Chapter 10: Cleanroom Robots
Table 10-2. Cleanroom Connections Description
Item
Description
1
CN22
2
Vacuum Fitting, 15 mm OD
3
CN20
4
AIR1 and AIR2, Ø4, BSPT 1/8
5
AIR3 and AIR4, Ø6, BSPT 1/4
For the eMB-40R end of the cable, line up the slot in the cable end with the matching key in
the connector, apply firm pressure straight in, and thread the lock ring fully onto the con-
nector. There should be no visible threads when connected. See Cable Connection from eMB-
40R to Robot on page 66.
For the robot end of the cable, line up the keys (1 large, 4 small) on the cable end with the
grooves in the connector, apply firm pressure straight in, and twist the locking ring a quarter
turn. You should hear and feel a click as it latches into place.
10.3 Requirements
Table 10-3. Cleanroom Robot Requirements
Vacuum source
0.10 m
3
/min (3 ft
3
/min) minimum volumetric flow
rate
350 mm of water (13.5 inches of water) differential
pressure measured between the robot and the
vacuum source
15 mm OD tube fitting at the back of the robot
Quill inside diameter
The inside diameter of the quill must be plugged
by the user’s end-effector in order to maintain
cleanliness at the tool flange.
10.4 ESD Control Features
The 350 CR/ESD robot is compatible with common magnetic semiconductor ESD control meas-
ures. The surface of the robot is painted so that it is resistively coupled to the robot ground.
The bellows are also made of a resistive material that will conduct electrical charges to the
robot ground. This treatment precludes the buildup of any electrical charge (such as tri-
bocharging) on the robot surfaces. In addition, it is formulated to provide a significant res-
istance to ground so that charged surfaces brought in close proximity to the robot will slowly
leak into the robot ground - rather than arc quickly to ground and create a magnetic field
event.
Contact your local Omron support for your specific application details.
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Cobra 350 User's Guide
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