coated 

- Sealing ring 

(650 . . - . 

A 

. . - . . . . ) 

Aluminum 3.2315 (AA6082),

 

1.4306 (304L) 

- Sealing ring 

(650 . . - . 

H 

. . - . . . . ) 

Aluminum 3.2315 (AA6082) hard anodized, 1.4306 (304L) 

- Sealing ring 

(650 . . - . 

I 

. . - . . . . ) 

Aluminum 3.2315 (AA6082) nickel coated, 1.4306 (304L) 

- 

O

ther parts 

Stainless steel 316L (1.4404 or 1.4435), 1.4122, 1.4310 (301), 
1.4303 (304), 1.4571, A2 (304) 

- Seals 

FKM (e.g. Viton®). Other materials available.  
Seal materials are declared on dimensional drawing of specific valve ordering 
number. 

 

 

 

DN 100 

4" 

(650

40 

- ....)

 

DN 160 

6" 

(650

44 

- ....)

 

DN 200 

8" 

(650

46 

- ....)

 

DN 250 

10" 

(650

48 

- ....)

 

 

Max. differential pressure on plate during isolation 

 

 

1200 mbar in 

either direction 

1200 mbar in 

either direction 

1200 mbar in 

either direction 

1200 mbar in 

either direction 

 

Max. differential pressure on plate  
during opening and throttling 

 

 

30 mbar 

10 mbar 

5 mbar 

5 mbar 

 

Min. controllable conductance  

(N

2

 molecular flow) 

 

 

3 l/s 

5 l/s 

10 l/s 

15 l/s 

 

Dimensions 

Refer to dimensional drawing of specific valve ordering number  

(available on request) 

 

 
 

Содержание 650 AP Series

Страница 1: ...2 sensor inputs 15V SPS PFO SPS Sensor Power Supply PFO Power Failure Option configured with firmware 650P 1E 00 and 264420 DeviceNet The fabrication number is indicated on each product as per the lab...

Страница 2: ...rofilms or any other reproduction processes nor may it be manipulated with electronic systems duplicated or distributed without written permission from VAT Offenders are liable to pay damages The orig...

Страница 3: ...ital input 22 2 6 9 Digital output 22 2 6 10 Service port connection 22 3 Operation 23 3 1 Introduction 23 3 1 1 Local operation 24 3 1 2 Remote operation 24 3 1 3 Safety mode 25 3 2 Operation under i...

Страница 4: ...viceNet VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 266341ED 2012 07 13 4 79 7 Spare parts 75 7 1 Valve unit 75 7 2 Control u...

Страница 5: ...ions are only allowed with the written permission of VAT 1 1 Technical data Control and actuating unit Power input 1 24 VDC 10 0 5 V pk pk max connector POWER 650 A 650 G 650 C 650 H 50 W max operatio...

Страница 6: ...point whichever is higher DN 100 4 65040 DN 160 6 65044 DN 200 8 65046 DN 250 10 65048 Position resolution position control capability 9155 steps full stroke 11111 steps full stroke 12266 steps full s...

Страница 7: ...e seat to face chamber is recommended Wetted materials Body 650 A Aluminum 3 2315 AA6082 Body 650 H Aluminum 3 2315 AA6082 hard anodized Body 650 I Aluminum 3 2315 AA6082 nickel coated Pendulum plate...

Страница 8: ...The attachment points are indicated on the dimensional drawing of the specific valve part number available on request Never lay the valve down with control and actuating unit downwards as it may be d...

Страница 9: ...controller Refer to Electrical connection 4 Install pressure sensor s 2 according to the recommendations of the sensor manufacturer and directives given under Requirements to sensor connection 5 Conne...

Страница 10: ...orce gets too high Therefore for other friction coefficients the torque needs to be adapted Please review design guidelines for Helicoil Screw connections and make sure that screws in use are capable...

Страница 11: ...h mm hole depth inch DN100 4 65040 12 12 12 0 47 0 47 0 47 DN160 6 65044 14 14 14 0 55 0 55 0 55 DN200 8 65046 15 15 15 0 59 0 59 0 59 DN250 10 65048 16 16 16 0 63 0 63 0 63 2 4 Admissible forces Forc...

Страница 12: ...lly connected to the chamber by a pipe To maintain that the response time is not degraded by this connection it needs to meet the following requirements Inner diameter of connection pipe 10 mm Length...

