Setting the Conditions for Each Object Type
3-21
3
1. Specify a measurement area smaller than the mask area and specify the binary conditions.
2. Return to the MAIN OPS MENU.
3
Setting the binary area conditions
4
Measure the binary area
1
MEAS SHAPE
2
MEAS AREA
3
AUTO REGIST
4
THRESHOLD
5
INVERT B/W
6
BINARY PROCESS
7
BINARY NOISE FILT
8
NUM. OF FILT PASS
RECTANGLE CIRCLE ELLIPSE
MOVE UP.L(224.208) LO.R(287.271)
EXEC(L LIMIT ONLY U&L LIMITS)
U.LM255 L.LM100(0~255)
NO YES
FIXED THRESHOLD-ADJ(VAR-DIFF VAR-RATE)
NO EXPD. CONTR. CONTR. EXPD.
EXPD.0 CONTR.0(0~5)
OPS-MENU RETURN LOCK EVALUATION
Measuring area
Continued from the previous page
Captured image
White dots (six)
Binary mask image (registered in step
1
-2)
Image after executing
a measurement
- The white dots will be converted to
black dots by applying the binary
image mask.