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138

D292469I

PART NUMBER

FRONT/BACK

POCKETS

FRONT/BACK

SPACING

LEFT/RIGHT

POCKETS

LEFT/RIGHT

SPACING

H20-075-17

16

0.1100

16

0.1100

H20-075-18

18

0.0930

18

0.0930

H20-075-24

18

0.0930

18

0.0930

H20-080

10

0.1667

10

0.1667

H20-080-11

10

0.1667

10

0.1667

H20-080-50

10

0.1680

10

0.1680

H20-080-24

13

0.1340

13

0.1340

H20-081

9

0.1670

9

0.1670

H20-085-18

10

0.1667

10

0.1667

H20-085-24

10

0.1660

10

0.1660

H20-090-11

10

0.1667

10

0.1667

H20-090-16

10

0.1667

10

0.1667

H20-090-24

10

0.1667

10

0.1667

H20-090-35

10

0.1660

10

0.1660

H20-091

10

0.1660

10

0.1660

H20-095-17

16

0.1100

16

0.1100

H20-095-24

10

0.1660

10

0.1660

H20-095-11

10

0.1667

10

0.1667

H20-099

14

0.1150

14

0.1150

H20-099-32

12

0.1400

12

0.1400

H20-100-11

10

0.1667

10

0.1667

H20-100-32

10

0.1667

10

0.1667

H20-100-35

10

0.1660

10

0.1660

H20-105-11

10

0.1667

10

0.1667

H20-110-16

10

0.1667

10

0.1667

H20-110-24

10

0.1667

10

0.1667

H20-112

11

0.1590

11

0.1590

H20-120-20

10

0.1750

10

0.1750

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Содержание Royce DE35-ST

Страница 1: ...35 300 User s Guide User s Guide D292469I Royce Instruments 480 Technology Way Napa CA 94558 PH 707 255 9078 www royceinstruments com V TEK Inc 751 Summit Avenue Mankato MN 56001 PH 507 387 2039 www v...

Страница 2: ...2 D292469I BLANK PAGE...

Страница 3: ...ing standards have either been referred to or been complied with in part or in full as relevant Low Voltage Directive LVD EN 61010 Safety Requirements for Electrical Equipment for Measurement Control...

Страница 4: ...nstallation 12 Uncrate the DE35 DE35 300 12 Unpack the Carton 12 Setup Start Up 13 Connections Setup 13 Power Up 14 Installing an Eject Head 15 Installing a Pickup Tip 16 Installing the Wafer Holder 1...

Страница 5: ...Setup 67 Changing Output Sizes 67 Selecting a New Die Count 67 Selecting a New Waffle Pack Type 67 Calibrating Waffle Packs 68 Programming Waffle Pack Dimensions 70 Erasing Unwanted Pattern Numbers 72...

Страница 6: ...92 Replace Gripper Fingers 93 Die Underside Inspection 95 Adjust Pickup Tip Height at Underside Inspection 95 Underside Inspection Cycle 96 Die Facet Inspection 97 Adjust Pickup Tip Height at Facet I...

Страница 7: ...upplies 113 Links 113 General Mirror Use Tips 113 Eject Head Overview 114 0 75 Diameter Eject Heads 114 1 1 1 5 2 0 Diameter Eject Heads 115 Needle Replacement Planarization of 0 75 inch diameter smal...

Страница 8: ...up Waffle pack pockets for die placement are automatically selected Manual selection using the keyboard arrow keys enables completion of partially filled waffle packs If a grading output mode is selec...

Страница 9: ...OD CLEAR or equivalent customer supplied ELECTRICAL 110 220 VAC 50 60 HZ POWER 25 watts continuous 50 watts intermittent FUSE DE35 ST 5 Amp DE35 300 5 Amp Installed Dimensions DE35 ST WIDTH 45 in 1 1...

Страница 10: ...section Indoor use Altitude up to 2000 meters 60 to 70 degrees Fahrenheit Maximum Relative Humidity of 10 to 90 percent non saturating Main supply voltage fluctuations not to exceed 10 of nominal volt...