Страница 13: ...ial L Length max B1 min B2 min d1 d2 copper tinned 200 mm 25 mm 25 mm 4 5 mm customized Note Connection plates of ground strap must be total plane for a good electrical contact Note The connection poi...

Страница 14: ...24 VDC sensors Refer to chapter 2 6 3 Power and sensor connection 24 VDC sensors for schematic and correct wiring External 15 VDC supplied to POWER connector is feed through to SENSOR connector to sup...

Страница 15: ...Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do n...

Страница 16: ...ort as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensor...

Страница 17: ...oller Note Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing...

Страница 18: ...ort as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensor...

Страница 19: ...sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect o...

Страница 20: ...o style male 5 pin connector is shown on panel refer to chapter Installation into the system At valve controller DeviceNet cable PIN Name Wire color Description 1 Drain Bare Shield 2 V Red DeviceNet p...

Страница 21: ...interface allows for remote operation by means of a command set based on the DeviceNet protocol In addition there is a digital input and a digital output Digital input may only be operated by a switch...

Страница 22: ...t be applied for at least 50ms to be effective Refer to chapter 2 6 7 LOGIC I O for details about input circuit 2 6 9 Digital output Pin Signal type Description 2 Digital output This function will ind...

Страница 23: ...Operation Valve opening Fingers and objects must be kept out of the valve opening and away from moving parts Risk of injury Do not connect the controller to power before the valve isn t installed comp...

Страница 24: ...c monitoring basic diagnostic Control Performance Analyzer supports parameter setup manual control sequence control numeric and graphical monitoring data recording data analysis advanced diagnostic Wh...

Страница 25: ...ivated the unit remains in position control mode 3 2 Operation under increased temperature Hot valve Heated valve may result in minor or moderate injury Do not touch valve and heating device during op...

Страница 26: ...thout Power Failure Option PFO 650 G 650 A 650 T 650 V With Power Failure Option PFO 650 H 650 C 650 U 650 W Closed isolated Valve remains closed Valve will close or open depending on valve configurat...

Страница 27: ...are illuminated then configuration is displayed Firmware version e g 1E00 1 st information for about 2s Controller configuration 2 nd information for about 2s SYNC indicates that power up synchroniza...

Страница 28: ...100 valve position 0 closed 100 open POSITION CONTROL mode V Valve closed C Valve open O HOLD position frozen activated H ZERO running Z LEARN running L Safety mode established Refer to Safety mode fo...

Страница 29: ...lected DeviceNet parameters must be adapted according to application needs Note It s not the goal of this manual to describe the configuration of all parameters Several tools and interfaces from diffe...

Страница 30: ...eration The Electronic Data Sheet EDS allows the configuration of DeviceNet components with a general configuration tool The EDS contains general data regarding device selection of operation mode assi...

Страница 31: ...pted according to application needs Definition of valve plate position CLOSE or OPEN after power up sequence Default is close Definition of valve plate position CLOSE or OPEN in case of a power failur...

Страница 32: ...Box 2 Remote operation Refer to chapter Explicit messaging control commands resp Explicit messaging setup commands for details Go to menu Zero ZERO and follow instructions 1 Send EXECUTING if not yet...

Страница 33: ...ware or remote interface Due to encoding the data may not be interpreted directly By an OPEN VALVE CLOSE VALVE POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted Local operat...

Страница 34: ...r full scale pressure mbar Cmin min controllable conductance of valve l s refer to Technical data qL 39 4 pSFS Cmin qL gasflow for learn sccm pSFS sensor full scale pressure Torr Cmin min controllable...

Страница 35: ...trol mode 4 Send POSITION SETPOINT 3 10 Pressure control To prepare valve for PRESSURE CONTROL perform complete Setup procedure The valve has parameters that may be modified to tune pressure control p...

Страница 36: ...either connected to sensor 1 or sensor 2 input It s required to do correct sensor configuration Between 90 and 100 of the low range sensor full scale the low range sensor is phased out while high rang...

Страница 37: ...tely below Strictly keep the procedure order Required information for support Go to Tools Create Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas condi...

Страница 38: ...ponse lower over undershoot of pressure Adjustment procedure 1 Start with gain factor 1 0 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with lower higher gain factors u...

Страница 39: ...r gauge attachment fulfills these criteria do not use this parameter Adjustment procedure 1 Start with gain factor 1 0 and sensor delay 0s 2 Open valve 3 Control a typical pressure flow situation 4 Re...

