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Maintenance Manual

 

Table of Contents 

 

 

C-1 

Page 

1 Nomenclature 

1-1

 

1-1 Wafer Loader Main Body································································ 1-

１

 

1-2 Operation Panel ···············································································1-2

 

1-3 Remote Controller (Option) ····························································1-3

 

1-4 Vacuum Stage ··················································································1-4

 

2 Adjustments 

2-1

 

1

 

Adjusting the Cassette Positioning Guide Position 

2-1

 

2

 

Registration of a New Type of Inspection Wafer (Cassette to be Used and Wafer 

Thickness) 

2-2

 

3 Test Programs 

3-1

 

1

 

How to Use the Programs 

3-1

 

2

 

Test Names and Functions 

3-2

 

4 Replacement of Consumables 

4-1

 

1

 

Macro (Center) Table: If a vacuum error has occurred or the table has become damaged 4-1

 

2

 

Macro (Center) Table Oil Seal: If a vacuum error has occurred 

4-1

 

3

 

A-arm: If a vacuum error has occurred or the A-arm has become damaged 

4-3

 

4

 

Vacuum Table: If a vacuum error has occurred or the table has become damaged 

4-4

 

5

 

Oil Seal for Vacuum Table: If a vacuum error has occurred 

4-4

 

6

 

L-arm Vacuum Pad 

4-6

 

7

 

Rubber Microscope Legs: If wafer transfer sound has increased 

4-7

 

Содержание AL120-6Series

Страница 1: ... In order to fully utilize its performance and secure safety please read this manual before operation Please also keep it at hand during operation as well as for future reference This manual is exclusively for maintenance service engineer Please also keep it at hand during operation as well as for future reference AX7834 05 ...

Страница 2: ...This page intentionally left blank ...

Страница 3: ... Back Macro inspection N A Available N A N A Available Available Available 2nd Back Macro inspection N A Available N A N A Available Available Available Microscope Available Available Available Available Available Available Available Wafer Loader AL120 L6 150 AL120 LMB6 150 AL120 L86 AL120 L86 180 AL120 LMB86 AL120 LMB86 180 AL120 LMB8 90 Option AL120 SLK8 Option Tray AL120 TRY M61 86 Option Micro...

Страница 4: ...0 mm The operability is designed based on the SEMI Standard S8 Our company s designed operability is not guaranteed if the loader is installed on a table that does not satisfy the conditions specified above Please refer to the SEMI Standard S8 to select a table 1 Precautions Operators must follow the instructions in the Operation Maintenance Manual If these instructions are not followed safety can...

Страница 5: ...hen clearing broken wafers 9 Wafers under inspection could fall down when the vacuum supply is stopped The check valve and buffer tank should be connected to maintain a vacuum even when the vacuum supply is stopped Buffer tank and the check valve are not attached to Wafer Loader When it is necessary please contact it to nearest OLYMPUS distributor 10 Wafers could fall down if you touch them or app...

Страница 6: ...range You can get more working space during maintenance or other work by changing the observation tube mounting direction and moving the stage This installation space is determined according to the SEMI guideline SEMI S8 0308 Provide adequate space for operating the loader according to your intended use by referring to the installation space and outer dimensions shown on the next page Installation...

Страница 7: ...Operation Maintenance Manual Introduction Safety Precautions i 5 Page Position of the Center of Gravity AL120 6 Series Position of the center of gravity AL120 86 Series Position of the center of gravity ...

Страница 8: ...as to show the best performance in being set on the table of which height is approx 700mm and thickness of work surface is more than 22mm This equipment is designed in accordance with the SEMI S8 standard If any other tables are selected the best performance can not be assured When selecting the table please refer to the SEMI S8 standard Part Dimensions AL120 6 Series Unit mm ...

Страница 9: ...Operation Maintenance Manual Introduction Safety Precautions i 7 Page AL120 86 Series Unit mm ...

Страница 10: ...or fixing the equipment Please fix the equipment on the tray and Wafer Loader not to be moved by unexpected force such as earthquake Use two M8 steel bolts and boss through the holes provided to secure the Tray and Wafer Loader to supporting surface table etc Fixing part Recommended dimensions For the wafer loader For the tray Fixing part Bosses optional Material Stainless steel Fixing bolt M8 hex...

Страница 11: ...Operation Maintenance Manual Introduction Safety Precautions i 9 Page Fixed taps M8 position dimensions AL 120 6 Series AL 120 86 Series M8 M8 ...