Страница 11: ...ou are wet If the machine comes in contact with any liquids unplug the power and line cords immediately Do not plug the machine back in until it has been dried thoroughly 7 Damage Requiring Service Th...

Страница 12: ...are designed for your safety Do not attempt to defeat this purpose If you cannot insert the plug easily an electrician should replace your outlet 14 EMO switch cables must be plugged in correctly PC...

Страница 13: ...vacuum in accordance with the specifications given in Utility Requirements section 3 Connect all power Unpack the Carton 1 Inventory all parts and accessories against the shipping document 2 Verify al...

Страница 14: ...easily damaged b The Camera orientation is set at the factory so that a non inverted image appears on the monitor 4 Install an Eject Head into the Eject Actuator see directions on the following page...

Страница 15: ...r 3 Press the Power button on the front of the PC The camera will turn on automatically when the PC is turned on 4 A light should now be seen on the front of the PC showing that the PC is on see Figur...

Страница 16: ...is snug b For multiple needle heads the Eject Head will need to be rotated until the needles are square with the die being picked For motorized stages DES AUM the Eject Head should always be screwed f...

Страница 17: ...and the proper size tip for the die you want to pick 1 With the power ON use the ARM LOAD UNLOAD key to sequence the Z Arm till it is located between the Wafer Holder and the Output Plate 2 Insert tip...

Страница 18: ...ing the Wafer Holder 1 Install the Wafer Holder on the Die Eject Stage DES with the 10 32 x 2 25 socket cap screws provided Figure 1 1 Max 4 in Wafer Diameter Holder Figure 1 2 Max 6 in Wafer Diameter...

Страница 19: ...irst consulting the manufacturer 1 Turn on the Monitor and the PC The Royce TV program will automatically launch 2 Click on the button and then move the cursor over to the live video image Click in th...

Страница 20: ...inue resetting 2 On the DE35 ST keyboard select Single Step a The LCD should display Teach Step Fine or Coarse in upper left corner and Pickup Clear in the upper right corner b The second line indicat...

Страница 21: ...nylon tipped Setscrew that should be snugged up to ensure it does not vibrate out of adjustment 9 Make adjustments to the Eject Head position by loosening the large thumbnut on the Eject Actuator Arm...

Страница 22: ...displayed check the micro switch on the holder and or the plug in the connector b When the LCD displays To resume press the Yes key press YES The system will continue resetting 2 On the DE35 ST keyboa...

Страница 23: ...ave a mark raise the needle height by turning the Stop Ring on the Eject Actuator counter clockwise This is the large ring just below the Eject Head NOTE This ring has a nylon tipped Setscrew that sho...

Страница 24: ...tor side of the base as shown below WARNING DO NOT MOVE THE EJECT HEAD Y POSITION WHILE THE NEEDLES ARE UP doing so may break the needles or tear the wafer tape 10 Align the Vision System X Y to the E...

Страница 25: ...o image Click on the top left corner of the die and drag down to the bottom right corner of the die and release This creates a cross hair along each edge of the die The die is now correctly targeted I...

Страница 26: ...DE35 ST Operating Instructions D292469I 25 BLANK PAGE...

Страница 27: ...3 Repeat until all desired shapes have been created Editing Shapes 1 Click on the shape in the live video image This makes the shape active and small handle boxes will appear to allow editing To resiz...

Страница 28: ...cept to save the changes See Figures 5 and 6 for more detail 2 When using multiple shapes that overlap the order of the shapes can be altered by selecting the desired shape and clicking Bring To Front...

Страница 29: ...of view 2 Draw a rectangle around the item 3 Right click on the rectangle and select Set Dimensions 4 In the Set Dimensions window see Figure 7 select either Set Width or Select Height based on which...

Страница 30: ...he user will only need to change recipes The name of the active recipe is displayed in the toolbar To save the current screen pattern as a new recipe click on the Floppy Disk Icon on the toolbar This...

Страница 31: ...les C Program Files x86 Royce Instruments RoyceTechnicalVideo Images The file name is automatically created based on the date and time down to the millisecond at which the snapshot was taken Either th...

Страница 32: ...ior to shutdown Multiple Cameras For use with Underside or Facet Inspection options When multiple cameras are installed a button for each camera will appear in the toolbar For example in the illustrat...

