Ulvac VD151, Инструкция по эксплуатации

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YK08-0028-DI-002-08
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4.3 Operation Stop
1) Close the vacuum valve on the Inlet side,open the vent valve to vent the pump,and shut down
the pump.
2) After shutdown, open the vent valve to vent the pump to atmospheric pressure.
WARNING
The Vacuum pump gets high temperature during operation.
ＶＤ１５１：
temperature increase under non-load operation
：
25
℃
,
ＶＤ１５１：
temperature increase under high-load operation
：
45
℃
ＶＤ２０１：
temperature increase under non-load operation
：
20
℃
,
ＶＤ２０１：
temperature increase under high-load operation
：
78
℃
Refrain from touching the Motor and Pump unit until the Pump cools
down after having stopped operation.
CAUTION
1) Ensure to close the Vacuum valve and open the Leak valve to stop
the Pump. if failed in following this procedure, the Pump cylinder
gets filled with the oil in several minutes, which might make
difficult to restart operation or give damage to the Pump unit.
Further the oil might accidentally flow back to the Vacuum tank.
2) If failed in closing the Vacuum valve, the vacuum might leak from
the Exhaust side through the Pump unit.