Ulvac DC-10, Руководство по эксплуатации, Страница: 14 / 88

DC Power
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DC-10/DC-20
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2. Overview
3
2. Overview
This chapter describes features, composition, and
specifications of this product.
2-1 Introduction
This power supply is designed as a DC power supply for sputtering with an output of 10/20 kW.
The rated power can be supplied to the load by optimizing the load impedance of plasma.
2-2 Features
・
The output value can be checked on the monitor in the front of the power supply and the each
parameter setting on the panel.
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The output can be produced over the USER control, via the SERIAL communication, and by the panel
operation in the front of the power supply (LOCAL control).
・
An error in each power supply can be checked on the monitor in front of the power supply.
・
With the air-cooling system, cooling water is not necessary.
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There are two models with a different rated output voltage: 800V and 1,000V.
・
As an option, it can be customized to master slave specifications (*1). It can be used as a power
supply system of 10 to 240 kW by connecting power supplies with each other using master slave
cables. 10 kW and 20 kW can be combined flexibly and respectively and up to 12 units can be
connected. Note that power supplies with a rating of 800V and 1,000V cannot be combined on a
master-slave basis.
・
A low energy circuit (*2) can be attached as an option. If an unusual electrical discharge (*3) is
detected, the low arc energy circuit quickly disconnect the load, reducing the arc energy.
・
As an option, accuracy can be guaranteed in the low power range of 1% to 10% of the rated power.
The standard guarantees accuracy from 10% to 100%. Check the items in [2-4. Specifications] for
accuracy and warranty range. Accuracy-guaranteed products in the low power range are described as
S specifications.
・
Depending on the rated specification and the optional configurations of power supplies, the machinery
number (*4) is identified as shown in Table 2-1. When the power breaker is closed, the corresponding
machinery number appears on the monitor in the front of the power supply. For the front monitor
display when the breaker is closed, see section 5-1-1.
*1: Hereinafter a master slave is referred to as MS.
*2: Hereinafter a low arc energy circuit is referred to as LARC.
*3: Hereinafter an unusual electrical discharge is referred to as ARC.
*4: Hereinafter a machinery number is referred to as M/N.