Страница 33: ...cus adjustments then making adjustments to the digital camera settings may help resolve the issue Ensure that Royce Technical Video software is closed Launch the FlyCap2 utility which if not available...

Страница 34: ...ighboring die are picked or near the perimeter of the wafer then the vision parameters set earlier may no longer be valid In addition as the arm moves in front of the camera during operation if auto i...

Страница 35: ...find the Prolific USB to Serial Comm Port COMX 7 Make note of the COM number and close Device Manager 8 Double click the Royce Firmware Management icon on the Desktop 9 When the application opens do t...

Страница 36: ...o the Royce Technical Video PC Once a backup has been created the Update Firmware function can be used to restore DE35 ST mainframe firmware from the backup Note You must complete the Connect to the D...

Страница 37: ...irmware from a backup click the desired backup MF_BACKUP_YYYYMMddHHmmss 3 Once the update has completed a File Management Success dialog will appear and indicate the number of affected files 4 After c...

Страница 38: ...e a Recipe The system has the capability of storing up to nine recipes All nine recipes are initially saved as factory defaults a Open an existing recipe by pressing the Output Select key then scroll...

Страница 39: ...be saved to whatever recipe number is currently loaded selected LOADING RECIPE X The new recipe number selected will be loaded into the system Use the ARROW key to move the cursor down to the next li...

Страница 40: ...ut Type 7 29 Plate 14468 Note Not all fixtures shown in software are available on all systems Please contact Customer Service for assistance in selecting the appropriate plate number if the plate you...

Страница 41: ...to move the cursor down to the next line item of the menu g INSPECTION OPTIONS SUB MENU Select desired Inspection option s i Press the YES key A Sub Menu will open and allow you to select available in...

Страница 42: ...The display will say either Catalog or New Pattern If it is a catalog pattern number the dimensions will be automatically loaded If it says NEW go to the Programming Your Own Waffle Pack chapter befo...

Страница 43: ...nd move down to place height 3 Use the DOWN key to lower the tip into the pocket to make it easier to see where the tip is in the pocket 4 Use the ARROW keys to align the tip in the center of the pock...

Страница 44: ...ION 3 GO DOWN TO PICK HEIGHT 4 TURN ON PICKUP VACUUM 5 LIFT NEEDLES 6 WAIT X XXX SECS FOR DIE TO LIFT 7 LIFT TO SEARCH HEIGHT AT 8000 u sec 8 GO UP TO TRAVERSE HEIGHT 9 TURN OFF TAPE VACUUM 10 RETRACT...

Страница 45: ...44 D292469I BLANK PAGE...

Страница 46: ...es Process up to nine recipes Select between two 2 four 2 one 4 or two 4 waffle or gel packs Choose Vial output Substrate output or Type 7 8 27 or 29 wafer output Choose 1 grade 2 grades or 4 grades w...

Страница 47: ...ect To open the menu press the OUTPUT SELECT key The menu has many options however only two lines will be displayed at a time Press the YES key with the curser in front of any menu item to select that...

Страница 48: ...This sequence allows picking of a die from a waffle pack or other tray and placing it to the right output tray X Trays X in Plate XXXXX This line will allow you to select the output configuration fro...

Страница 49: ...cond pocket and so on until the Gel pak is full The Arm will then advance to the second pak 2 Vials Plate 9948 Die will be placed into the vials starting from the front vial When that vial is full or...

Страница 50: ...et to Grade 1 To assign a different grade to a tray move the so it points at the desired tray press Yes to make active then use the buttons on the keypad until the desired grade is shown Press Yes to...

Страница 51: ...Pak and places die from right to left The Inverted X Axis Placement Sequence in a Waffle Pack or Gel Pak is shown below The Inverted sequence starts on the front left side of the Waffle Pack or Gel Pa...

Страница 52: ...rts on the Rear side of the Waffle Pack or Gel Pak and places die from Rear to Front A combination of the X Y Placement sequences will allow the user to begin in any corner of the Waffle Pack or Gel P...

