Ulvac VD151, Инструкция по эксплуатации

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YK08-0028-DI-002-08
Contents-3
Tables and Illustrations
Table. 1 Performance specifications .......................................................................................................... 5
Table. 2 Electric capacity of the motor overload protector ....................................................................... 13
Table. 3 Specification of the temperature sensor (PTO) .......................................................................... 16
Table. 4 Recommended replacement cycle of the vacuum pump oil ...................................................... 30
Table. 5 Trouble check list ........................................................................................................................ 36
Table. 6 Main displacement parts list (VD151)......................................................................................... 45
Table. 7 Main displacement parts list (VD201)......................................................................................... 46
Fig. 1 Warning Label .................................................................................................................................. xi
Fig. 2 VD151 Dimensional drawing ............................................................................................................ 6
Fig. 3 VD201 Dimensional drawing ............................................................................................................ 7
Fig. 4 Lubrication and oil level indication ................................................................................................... 9
Fig. 5 Connection to vacuum chamber (example) ................................................................................... 10
Fig. 6 Terminal box internal wiring diagram ............................................................................................. 14
Fig. 7 Electrical wiring diagram ................................................................................................................ 14
Fig. 8 To use Oil mist trap “Model TMX-1” for “VD151 or VD201” ........................................................... 25
Fig. 9 When having mounted oil mist trap and adapter ........................................................................... 25
Fig. 10 Show the relationship between the suction pressure and pumping speed - MODEL
VD151/VD201 ........................................................................................................................................... 27
Fig. 11 Replacement of coupling spider ................................................................................................... 34