•
Remove the hose that connects to the rear of the MFC (and runs to the pump inlet), as shown.
•
Unscrew the two (2) flathead screws to loosen, and then remove, the MFC data cable.
•
Unscrew the two Philips screws on the MFC base plate. This plate will then lift out with the MFC
attached. If MFC needs to be replaced/repaired, save mounting plate separately to avoid
accidental discard.
9.6 Pump
Removal
The 120V Pump inside of the Pump Enclosure may need to be serviced or replaced. To remove the
Pump, follow the steps below.
•
Remove the four nuts on the bottom of the Pump Enclosure, shown below (side view).
•
Disconnect the hose that runs from the Mass Flow Controller to the pump, on the MFC end.
•
Disconnect the Outlet Hose that runs from the pump through the bottom of the pump enclosure.
To do this, pull the hose out from the hole, bend slightly, and gently twist the connector and hose
until removed.
•
Unplug the power from the top outlet of the power terminal inside the pump enclosure.
•
Carefully lift the pump out of the base of the pump enclosure. Be aware that the pump is quite
heavy and may take two hands to hold firmly.
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