Страница 53: ...be installed to view the facet of the die Die Pickup Non Surface Pickup Surface Pickup Surface Pickup This will set up the machine for pick up tips that touch the top of the die to pick them Vacuum is...

Страница 54: ...ough Calibrate Trays is at the top of the menu it should be selected after the waffle pack is entered and saved Because the waffle packs are not perfect you must calibrate them even if the part number...

Страница 55: ...fle packs or H44 for 4 inch waffle packs This portion of the part number will be ignored when entering the number The display on the DE35 will default to 000000 00 If the part number to be entered is...

Страница 56: ...ed per row in the X direction Y Positions This number will tell the machine how many die will be placed per row in the Y direction Save Output Pattern After all items are entered pressing YES with the...

Страница 57: ...56 D292469I BLANK PAGE...

Страница 58: ...ll go directly to the Die Pickup Position The Pickup Arm then waits for a short time at the pickup position for the die to be lifted After the die is picked the arm moves to the next empty waffle pack...

Страница 59: ...ve the Pickup Tip position through each pocket of the current column of both waffle packs in that axis NOTE The pocket that the tip is left in will be the next pocket the die will be placed to when th...

Страница 60: ...ct Test key will eject the Eject Head needles Pressing this key again will retract the needles If you are unsure if the needles are ejected pressing NO always retract the needles in RUN Mode Arm Load...

Страница 61: ...o 0 Numeric Keys If more than one output grade has been assigned to the output trays from the OUTPUT SELECT menu then pressing a number on the keypad will tell the system which grade to place the next...

Страница 62: ...LCD You can now verify pick up and place positions verify that solenoid valves are functioning and edit settings Pressing the Foot Pedal will advance the machine to the next step in the pick and place...

Страница 63: ...machine If the pickup is not located over the waffle pack area the machine will beep but nothing will happen Left Right Arrows Adjust the pickup arm towards the Left Right of the machine by either a...

Страница 64: ...k and place cycle with a description of the action and adjustments allowed when in Single Step 1 TURN ON TAPE VACUUM Vacuum is applied through the Eject Head to hold the tape in place No adjustments a...

Страница 65: ...hen this is displayed on the LCD you can adjust the speed at which the pickup head will lift to search height The range is 100 to 8000 u sec Coarse will adjust in increments of 1000 and Fine will adju...

Страница 66: ...into the waffle pack 14 TURN OFF PICKUP VACUUM The pickup vacuum is turned OFF to release the die in the waffle pack 15 PURGE PICKUP X XXX SECS A puff of air is applied to the Pickup Tip to insure the...

Страница 67: ...into the teach mode While in the Single Step Mode pressing the TEACH key will toggle the teach mode disabling the edit function Teach Mode is designed to allow the Operator to make adjustments to the...

Страница 68: ...rowse through the values associated with the next waffle pack part number Selecting a New Die Count 1 To change the die count press the OUTPUT SIZES key 2 Press the Down Arrow to scroll to the 00000 D...

Страница 69: ...a good first guess of the actual waffle pack size When using the colored ABS Waffle Packs the preprogrammed dimensions will probably be adequate provided the die is at least 0 010 in smaller than the...

Страница 70: ...verify the calibration of any waffle pack hit the key If the calibration is started after some die have been placed in the waffle pack the next placement pocket position will be remembered when operat...

Страница 71: ...red Part Number This must be an 8 digit number with zeros entered to bring the number to 8 digits For example if the actual part number is H20 55 24 then enter the part number as 000055 24 X Pitch The...

Страница 72: ...to save it permanently if you have no long term need To save the configuration in long term memory press the YES key at the SAVE CONFIGURATION prompt in the menu The system will then attempt to save y...

Страница 73: ...umber with 000000 00 All pitch and pocket count values will be returned to zero 3 Use the Up Down Arrow keys to move through the menu to the SAVE CONFIGURATION line Press the YES key and the old patte...

Страница 74: ...4 Trays 2 in Plate 3105 2 trays 2 in vacuum release Plate 13784 1 Trays 4 in Plate 3084 2 Trays 4 in Plate 5089 2 Trays 4 in vacuum release Plate 16712 2 Vials Plate 9948 1 Substrate Plate 13472 Wafer...