Страница 40: ...l a lower pressure 4 Repeat from step 2 with longer setpoint ramps until best response is achieved 5 Verify pressure control response for a setpoint raise situation Note In case a long ramp time is re...

Страница 41: ...mally best pressure control response is achieved with max valve speed In particular applications it may be of advantage to have a slower valve response Note OPEN and CLOSE are always done with max spe...

Страница 42: ...15 15 14 Eh Input EXCEPTION STATUS PRESSURE POSITION VALVE CLOSED OPEN CHECK 4 1 2 or 4 2 or 4 1 100 64h Input EXCEPTION STATUS PRESSURE POSITION DEVICE STATUS 2 ACCESS MODE 1 2 or 4 2 or 4 1 1 101 6...

Страница 43: ...ions see also Explicit messaging control commands Description Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Control valve 0 0 0 0 0 0 0 0 Close valve 0 0 0 0 0 0 0 1 Open valve 0 0 0 0 0 0 1 0 Hold valve 0...

Страница 44: ...Bit0 Manufacturer specific alarm present 1 0 0 0 0 1 0 0 Manufacturer specific warning present 1 1 0 0 0 0 0 0 No warning no error present 1 0 0 0 0 0 0 0 PRESSURE will respond with any value between...

Страница 45: ...esets the DeviceNet interface to factory default settings Note All previously done configurations will be overwritten SETPOINT TYPE Set 16 51 0 8 1 Y Get 14 51 0 8 1 Y 0 pressure control 1 position co...

Страница 46: ...s reads the position setpoint to from the valve PRESSURE SETPOINT Set 16 51 1 6 2 or 4 Y Get 14 51 1 6 2 or 4 Y pressure setpoint according to selected DATA TYPE nominal pressure range is 0 10 000 sen...

Страница 47: ...caled Refer also to command GAIN and picture on the following page for details SENSOR 1 READING Get 14 100 1 108 2 or 4 This function returns direct reading from sensor 1 according to selected DATA TY...

Страница 48: ...9 Example of PRESSURE and SENSOR READING allocation Above picture shows a 2 sensor system In this configuration sensor 2 covers low range 100 mTorr and sensor 1 covers high range 1 Torr Switchover bet...

Страница 49: ...ning 1 LEARN running 1 0 LEARN data set present 1 LEARN data set not present 2 0 ok 1 LEARN terminated by user 3 0 ok 1 pressure in position OPEN 50 sensor full scale of high range sensor in case of a...

Страница 50: ...ad EXCEPTION DETAIL ALARM for details EXCEPTION STATUS status Get 14 48 1 12 1 This command returns the exception status Bit Explanation LSB 0 0 reserved 1 0 reserved 2 This bit is set to 1 in case of...

Страница 51: ...0 0 PCV Device Exception Detail Byte 3 0 0 0 0 0 0 0 0 Manufacturer Exception Detail Size 0 0 0 0 0 1 1 0 Manufacturer Exception Detail Byte 1 Reserved Reserved Isolation valve position failure Senso...

Страница 52: ...Get 14 100 1 101 4 This command returns the number of throttle cycles Data type is unsigned long integer A movement from max throttle position to open back to max throttle position counts as one cycl...

Страница 53: ...CCh CCh Gain 1 pressure value range results in 0 10 000 3Fh 80h 00h 00h Gain 3 2767 pressure value range results in 0 32 767 40h 51h B5h 73h GAIN POSITION Set 16 49 3 14 4 X Get 14 49 3 14 4 X gain m...

Страница 54: ...cycling ACCESS MODE Set 16 100 1 107 1 X Get 14 100 1 107 1 X 0 Local operation via service port 1 Remote operation via DeviceNet 2 Locked in remote mode This command controls returns the access mode...

Страница 55: ...modes 2 3 and 4 are possible with 2 sensor hardware 650 Q only Note For applications where the high range sensor is used for for monitoring purpose only select sensor operation modes 1 or 3 for press...

Страница 56: ...e PID controller is not able to perform pressure control Refer to LEARN setup step 5 for correct learn gas flow and procedure DOWNLOAD LEARN DATA 51 48 1 11 XY X index 000 103 whereas these indices mu...

Страница 57: ...0 6 0 15 7 0 20 8 0 25 9 0 30 10 0 35 11 0 4 12 0 5 13 0 6 14 0 8 15 1 0 This command selects returns the sensor delay for the PID controller Note Refer to Sensor delay adjustment for details PID CONT...

