Installation, Operating & Maintenance Instructions
Series 650 DN 100-
250 (I.D. 4“ - 10”), DeviceNet
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
266341ED
2012-07-13
34/79
Gasflow calculation for LEARN:
Do not apply a different gasflow for learn than determined below. Otherwise pressure control
performance may be insufficient.
Choose the applicable formula depending on units you are familiar with.
p
SFS
C
min
q
L
=
2000
q
L
gasflow for learn [
Pa m
3
/s
]
p
SFS
sensor full scale pressure [
Pa
]
C
min
min. controllable conductance of valve [l/s]
(refer to «Technical data»)
p
SFS
C
min
q
L
=
2
q
L
gasflow for learn [
mbar l/s
]
p
SFS
sensor full scale pressure [
mbar
]
C
min
min. controllable conductance of valve [l/s]
(refer to «Technical data»)
q
L
= 39.4 p
SFS
C
min
q
L
gasflow for learn [
sccm
]
p
SFS
sensor full scale pressure [
Torr
]
C
min
min. controllable conductance of valve [l/s]
(refer to «Technical data»)
3.7 Close valve
Local operation
:
(„Control View‟, „Control Performance Analyzer‟ or
„Service Box 2„)
Remote operation
:
(Refer to chapter «Explicit messaging control
commands» for details)
Push CLOSE button
1. Send EXECUTING
(if not yet selected)
2. Send SETPOINT TYPE
= position control
3. Send CONTROL MODE for position
= close valve
3.8 Open valve
Local operation
:
(„Control View‟, „Control Performance Analyzer‟ or
„Service Box 2„)
Remote operation
:
(Refer to chapter «Explicit messaging control
commands» for details)
Push OPEN button
1. Send EXECUTING
(if not yet selected)
2. Send SETPOINT TYPE
= position control
3. Send CONTROL MODE for position
= open valve
