
PlasmaQuant PQ 9000 (Elite)
Installation and commissioning
31
4.3
Connections in the plasma compartment, sampling compartment and
type plate
Figure 14 Plasma compartment
1 Quartz window for radial observation
2 Cone for axial observation
3 High voltage (HV) conducting spring
4 Type plate
5 Photo detector for optical plasma monitoring
6 Induction coil with bonnet and torch
Figure 15 Data on the type plate
1 Manufactuerer's adress
2 Trade name
3 Electrical connection data
4 CE label
5 WEEE label
6 Serial number
7 Notice: Do not use them until you have read the
user manual!
8 Protection class
9 Trade mark