Страница 75: ...adjust as needed Adjusting the Die Pickup Delay When the Die Ejector is activated the needles start to rise and lift the die from the adhesive tape The DIE PICKUP DELAY setting controls how long the...

Страница 76: ...keys will adjust the search height For no delay in picking make the search height the same as the pick height Adjusting Pickup Tip Height at Placement Place the system in Single Step Mode by pressing...

Страница 77: ...T screw DE35 300 on the right of the DES Eject Head support 3 Cycle the system until the Z Arm is in the Pick Position at Pick height LCD will indicate TURN ON PICKUP VACUUM and PICKUP CLEAR 4 Use the...

Страница 78: ...ickup Body is fully grounded For best performance the pickup tip should be made from static dissipating material Blow off pressure can be set between 2 and 10 psi Factory setting will be about 5 psi T...

Страница 79: ...will impair die release reliability There is a trade off between Purge Time and Purge Pressure You will need a shorter time using a higher pressure When using high blow off pressure it is important to...

Страница 80: ...rt delay and another click as the Die Eject Compressed Air Solenoid Valve turns ON You will now see the Eject Needles emerge from the top of the plunge up Head Assembly Although not a critical adjustm...

Страница 81: ...han 1 will slow the needle eject time Turning this adjustment counter clockwise to greater than 1 will speed up the eject time Repeat the adjustment and EJECT TEST until the needles take around 0 5 se...

Страница 82: ...e used to align the tip approximately in the middle of the Eject Head 6 Lightly tap the Pickup Tip onto the film to leave a mark 7 Press the NO key to terminate the cycle and the Pickup Arm will move...

Страница 83: ...82 D292469I NOTE The Die Ejector is automatically switched off after about 1 minute...

Страница 84: ...Tip into contact with the top of the die The Place Position Tip Vacuum is turned off and the inverting tip vacuum is turned on The arm then rotates back 180 degrees to its original position The inver...

Страница 85: ...p Down keys can be used to move the Z Axis as necessary This position is provided to allow the Operator to make fine X adjustments to the Inverter Flexure Die position without the die coming in contac...

Страница 86: ...POSITION The Die Inverter Pickup arm will rotate back 180 degrees to the normal position 14 ARM GO TO DIE INVERTER PICK POSITION The pickup arm will move to position the pickup tip directly above the...

Страница 87: ...should normally be the same type Normally a Pickup Shank and rubber tips are used This will help to prevent damage to the die during the inversion process The inverter tips should be adjusted so that...

Страница 88: ...d error required to adjust the position 1 Select SINGLE STEP mode 2 Using the Foot Switch STEP the system until the LCD displays DIE INVERTER TO HOME POSITION The next Foot Switch press will home the...

Страница 89: ...see picture above Adjust Inverter Z Y Position The Die Inverter is mounted on a precision slide assembly Both Axis Adjustment Screws are locked in place 1 Loosen the Lockdown Screws before adjusting 2...

Страница 90: ...This causes the die to jump unpredictably The Stabilizing Pin maintains a very small area of adhesive contact and prevents the full release of the die from the tape The remaining adhesive force is usu...

Страница 91: ...ols the force at which the Gripper Fingers close 7 WAIT N NNN SECS FOR GRIPPERS TO CLOSE Displayed time will be the amount of time the Pickup Arm waits in the current position for the Gripper Fingers...

Страница 92: ...ced as close to the pick position as the Operator wants to improve through put Edge Pick Up When the die is elevated it is essential that the die be lifted without obstruction If the die bumps into th...

Страница 93: ...ck position at the pick height b Loosen the Gripper Finger Set Screws so that the Gripper Fingers fall onto the wafer surface Planarize the Gripper Fingers c Once Gripper Fingers are level tighten the...

Страница 94: ...orce Control 6 Adjust Vacuum a Rotate the Regulator Control Knob on Front Panel clockwise to increase the vacuum thus increasing gripper pressure Replace Gripper Fingers The Gripper Fingers are locked...

Страница 95: ...94 D292469I Blank Page...