Страница 12: ...ation The warning indication is attached on the part to which you need to pay attention to ensure safety when operating using the loader Strictly follow the instructions If this warning label becomes dirty or peels off contact your nearest OLYMPUS distributor for replacement and servicing Position of warning indication label CAUTION MECHANICAL HAZARD CONTACT TO MOVING PARTS OF THE MECHANISM MAY RE...

Страница 13: ...ft cloth moistened with pure water Wipe heavy dirt or stains with a clean paper moistened with commercially available absolute alcohol Never place absolute alcohol close to a flame as it is highly flammable Take care not to cause sparks by turning on or off an electric appliance or fluorescent lamp 2 Wear gloves to protect your hands while cleaning the loader when for example a wafer is damaged 3 ...

Страница 14: ...there are no wafers or tools inside the wafer loader 2 Confirm the following points before starting the inspection 1 Make sure that the power is on Check the liquid crystal panel Turn the main switch ON and make sure that each arm position is initialized and the model name is shown on the liquid crystal panel The loader may have been set to skip initialization when the power is turned on This is n...

Страница 15: ...rates use and can radiate radio frequency energy and if not installed and used in accordance with the instruction manual may cause harmful interference to radio communications Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense SEMI This equipment is carrying out evaluation ...

Страница 16: ...Introduction Conformity Standards Operation Maintenance Manual i 14 Page ...

Страница 17: ...Operation Maintenance Manual Introduction Conformity Standards i 15 Page ...

Страница 18: ...Introduction Conformity Standards Operation Maintenance Manual i 16 Page This page intentionally left blank ...

Страница 19: ...3 1 1 How to Use the Programs 3 1 2 Test Names and Functions 3 2 4 Replacement of Consumables 4 1 1 Macro Center Table If a vacuum error has occurred or the table has become damaged4 1 2 Macro Center Table Oil Seal If a vacuum error has occurred 4 1 3 A arm If a vacuum error has occurred or the A arm has become damaged 4 3 4 Vacuum Table If a vacuum error has occurred or the table has become damag...

Страница 20: ...Maintenance Manual Table of Contents C 2 This page intentionally left blank Page ...

Страница 21: ...m and the joystick are integrated in the LMB models Hand guard AC line receptacle Circuit breakers Stage vacuum tube connector A2 arm A1 arm Stage operation permission LED L arm Macro center table Orientation flat alignment sensor Cassette table elevator Cassette guide Warning label Vacuum tube receptacle Operation panel Joystick Lock ring Main switch Liquid crystal panel ...

Страница 22: ...tion control Supporting function buttons Inspection mode button Option button LED display Option button Inspection mode button LED display 4 way button Wafer unload button Start button Pause button Wafer alignment position control Inspection time control Menu buttons Top macro spin speed control Quit button Wafer No selector buttons Observation setting buttons Loader stop button Top macro spin dir...

Страница 23: ...enance Manual Nomenclature Remote Controller Option 1 3 1 3 Remote Controller Option Remote controller AL120 RC Wafer unload button Start button Registration setting button Micro Registration setting button Macro Page ...

Страница 24: ... Stage Operation Maintenance Manual 1 4 1 4 Vacuum Stage Vacuum stage AL120 VS6 AL120 VS8 Clutch lever X fine travel knob Y fine travel knob Wafer rotating knob Coarse adjustment grip Vacuum table Stage sensor plate Page ...

Страница 25: ...nt clearance between the cassette and the cassette guide the cassette will lift up and wafers may interfere with the arms during inspection If a cassette is used with too great a clearance between the cassette and the cassette guide the cassette may interfere with wafers Proper clearance between cassettes and the guide Approx 0 5 mm Adjust clearance to a value that takes into account variations of...

Страница 26: ... wafer size thickness transfer speed comment to be registered Press the Wafer No selector button 24 then press the Start button The wafer types currently registered are displayed on the liquid crystal panel No Size Thick Speed comment x1 200 725 400 High 2 200 725 400 High 3 200 725 400 High 4 200 725 400 High 5 200 725 400 High Using the 4 way button move the x to the item to add or change or del...

Страница 27: ...utes the automatic mapping parameter adjustment Mapping auto adjust Press the M1 button Auto The wafer types currently registered are displayed on the liquid crystal panel Using the 4 way button move the x to the item to add then press the M1 button Ok Insert the wafers to be registered in the lowest and highest slots of the cassette and set the cassette in the cassette table The menu appears on t...

Страница 28: ...ove the x to the item to add then press the M1 button Ok Insert wafers to be registered into all slots of the cassette and set the cassette in the cassette table Press the M1 button Mapping The elevator moves down to the lowest point and then it moves up and stops at the upper limit Press the M2 M3 and M4 buttons to show the results on the liquid crystal panel M1 Executes mapping Mapping M2 Displa...

