Olympus AL120-6Series, Руководство по обслуживанию, Страница: 32 / 66

Test Programs Maintenance Manual
3-2
Page
2 Test Names and Functions
1. Test names and test functions are shown in Tables 2-1 and 2-2, respectively.
Table 2-1: Test Programs
Button No. Test Name Remarks
1 Elevator vertical movement check
Applicable to all models
2 A-arm vertical movement check
Applicable to all models
3 A-arm horizontal movement check
Applicable to all models
4 A-arm rotation check
Applicable to all models
5 Macro table vertical movement check
LMB
6 L-arm vertical movement check
LMB
7 L-arm rotation check
LMB
8 Vacuum switch check
Applicable to all models
9 Stage lock check
Applicable to models equipped
with AL120-SLK
10 Centering sensor count check
Applicable to all models
11 Elevator height adjustment
Applicable to all models
12 Mapping adjustment
Applicable to all models
13 A-arm origin sensor check
Applicable to all models
14 Centering transfer position check
Applicable to all models
15 Orientation flat and notch positions check
Applicable to all models
16 L-arm rotation origin sensor check
LMB
17 Stage transfer position adjustment
Applicable to all models
18 Unloading position adjustment
Applicable to all models
19 Centering adjustment (wafer unloading)
Applicable to all models
20 LED lamp check
Applicable to all models
21 Button operation check
Applicable to all models
22 Sensor check
Applicable to all models
23 Loader settings
Applicable to all models
24 Wafer type setting
Applicable to all models
25
Contact centering open/close movement check
Applicable to models equipped
with AL120-CC
26 Software version and error log display
Applicable to all models
The AL120-CC contact centering unit is required to execute test No. 25.
The optional AL120-SLK is required to execute test No. 9.
Special jigs must be used to execute test Nos. 10 and 19. Contact your Olympus distributor from
whom you purchased the loader.