Ulvac VD151, Инструкция по эксплуатации

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YK08-0028-DI-002-08
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3.4 Exhaust Connection
Use the “G1” (JIS B0202-Parallel pipe threads-) for connection between the Outlet of the pump
and the duct piping. It is recommended to provide an oil mist trap to reduce oil consumption and
to trap oil mist.
WARNING
If the pipe connected to the Exhaust outlet had a small diameter or
attached foreign substance inside, there is a risk that the pressure
inside the Vacuum pump rises up to cause break or oil leak of the casing
or Oil level gauge resulting in overload of the motor.
WARNING
1) Be sure to use products made of electricity-conducting material for
the Duct piping. Should you used non electricity-conducting material,
static electricity would be generated under passage of exhaust gas,
generate the charged spark and cause a fire.
2) In the case of the process flowing combustible gas/susceptibility of
substances to burn gas, you are requested to introduce the diluent
gas. Flow the diluent gas from the intake side so that the gas
concentration to be exhausted becomes lower than the explosion
limit.