Страница 96: ...stops over the Underside Inspection Camera and the head is lowered to bring the die into focus The Operator can now look at the bottom of the die and choose the category the die should be packaged as...

Страница 97: ...HEIGHT 10 TURN OFF TAPE VACUUM 11 RETRACT NEEDLES 12 ARM GO TO UNDERSIDE INSPECT POSITION 13 GO DOWN TO INSPECT HEIGHT 14 INSPECT UNDERSIDE OF DIE 15 FOOTPEDAL GRADE KEY ACCEPTS KEY 0 REJECTS NOTE Wh...

Страница 98: ...l ROC Adjust Pickup Tip Height at Facet Inspection 1 Place the system in Single Step Mode by pressing the SINGLE STEP key 2 Cycle the system until the pickup is holding a die at the Down position over...

Страница 99: ...the SINGLE STEP key 2 Cycle the system until the pickup is holding a die at the Down position over the Rotating Spindle of the Facet Inspection Camera 3 Make adjustments using the Positioning Screws...

Страница 100: ...15 TURN ON INSPECT POSITION VACUUM 16 TURN OFF PICKUP VACUUM 17 PURGE PICKUP X XXX secs 18 GO UP TO TRAVERSE HEIGHT 19 PERFORM DIE FACET INSPECTION 20 FOOTPEDAL ROTATES GRADE KEY ACCEPTS KEY 0 REJECT...

Страница 101: ...100 D292469I 28 PURGE PICKUP X XXX secs 29 DELAY AFTER PLACE X XXX secs 30 GO TO TRAVERSE HEIGHT 31 FINISH CYCLE 300um die on Rotating Spindle under LED Light...

Страница 102: ...are normally used where the wafer is sawn leaving wide kerfs between rows of die for ease of picking With no stretching there is no distortion of the tape meaning less skew in the die when picking Wa...

Страница 103: ...urled Screws holding the Hinge Bar at the back of the Film Frame Holder can reduce the degree of expansion The Clamp Assembly at the front of the wafer holder can also be slackened off in half revolut...

Страница 104: ...the Top Plate and press it down until the Clamp Mechanism can be latched under the Bottom Plate 6 Push the red handle over until it is horizontal This will stretch the film by about 0 5 in across the...

Страница 105: ...about 5 degrees To rotate it adjust the Theta Adjust Knurled Screw which is located at an angle on the left side of the frame holder a If the frame is too far off for this correction set the holder b...

Страница 106: ...100 Microns The Eject Speed has a range of 100 to 7000 Microns sec adjustable in increments of 10 or 100 Microns sec Adjust Needle Speed Height 1 Place system in SINGLE STEP 2 Step through the sequenc...

Страница 107: ...106 D292469I Blank Page...

Страница 108: ...aintenance Preventative Maintenance Schedule Warning Do Not Lubricate X or Y Lead screws Bi monthly Maintenance 1 Grease Z Motion Worm Gear with Teflon grease Royce P N 2359 2 Lightly lubricate X Slid...

Страница 109: ...108 D292469I 3 Lubricate Contact Clear Switch Pin with one drop of WD 40 Apply one drop of WD 40 to contact surface Wipe off excess Contact Clear Switch Pin...

Страница 110: ...ance requirements will remain the same 1 Lubricate Cross Roller Ways For both DES AUM DES Pneumatic Stages Lightly lubricate X Y and Z Motion Cross Roller Ways Use light machine oil such as 3 in 1 oil...

Страница 111: ...t and 1 right b O rings inside the Hand Wheel Bearing Block Royce P N 2440 3 in the left side block and 3 in the right side block c Replace O rings if cracked or loose DO NOT LUBRICATE O RINGS NOTE Do...

Страница 112: ...till in focus STOP If not go to step 4 4 Loosen the 3 Focus Screws on the camera and 1 of the Optical Center Screws OCS 5 Turn the Center Collar until it is in focus 6 Tighten all screws 7 Repeat step...

Страница 113: ...fine step 12 Press SINGLE STEP to return to normal operation The machine will now lower to this height during normal operation Adjust Pickup Height at Place Positions 1 Turn ON the DE35 ST and let it...

