Olympus AL120-6Series, Руководство по обслуживанию, Страница: 49 / 66

Maintenance Manual Test Programs
3-19
Page
Test No./
Test Name
Function Outline
No. 18
Wafer
unloading
position
adjustment
<Retracted position adjustment>
This program can be used to adjust the position where wafers are unloaded into the cassette to the
near side (cassette opening side).
This prevents unloaded wafers from hitting against the inside of the cassette.
[M1]: Load or unload <Load-Unload>
[M2]:
Register <Save>
Insert wafers into any slot of a cassette, and set the cassette.
Using the 4-way button, select the number of the wafer type to adjust from the list of wafer type
numbers displayed on the liquid crystal panel, and then press the [Start] button.
Press the [M1] button to unload wafers into the cassette, starting from the lowest slot.
The unloading position correction amount is displayed on the liquid crystal panel.
The wafer is unloaded into the cassette.
If <Result>: OK is displayed, press the [M2] button to put the correction data into the internal
memory.
Press the [M1] button to repeat steps and
.
•
Press the [Quit] button to terminate the adjustment.
•
Before starting the test, insert wafers into the cassette and push them in until they stop.
(If wafers are already inserted in the cassette, push them in until they stop.)
Position the cassette toward the front as much as possible by taking care that it is inside the range of
the cassette guide clearance.
•
Correctable range: 0.5 to 5 mm
•
An error is displayed when the correction value is negative.
No adjustment is needed, as there is no possibility that unloaded wafers will hit against the inside of
the cassette.
•
This adjustment cannot be done when there is a contact type centering.
No. 19
Centering
adjustment
(wafer
unloading)
<Centering adjustment wafer unloading>
You can confirm or adjust the centering position for wafer unloading.
Press the [Start] button.
You can confirm or adjust the sensor operation setting by manipulating the menu buttons on the liquid
crystal panel.
[M1]: Sensor setting <Sensor setting>
[M2]: Check the sensor movement <Move check>
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[M1]: Sensor operation setting <Sensor setting>
The centering positions for 8- and 6-inch wafers can be registered using the menu buttons on the
liquid crystal panel.
[M1]: Switch between 8- and 6-inch wafers
[M2]: Register the position -3 mm from the center
[M3]: Register the center position
[M4]: Register the po3 mm from the center
Put the centering jig on the macro table in a way that the hole at the center of the centering jig is
aligned with the hole at the center of the macro table.
Press the [M3] button to register the center position.
Put the centering jig on the macro table in a way that the hole at the center of the centering jig is
set at a position -3 mm from the hole at the center of the macro table.
Press the [M2] button to register the -3 mm position.