Ulvac VD151, Инструкция по эксплуатации

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YK08-0028-DI-002-08
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3.3 Air Suction Piping
1) Before connecting the piping to the pump, clean the vacuum chamber, piping, vacuum valve,
etc. well. If they are contaminated, the ultimate pressure may be higher or a longer time may be
required to reduce pressure to the specified level. Wear a pair of gloves to touch any vacuum
section. Do not touch with the bare hand.
2) Use the KF25 (JIS B 8365 –Dimensions of Clamped – type Vacuum Couplings-)for connection
between the pump Inlet and the piping. It is recommended to use piping with bellows so that the
vibration of the pump is not transmitted to the vacuum chamber.
3) Provide a vacuum valve, vacuum gauge and vent valve between the vacuum chamber and
pump, as shown in Fig. 5.
Fig. 5 Connection to vacuum chamber (example)
WARNING
1) Should the Pump sucked the water or substance such as dust,
powder and so on, it would impair the ultimate pressure and further
cause a trouble.
2) You should put the Leak valve closer as possible to the Vacuum
valve in order to prevent the oil from rising up to the Vacuum
chamber when the Pump stopped. If you use it together with the
mechanical booster pump, be sure to put the valve above the pump.
3) Metal mesh on the Suction inlet is put to keep foreign substances
away from the Pump unit. Be sure not to take it off unless
necessitated so to check it.