Страница 114: ...iew Needle Replacement Planarization of 0 75 inch diameter small Eject Heads Needle Replacement Planarization of 1 1 1 5 and 2 0 inch diameter large Eject Heads General Mirror Use Tips Use clean and p...

Страница 115: ...view The Piston houses the eject needles and is the moving part during the needle eject The Eject Head Body houses the piston and supplies vacuum to the wafer tape via the body cap 0 75 Diameter Eject...

Страница 116: ...in the piston and can vary by eject head The user should consult the eject head needle configuration set up documentation that is provided with those eject heads Stainless Steel Ball s Piston style EJ...

Страница 117: ...inless Steel Ball s Eject Needle Set Screw s Piston Piston O ring Eject Head Body Vacuum Tube Flange Spring Eject Needles Piston Eject Needle Set Screws Stainless Steel Ball s Top view O ring Hex Nut...

Страница 118: ...y Loosen the eject needle setscrew s on the piston remove the eject needle s from the bottom of the piston replace and planarize See step 7 1 If the Eject Head includes Integrated Vacuum Gallery EJA l...

Страница 119: ...ve the spring PN 2399 Remove the sticker 111019 from the bottom of the eject head 4 Each needle has a set screw that secures it in the brass piston Locate the needle s that needs replacement and loose...

Страница 120: ...Be sure that all needle holes are aligned with the holes in the eject head body Also be sure that the mounting screw holes in the piston align with those in the eject head body Tightened the locking s...

Страница 121: ...ote Be careful not to move or slide the eject head on the mirror when it is flipped as it may damage the needles 9 Be sure that all needles are resting on the mirror Rotate mirror and eject head 90 an...

Страница 122: ...egrated vacuum chamber EJA 11 Check for planarization under microscope Needles must be sub flush to eject head surface and level to each other If planar and sub flush fully tighten the set screws Plac...

Страница 123: ...alves together Remove threaded vacuum chamber adapter 2 Place eject head facing down Remove the screws holding the bottom flange body in place For eject heads that have internal springs use caution Ho...

Страница 124: ...hold the upper part of the piston use a wrench to loosen and remove the hex screw at the bottom of the piston ii Remove spring o ring and slide the piston out of the flange c Plunger style eject heads...

Страница 125: ...he opening Gently place the piston and collar onto the mirror Notes Using a C ring collar and a mirror all needles must be set planer to top surface of eject cap and all needles must be planer to with...

Страница 126: ...around the o ring Inspect eject body o ring 2441 and replace if worn or cracked a Plunger style eject heads re install plunger into flange install and tighten the locking set screw until it is below t...

Страница 127: ...axis The edge of the spring should not go beyond the plane edge of the hex screw Note If the spring cannot be set flush to plane edge of hex screw replace the spring PN 2092 iv Align the piston with t...

Страница 128: ...h Gently lower the flange into the body install the 2 screws that hold the flange to the body 10 To check piston motion carefully hold the eject head between your thumb and forefinger making sure your...

Страница 129: ...tandard Needle EN 4 24454 0 004 Non Standard Needle EN 4 15403 0 005 Non Standard Needle EN 4 14961 0 008 Non Standard Needle EN 4 12894 0 010 Standard Needle and NSC stop pin EN 3 01655 0 001 Standar...

Страница 130: ...DE35 ST Operating Instructions D292469I 129 Blank Page...

Страница 131: ...350 in sq 0 421 to 0 550 in EJT 400 02456 1 5 in EN 2 Quad needle 0 400 in sq 0 471 to 0 700 in EJT 450 02457 1 5 in EN 2 Quad needle 0 450 in sq 0 521 to 0 800 in EJT 500 27064 1 5 in EN 2 Quad need...

Страница 132: ...DE35 ST Operating Instructions D292469I 131 Blank Page...

Страница 133: ...ry in order to meet varying die transfer needs All pick up tools are designed for quick changeover and attach to the pick up head with a simple set screw Standard pick up tip materials and dimensions...

Страница 134: ...DE35 ST Operating Instructions D292469I 133 Blank Page...

