5
6.3
F
LOW
C
ALIBRATION FOR
M
ODULE
C .................................................................................................................42
6.4
F
LOW
C
ALIBRATION FOR
C
OLLOCATED
M
ODULE
C .............................................................................................43
SECTION 7
FILTER CHANGE ................................................................................................................................45
7.1
F
ILTER
C
HANGE FOR
M
ODULE
C ......................................................................................................................45
7.1.1
Exposed Filter Values ..........................................................................................................................45
7.1.2
Replace Memory Card .........................................................................................................................46
7.1.3
Remove Exposed Filter Cassette Cartridge .........................................................................................46
7.1.4
Insert New Filter Cassette Cartridge ....................................................................................................47
7.1.5
New Filter Identification ........................................................................................................................47
7.1.6
Vacuum Check/Manifold Check ...........................................................................................................47
7.1.7
Completion ...........................................................................................................................................48
7.2
F
ILTER
C
HANGE FOR
C
OLLOCATED
M
ODULE
C ..................................................................................................48
7.3
S
AMPLING WITH
S
TACKED
F
ILTERS
...................................................................................................................48
7.4
Q
UICK
G
UIDE FOR
F
ILTER
C
HANGE
...................................................................................................................49
SECTION 8
AUDIT ..................................................................................................................................................51
8.1
L
EAK
C
HECK ON
M
ODULE
C.............................................................................................................................51
8.1.1
Maximum Allowable Leak Rate ............................................................................................................51
8.1.2
Audit Cassette Cartridge/Tray Installation ............................................................................................51
8.1.3
Beginning Leak Check .........................................................................................................................51
8.1.4
Installing Flow Audit Adapter ................................................................................................................52
8.1.5
Installing Pump Shutoff Valve ..............................................................................................................52
8.1.6
Valves Open.........................................................................................................................................52
8.1.7
Closing Valves......................................................................................................................................53
8.1.8
Performing Leak Check........................................................................................................................53
8.1.9
Completing Leak Check .......................................................................................................................53
8.2
L
EAK
C
HECK ON
C
OLLOCATED
M
ODULE
C.........................................................................................................54
8.3
F
LOW
A
UDIT
...................................................................................................................................................54
8.4
T
EMPERATURE
A
UDIT
......................................................................................................................................55
8.5
B
AROMETRIC
P
RESSURE
A
UDIT
........................................................................................................................55
SECTION 9
SERVICE .............................................................................................................................................57
9.1
R
EPLACING
F
USES
/MOV
S
...............................................................................................................................57
9.2
M
ANUALLY
M
OVE
S
OLENOID
M
ANIFOLD
............................................................................................................58
9.3
E
LECTRONICS
B
OX
..........................................................................................................................................59
9.4
C
YCLONE
R
EMOVAL
........................................................................................................................................60
9.5
M
ASS
F
LOW
C
ONTROLLER
(MFC) ....................................................................................................................60
9.6
P
UMP
R
EMOVAL
..............................................................................................................................................61
9.7
O
PTIONAL
P
UMP
E
NCLOSURE
H
EATER
..............................................................................................................62
SECTION 10
TROUBLESHOOTING.....................................................................................................................63
10.1
D
ISPLAY
N
OT
S
HOWN
......................................................................................................................................63
10.2
N
O
P
OWER
.....................................................................................................................................................63
10.3
L
EAK
C
HECK
F
AILED
.......................................................................................................................................63
SECTION 11
INDEX ..............................................................................................................................................65