Страница 29: ...head screwdriver No 2 Hexagonal wrench with an opposite side distance of 5 5 mm Items to prepare The cassette and wafers to be registered 1 Turn the main switch OFF 2 Remove the four M3 binding machine screws on the left side of the loader main unit Remove the elevator cover 3 Loosen the three M3 hexagon nuts and remove the partition plate ...

Страница 30: ...manually Make fine adjustments of the arm insertion height The elevator movement can be selected by using the 4 way button on the liquid crystal panel UP Moves the elevator slightly up UP Elevator 0 1mm UP DOWN Moves the elevator slightly down DOWN Elevator 0 1mm DOWN Adjust the elevator height so that the arm is inserted between the wafer to be removed 13th and the wafer below it 12th Press the M...

Страница 31: ... L arm a warning is displayed and the vacuum is maintained Macro table W0005 L arm W0006 Press the Start button to turn the vacuum OFF Use wafer tweezers to prevent the wafer from falling 3 Select a test number with a Wafer No selector button 4 Press the Start button to initiate the test The menu appears on the liquid crystal panel Select specific items in the menu by manipulating the menu buttons...

Страница 32: ...eck Applicable to all models 14 Centering transfer position check Applicable to all models 15 Orientation flat and notch positions check Applicable to all models 16 L arm rotation origin sensor check LMB 17 Stage transfer position adjustment Applicable to all models 18 Unloading position adjustment Applicable to all models 19 Centering adjustment wafer unloading Applicable to all models 20 LED lam...

Страница 33: ...ovement Press the Start button If the loader has not been initialized initialization starts Select the operation speed using the menu buttons on the liquid crystal panel M1 High speed Fast speed M2 Medium speed Middle speed M3 Low speed Slow speed If you do not specify anything here the loader will operate at the high speed M1 High speed Fast speed setting Press the Start button and the loader sta...

Страница 34: ...the operation Raises the A arm Turns it to the right Turns it to the left The loader then repeats steps and Press the Start button to pause the operation at the break point The speed can be changed during the pause When an error occurs the loader displays the same error code as in the regular operation and then stops Press the Quit button and the A arm returns to its initial position and the loade...

Страница 35: ...eed Middle speed M3 Low speed Slow speed If you do not specify anything here the loader will operate at the high speed M1 High speed Fast speed setting Press the Start button and the loader starts the operation Raises the L arm Lower limit Middle point Raises the L arm Middle point Upper limit Lowers the L arm Upper limit Middle point Lowers the L arm Middle point Lower limit The loader then repea...

Страница 36: ...ation Raises the L arm Rotates the L arm to registered position 1 Rotates the L arm when the rotation button is pressed Press the button for registering the tilt position Memory 1 or Memory 2 and the L arm rotates and stops at the registered position By pressing and holding down the button Memory 1 or Memory 2 for registering the tilt position you can register the position where the L arm is prese...

Страница 37: ...or button When the vacuum switch is ON the LED on the Wafer No selector button lights up No 1 A arm 1 A1 No 2 A arm 2 A2 No 3 Center table M No 4 Stage S No 5 L arm L Turning the electromagnetic valve ON OFF Valve switching When the selected electromagnetic valve is ON the LED on the Wafer No selector button lights up No 11 A arm 1 A1 No 12 A arm 2 A2 No 13 Center table M No 14 Stage S No 15 L arm...

Страница 38: ...f the detected position toward the back of the sensor um S3 3 Displacement of the detected position toward the front of the sensor um displacement of the detected position toward the back of the sensor um S4 4 Displacement of the detected position toward the front of the sensor um displacement of the detected position toward the back of the sensor um 3 and 4 are displayed only on the AL120 6 not d...

Страница 39: ...ings M1 Turn the vacuum ON for the A arm Vacuum ON OFF M2 Alternate between the elevator height removal height and arm insertion height Put a wafer on a A arm M3 Register Save M4 Specify a different slot Change slot Pause Replace the A1 arm with the A2 arm or vice versa Confirm the arm insertion height or make fine adjustments Elevator movement can be selected by using the 4 way button on the liqu...

Страница 40: ...te on the elevator Press the M2 button and the elevator moves down and stops at the specified removal height M1 Move to the start position Move start position The A arm moves up and the horizontal excitation turns OFF Manually insert the A arm into the cassette Finely adjust the arm insertion height using the 4 way buttons 4 way button UP Raise the elevator slightly UP Elevator 0 1 mm UP 4 way but...