Страница 135: ...15399 Replacement Pickup Cantilever flexures 1 6655 Y axis drive belt 1 20881 Inline Air Vacuum Filter 2 2359 Magnalube for z axis worm gear 1 DES X Y Input Stage 2439 O Ring hand wheels 2 2440 O Ring...

Страница 136: ...pare Parts These items are not expected to require replacement for several years however due to the high speed of technological change these parts may be obsolete or otherwise unavailable when require...

Страница 137: ...SPACING LEFT RIGHT POCKETS LEFT RIGHT SPACING H20 002 10 0 1667 10 0 1667 H20 003 10 0 1667 10 0 1667 H20 004 3 0 5550 4 0 4500 H20 010 12 0 1580 12 0 1580 H20 015 20 0 0850 20 0 0850 H20 018 10 0 160...

Страница 138: ...20 0 0833 H20 050 08 10 0 1667 10 0 1667 H20 051 19 0 0840 19 0 0840 H20 055 24 20 0 0840 20 0 0840 H20 055 18 20 0 0880 20 0 0880 H20 059 20 0 0840 20 0 0840 H20 060 18 20 0 0840 20 0 0840 H20 060 2...

Страница 139: ...085 24 10 0 1660 10 0 1660 H20 090 11 10 0 1667 10 0 1667 H20 090 16 10 0 1667 10 0 1667 H20 090 24 10 0 1667 10 0 1667 H20 090 35 10 0 1660 10 0 1660 H20 091 10 0 1660 10 0 1660 H20 095 17 16 0 1100...

Страница 140: ...940 H20 150 16 10 0 1667 10 0 1667 H20 150 24 10 0 1667 10 0 1667 H20 150 35 10 0 1667 10 0 1667 H20 155 9 0 1960 9 0 1960 H20 165 7 0 2350 7 0 2350 H20 165 24 7 0 2350 7 0 2350 H20 168 8 0 2130 8 0 2...

Страница 141: ...0 5 0 2500 H20 258 5 0 3120 5 0 3120 H20 269 4 0 4600 4 0 4600 H20 280 16 6 0 2970 6 0 2970 H20 280 24 6 0 2970 6 0 2970 H20 287 5 0 3470 5 0 3470 H20 298 5 0 3510 5 0 3510 H20 300 5 0 3500 5 0 3500 H...

Страница 142: ...7 H20 417 7 0 2500 7 0 2500 H20 420 3 0 5550 3 0 5550 H20 425 6 0 2970 6 0 2970 H20 425 24 6 0 2970 6 0 2970 H20 426 3 0 5560 3 0 5560 H20 426 24 3 0 5500 3 0 5500 H20 430 3 0 5000 3 0 5000 H20 430 24...

Страница 143: ...0 H20 72090 16 0 1014 12 0 1250 H20 73091 12 0 1440 10 0 1720 H20 73103 17 0 0950 13 0 1240 H20 74099 17 0 0950 13 0 1240 H20 74104 17 0 0950 13 0 1240 H20 74149 17 0 0900 10 0 1650 H20 78110 14 0 123...

Страница 144: ...0 0 1740 8 0 2160 H20 113122 10 0 1750 10 0 1740 H20 114284 10 0 1760 5 0 3480 H20 115312 10 0 1740 5 0 3520 H20 118177 6 0 2950 6 0 2950 H20 118246 10 0 1730 5 0 3410 H20 120160 10 0 1740 8 0 2180 H2...

Страница 145: ...8100 H20 162299 8 0 2030 5 0 3290 H20 165149 6 0 2950 6 0 2950 H20 166256 6 0 2910 4 0 4250 H20 166306 8 0 2030 5 0 3320 H20 169219 7 0 2500 6 0 2900 H20 169269 7 0 2500 4 0 4600 H20 169369 7 0 2500...

Страница 146: ...0 2950 H20 200265 6 0 3400 5 0 3440 H20 200530 7 0 2500 3 0 5820 H20 201248 6 0 2850 5 0 3400 H20 250750 5 0 3400 2 0 8500 H20 279359 5 0 3450 4 0 4300 H20 284296 5 0 3400 5 0 3280 H20 300850 5 0 3500...

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