BUSCH COBRA BC 0600 F, Инструкция по установке и обслуживанию

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Noise emission
Refer to the table “Technical data” for the permissible noise leveling
free field conditions according to EN ISO 2151.
CAUTION
The sound level of the vacuum pump within a certain perimeter of
the pump is high.
Risk of hearing damage.
Users must wear ear protection when spending a longer period of
time in the vicinity of a non-insulated vacuum pump.
Safety area
Before any maintenance action, ensure a safety perimeter of a least
610 [mm] around the pump.
Electrical safety
Types of Electrical Work
The following are the four types of electrical work defined by the SEMI
S2, latest version, guideline:
Type 1
Equipment is fully deenergized.
Type 2
Equipment is energized. Energized circuits are covered or insulated.
NOTE : Type 2 work includes tasks where the energized circuits are or
can be measured by placing probes through suitable openings in the
covers or insulators.
Type 3
Equipment is energized. Energized circuits are exposed and inadvertent
contact with uninsulated energized parts is possible. Potential exposu-
res are no greater than 30 volts rms, 42.4 volts peak, 60 volts dc or
240 volt-amp in dry locations.
Type 4
Equipment is energized. Energized circuits are exposed and inadvertent
contact with uninsulated energized parts is possible. Potential exposu-
res are greater than 30 volts rms, 42.4 volts peak, 60 volts dc, or 240
volt-amp in dry locations. Potential exposures to radio-frequency cur-
rents, whether induced or via contact, exceed the limits in Table A5-1
of Appendix 5 (SEMI S2 guideline).
Lock Out/ Tag Out procedure (Type 1 of
electrical work)
l
Stop the pump with the LCD controller (press on STOP button du-
ring 10s)
l
Press on emergency stop button
l Switch off the main circuit breaker
l Switch off the customer’s power supply
l Switch off the water and nitrogen quick connections (inlet first,
then outlet)
l Put the label or warning board “Maintenance processing” on or
next to the pump
Emergency off circuit description
l
The Emergency off circuit may be opened by pressing on emergen-
cy stop button. If this element occurs, then the DP and MB pumps
will immediately stop. The PLC will remain energized to save the
pump status.
l
If the emergency stop button was pressed, check the start up of
the pump then release this button to restart the pump. Press on
Start button on the LCD controller, the pump will restart.
Installation of the vacuum pump in a
seismic zone
Upon receipt, the vacuum pump is fixed on the transport pallet with
two brackets.
l Convey the pump to its final location with a pallet truck before re-
moving it from its support
l Unscrew the fixing screws of the pump on the transport pallet and
remove the machine from its support with an appropriate lifting
system by using the lifting brackets made for this purpose
l
The pump must not lay only on the brackets. Unscrew the four ad-
justing nuts until the machine legs touch the ground
l Check that the wheels no longer touch the ground
CAUTION
The vacuum pump is fixed to the ground with four M10 screws, two
screws per bracket. The fixing screw must stand a 1200 N tensile
force (per bracket).
The final user must adapt the type of screws depending on the
ground material.
l
Make sure that the installation site or assembly area is ventilated
insuch a way that adequate cooling of the vacuum pump is
ensured
CAUTION
The surface temperature of the vacuum pump can exceed 50°C
when the vacuum pump is in operation.
Danger of burns!
l Make sure that no-one can touch the vacuum pump accidentally.If
necessary, attach safeguard
l Make sure that the oil sight glasses (OSG) are easily accessible. If
oil changes are to be made on site:
u Make sure that the oil drain and oil filler are easily accessible
BC 0600 F
Safety
0870767449 (En)
Page 9
W heel
Adjusting nut
Lifting bracket