Страница 41: ...tic mapping adjustment Adjust mapping M2 Register the results of automatic mapping adjustment Save M2 Execute mapping and display results Mapping result display This program can be used to check for normal detection when mapping is executed based on the registered data M1 Execute mapping Mapping M2 Display results of mapping sensor 1 center Display result sensor1 M3 Display results of mapping sens...

Страница 42: ...er 90 to 400 Start position Start Position 150mm 38500 200mm 48500 Default Select an item using the 4 way buttons and input a value using the wafer No buttons To register the modified values press M2 Save Save To terminate the program without modification press M4 Terminate display Exit S1 S2 S3 AL120 86 Series 200mm 725um 400um Upper 800 Lower 800 Thick Upper 5000 Thick Lower 400 Upper 800 Lower ...

Страница 43: ...al panel M1 A arm horizontal direction A Linear M2 A arm vertical direction A Up Down M3 A arm rotation direction A rotation M4 Elevator Elevator origin Press the Start button and the sensor and motor origin signal ON OFF states are indicated by the LEDs on the Wafer No selector buttons ON state LED on the Wafer No selector button lights up Motor excitation turns OFF No 13 A arm origin sensor chec...

Страница 44: ... Cassette height position Cassette position M3 Stage height position Stage position The sensor and motor origin signal states are indicated by the LEDs on the Wafer No selector buttons No 1 Origin sensor detection ON OFF No 2 Motor driver origin ON OFF Press the Quit button and the loader is initialized and stops the operation M1 Origin position Origin The sensor detection state can be checked by ...

Страница 45: ...sor ON OFF Press the Quit button and the loader is initialized and stops the operation M2 Adjust the A1 sensor position A1 Sensor The A arm moves vertically up to the stage transfer height Press M2 button When the A1 signal is OFF replace A1 with A2 4 way button Right Move clockwise by one pulse 4 way button LEFT Move counterclockwise by one pulse M1 Initialize M2 Alternately move 85 pulses CW and...

Страница 46: ...ed The Wafer No button for the selected slot stops blinking and stays lit Press the Start button The selected wafer is loaded from the cassette After centering is performed the wafer continues spinning on the center table Note For the AL120 86 wafer decentering can be checked by looking at the voltages of the orientation flat sensors at 90 degree intervals that are displayed on the liquid crystal ...

Страница 47: ... CCW 00 100 Data CW CCW 00 Correct the orientation flat and notch alignment position Save the correction data in the internal memory Use the 4 way button to correct the position 4 way button RIGHT Clockwise 4 way button LEFT Counterclockwise One pulse About 0 1 degree Register the correction value M1 Register Save Press the Start button to repeat steps to If you do not press M1 button but press th...

Страница 48: ...r onto the stage wafer Load M3 Register the correction value Save Correction direction 4 way button UP Far side Far 4 way button DOWN Near side Near 4 way button LEFT Left LEFT 4 way button RIGHT Right RIGHT Press the M2 button and then the Start button to start the process of transferring a wafer to the stage Before transferring a wafer to the stage set the orientation flat on the left side Rotat...

Страница 49: ... by taking care that it is inside the range of the cassette guide clearance Correctable range 0 5 to 5 mm An error is displayed when the correction value is negative No adjustment is needed as there is no possibility that unloaded wafers will hit against the inside of the cassette This adjustment cannot be done when there is a contact type centering No 19 Centering adjustment wafer unloading Cente...

Страница 50: ...ink The buzzer sounds at the same time The liquid crystal panel backlight blinks The stage transfer permission lamp LED blinks Press the Quit button and the loader returns to its initial state and stops the operation No 21 Button operation check Button motion check This program can be used to check the operation button motions Press the Start button Press a button with an LED and the LED lights up...

Страница 51: ...M A1 U007 A arm vertical motor driver TSD AUP TSD 10 A arm rotation direction sensor 1 AR 1 U208 Vacuum sensor for A2 arm VCM A2 U008 A arm vertical motor driver MO AUP MO 11 A arm rotation direction sensor 2 AR 2 U209 Vacuum sensor for macro table VCM M U009 A arm horizontal motor driver TSD AL TSD 12 A arm upper limit sensor A up U204 Vacuum sensor for L arm VCM L U011 A arm horizontal motor dri...

Страница 52: ...OFF OFF Setting of sequence when power is turned on Microscope Microscope button ON ON OFF OFF Setting of slot with which wafer transfer begins in a cassette Start slot Top Top Bottom Bottom Numbering of wafers in a cassette No on wafers in cassette From bottom 1 Bottom From top 1 Top Registration of wafers unloaded during operation Register wafer unloading ON ON OFF OFF Return to origin when powe...