Страница 58: ...incl errata 1 IDENTITY OBJECT figure 6 2 state event matrix for identity object Refer to ODVA specification volume II release 2 0 incl errata 1 IDENTITY OBJECT figure 6 2 state event matrix for ident...

Страница 59: ...Safety mode active check for D on display Maintenance mode active Provide power to motor to allow for operation Refer to Electrical connection for details Refer to Display shows M C in this table OPE...

Страница 60: ...ALVE and bring chamber to base pressure before performing ZERO Sensor offset voltage exceeds 1 4V Replace pressure gauge PRESSURE CONTROL does not work Safety mode active check for D on display Provid...

Страница 61: ...be performed by the customer or has to be carried out by VAT The fabrication number on the valve made in Switzerland Fabrication No A Fabrication number has always to be specified All supplies e g com...

Страница 62: ...under increased temperature In this case grease will separate to PTFE and oil The oil may flow and contaminate the valve parts VAT can give the following recommendations for preventive maintenance unh...

Страница 63: ...llen wrench 5mm 3 Open valve Caution Stand away from valve pendulum plate moves out of the valve body 4 Unfasten mounting screw for pendulum plate For reinstall the pendulum plate tighten the mounting...

Страница 64: ...ose seals actuator and retaining pin feedthroughs to air stream 13 Clean or replace gate seal if necessary Install gate seal to sealing ring without grease gate seal Soft tool o ring remover VAT clean...

Страница 65: ...reverse order step 9 3 18 Close the valve bonnet see steps 40 42 19 Release the valve from safety mode Refer to Safety mode for details 20 Move the valve to position 50 half opened This is necessary...

Страница 66: ...27 Lubricate each o ring groove with 0 1 ml vacuum grease Pay attention that grease is distributed constantly over the whole circumference Soft tool o ring remover Vacuum grease 28 Clean or replace s...

Страница 67: ...r Allen Wrench 4mm 36 Turn on power of controller Note valve moves to close position 37 Open valve and install sealing ring and pendulum plate in reverse order as they had been disassembled steps 8 to...

Страница 68: ...crew at flange side of actuator 1 turn clockwise adjusts pendulum plate by about 3mm towards open c Restart valve in menu System Recovery d Check pendulum plate position according step 38 and redo adj...

Страница 69: ...sure PFO function the option board must be replaced after battery life has expired For ordering number of the modules refer to Spare parts and accessories 5 2 1 Durability of power fail battery The cu...

Страница 70: ...ESD Precaution All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage Top view on control and actuating unit with panel...

Страница 71: ...atvalve com www vatvalve com 266341ED 2012 07 13 71 79 Description Required tool 1 Write down the NODE ADDRESS and DATA RATE in case of Interface board replacement Ballpoint 2 Remove female screw lock...

Страница 72: ...1 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 266341ED 2012 07 13 72 79 Description Required tool 5 Lift the panel carefully 6 Pull out the option board a little 7 Push the connecto...

Страница 73: ...everse order as disassembled at correct positions see steps 10 to 8 12 Reconnect fan cable to option board see steps 7 to 6 13 Place the panel and tighten panel screws with 1 1 Nm see steps 4 to 3 14...

Страница 74: ...AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 266341ED 2012 07 13 74 79 6 Drawing 1 Bonnet seal 2 Body seal 3 Plate seal 4 Rotary feedthrough se...

Страница 75: ...n request Seal kit vacuum Viton This consists of item 2 and 3 204883 206526 204204 203883 Syringe of vacuum grease 2ml 206792 5ml 206793 4 Actuator shaft seals Viton N 5111 329 2 pcs required per valv...

Страница 76: ...on options Valve with B1 actuator standard Valve with B2 actuator option 7 2 Control unit Item Description Valve size Product ordering number All sizes 650 9 Control unit Too many to list Depends on c...

Страница 77: ...ww vatvalve com or available on order against charge Service cable PC to valve connection 230327 free wiring information available for download from www vatvalve com Connector kit consisting of DB 9 f...

Страница 78: ...s or expense whether consequential special incidental direct or otherwise caused by arising out of or connected with the manufacture delivery including any delay in or failure to deliver packaging sto...

Страница 79: ...Instructions Series 650 DN 100 250 I D 4 10 DeviceNet VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 266341ED 2012 07 13 79 79...

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