Installation and commissioning
PlasmaQuant PQ 9000 (Elite)
24
Oxygen 4.5 or superior
4.1.4
Exhaust unit
CAUTION
Switch on the exhaust unit during device operation!
Switch on the exhaust unit prior to igniting the plasma. Direct the waste air into the at-
mosphere and avoid blockages!
Correct exhaustion requires the form-locking connection of an extraction hose to the
PlasmaQuant PQ 9000 smokestack.
The exhaust unit is meant to remove hazardous gases generated during plasma opera-
tion, such as ozone or nitrous gases. Use an exhaust unit made of heat and corrosion-
resistant material. The first 6 m of the exhaust unit should be made of metal.
Overview 4
Exhaust unit requirements
Parameters
Properties
Material
Heat and corrosion resistant (recommended: V2A
steel)
External pipe diameter
∅
125 mm
Extraction output
Min. 3.5 m
3
/min, max. 5.5 m
3
/min (at best 4.0 to
4.5 m
3
/min)
Adapter using flexible aluminum
pipe
Internal pipe diameter
∅
125 mm
Length: approx. 1000 mm
4.1.5
Recirculating chiller
The HF generator is cooled by a cooling circuit of the external recirculating chiller. Please
observe the information provided in the recirculating chiller operating instructions.
The recirculating chillers supplied by Analytik Jena AG are adapted to the required cool-
ing performance of the PlasmaQuant PQ 9000.
If the recirculating chiller is not obtained from Analytik Jena, the following requirements
must be met:
Overview 5
Cooling circuit requirements
Parameter
Properties
Water flow rate in the
cooling water circuit
1.5 – 2.0 L/min
Cooling water temperature range at
device inlet
17 – 24 °C
Cooler target temperature
18 °C
Temperature stability
±0.1 °C
Conductivity of the cooling water
50 – 200 µS/cm
Cooling performance
3 000 W
Pressure settings
max. 6 bar