Страница 53: ...00mm 675 400 400 150 Wafer size Size 200mm 725 400 400 180 180 90 Wafer size and thickness settings may be unavailable depending on the loader specifications Transfer speed Speed Fast Middle Slow SP1 SP5 SP1 to SP5 can be set to desired speeds for each axis Optional speed is limited as follows by wafer thickness Thick 725 400 Fast Middle Slow SP1 SP5 Normal setting Fast 400 180 Middle Slow SP1 SP5...

Страница 54: ...log Software version This program can be used to check the software version and the history of error occurrences The software version or error log displayed can be cleared and the error log date can be set by manipulating the menu buttons on the liquid crystal panel M1 Clear Clear M2 Set date Date M3 Go to the previous page PageUp M4 Go to the next page PageDn Move the cursor using the 4 way butto...

Страница 55: ...9 Input numbers 1 to 9 4 way buttons RIGHT and LEFT Move the cursor 4 way buttons UP and DOWN Move between items Parameters that can be set Year Year the last two digits of a calendar year Month Month Date Date Hour Hour Minute Minute Second Second Select an item using the 4 way buttons and input a value using the Wafer No buttons After the item has been corrected press M2 Save to register the cor...

Страница 56: ...Test Programs Maintenance Manual 3 26 Page This page intentionally left blank ...

Страница 57: ...teed If any noise occurs in the operation of a part please contact your OLYMPUS distributor This loader uses specialized clean grease Improper greasing may cause a malfunction 1 Macro Center Table If a vacuum error has occurred or the table has become damaged Tools Phillips head screwdriver No 0 Accessories M2 cross recessed pan head machine screws 1 Remove the three M2 cross recessed pan head mac...

Страница 58: ...ly flammable Take care not to cause a spark by turning on off electric appliances or fluorescent lamps 4 Attach the special jig for inserting the oil seal Set the guide to the stepped section on the top surface of the pulley 5 Insert the shaft into the axis hole 6 Drop a new oil seal into the guide with the lip facing up 7 Insert the collar into the shaft axis 8 Insert the collar into the oil seal...

Страница 59: ...exagonal wrench with an opposite side distance of 2 5 mm Accessories M2 hexagon socket head bolts 1 Remove the M2 hexagon socket head bolts four for each arm 2 Replace the arm Align surface A with surface A and surface B with surface B as shown below 3 Set the hold plate and secure it with the M2 hexagon socket head bolt Standard Working Time 20 minutes For the AL120 LMB8 90 replace the arm with t...

Страница 60: ...ndard Working Time 10 minutes 5 Oil Seal for Vacuum Table If a vacuum error has occurred Tools Phillips head screwdriver No 0 Flat blade screwdriver No 2 6 30 Clean wiper and absolute alcohol Accessories Oil seal 1 Remove the three M2 cross recessed pan head machine screws using the Phillips head screwdriver and remove the vacuum table 2 Lay the vacuum table upside down on a flat surface 3 Insert ...

Страница 61: ... of the vacuum stage Never put absolute alcohol near flames as it is highly flammable Take care not to cause a spark by turning on off electric appliances or fluorescent lamps 5 With the lip facing up push the new oil seal fully into the vacuum table insertion part until it stops 6 Turn the vacuum table over and attach it to the vacuum stage Replacement Cycle 5 years Standard Working Time 20 minut...

Страница 62: ...2 Put the L arm on a flat surface and replace the vacuum pad 3 After attaching the L arm to the loader main body check that the clearance between the L arm and the A arm is uniform If the clearance is not uniform check that the L arm is properly attached and attach it again if necessary Replacement Cycle Transfer of 350 thousand wafers Standard Working Time 20 minutes AL120 6 series L arm A arm AL...

Страница 63: ... If wafer transfer sound has increased 1 Remove the stage and replace the rubber blocks on the underside of the microscope Since the wafer transfer position must be checked and other related work must be done please contact your Olympus distributor Standard Working Time 60 minutes ...

Страница 64: ...Replacement of Consumables Maintenance Manual 4 8 Page This page intentionally left blank ...

Страница 65: ...This page intentionally left blank ...

Страница 66: ...LYMPUS SCIENTIFIC SOLUTIONS AMERICAS CORP 48 Woerd Avenue Waltham MA 02453 U S A OLYMPUS SINGAPORE PTE LTD 491B River Valley Road 12 01 04 Valley Point Office Tower Singapore 248373 OLYMPUS KOREA CO LTD 8F Olympus Tower 446 Bongeunsa ro Gangnam gu Seoul 06153 Korea This publication is printed on clean paper Printed in Japan ...

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