Ulvac VD151, Инструкция по эксплуатации

Страница: 37 / 68

YK08-0028-DI-002-08
19
4.2 Operation Start
Before starting the pump, check the following again.
1) Piping and wire connection are completed (Refer to the “3.3 Air Suction Piping”, “3.4 Exhaust
Connection” and the“3.5 Electrical Connection”).
2) Checking the oil level (Refer to “3.2 Lubrication”) Ensure that the oil level is between the two
level lines on the oil level gauge.
3) Checking the rotating direction (Refer to “3.5 Electrical Connection”) Close the vacuum valve
on the Inlet side, open the vent valve, and run the pump for two to three seconds to check the
rotating direction of the motor. If the motor is rotating in the correct direction (Counterclockwise
as viewed from the motor side), pressure will lower. If it is reversed, interchange two of the
three wires shown in Fig, 6 and fig.7.
4) After checking (1), (2) and (3) above, close the vent valve and run the pump. Here, ensure that
the vacuum gauge between the vacuum valve and the pump indicates a pressure close to the
ultimate pressure.
WARNING
1) The Vacuum pump gets high temperature during operation.
ＶＤ１５１：
temperature increase under non-load operation
：
25
℃
,
ＶＤ１５１：
temperature increase under high-load operation
：
45
℃
ＶＤ２０１：
temperature increase under non-load operation
：
20
℃
,
ＶＤ２０１：
temperature increase under high-load operation
：
78
℃
Provide the appropriate protection in order to avoid the contact with
the surface. Use the pump assembling inside the system.
Refrain from touching the Motor and Pump unit until the Pump cools
down after having stopped operation.
2) Refrain from touching any part other than valve when operating
the Gas ballast.
3 Ensure to close the Gas ballast to start the operation.
The oil might jet out during operation around high pressure range.
4) Oil mist would appear through the Exhaust side if operated around
high pressure range.