BUSCH COBRA BC 0600 F, Инструкция по установке и обслуживанию

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Product description
Use
The COBRA BC vacuum pumps are designed for use in the field of mi-
croelectronics and similar industries.
They can be used to suck gases and gas mixtures.
WARNING
When using toxic, inflammable and/ or explosive gases, make sure
that the system corresponds in design to applicable local and na-
tional safety regulations and that all applicable safety measures are
followed.
All product-specific safety regulations must be observed.
Solid particles must not get into the vacuum pump. Procedural errors
can result in the pump sucking in a certain quantity of liquid. If the
pump has sucked in liquid, a short drying time is necessary at the end
of the procedure.
The allowed maximum inlet gas temperature depends on the inlet pres-
sure and the type of gas: the lower the inlet pressure (Pa), the higher
the drawn gas temperature (TGas) can be.
The following indicative values for air can be considered:
– Pa > 50 mbar, TGas < 80°C
– Pa < 50 mbar, TGas < 200°C
The vacuum pump is intended for use in a potentially non-explosive
environment.
As far as temperature is concerned, the pump is suitable for evacuation
of a 300 liters tank. The pump is not suitable for continuous duty at a
pressure more or equal than 150 mbar. Caution, the operating cycle of
150 mbar must not exceed more than 5 min. For other applications,
contact your Busch representative.
The vacuum pump is tight down to ultimate pressure.
Operating principle
COMBI
The COBRA BC 0600 F pumps are a combination of a screw vacuum
pump NW 0100 E (DP) and a Roots vacuum pump WY 0700 C (MB)
The COBRA BC 0600 F vacuum pumps are COBRA NW screw vacuum
pumps with cooling water and nitrogen circuits.
Product description
BC 0600 F
Page 6
0870767449 (En)
DP
7
4
2 5
3
8
1
6
4
MB
1 Inlet
2 Outlet
3 Oil
4 Cooling water
5 Barrier gas
6 Motor klixon DP
7 Intake medium
8 Screw rotors
9 Roots lobe
Nitrogen inlet
MB
DP
Process gas inlet
Process gas outlet
TSA
DGF
PRV
PSA
TS2
DGR2
CWM
PS
OSG4
MOT1
OSG1
OSG3
DGR1
MOT2
TS3
Cooling water
inlet
CWR
Cooling water
outlet
TSA Temperature sensor PT100 (DP)
TS1 Temperature switch Motor (MB)
TS2 Temperature switch Motor (DP)
DGF Nitrogen flow meter, dilution gas
PRV Nitrogen pressure reducer
PS
Inlet pressure switch
PSA Outlet pressure sensor
OSG 1 Oil level indicator (DP)
OSG 3 Oil level indicator (MB)
OSG 4 Oil level indicator (MB)
MOT 1 Motor (DP)
MOT 2 Motor (MB)
CWR Cooling water regulating valve
DGR 1 Regulating valve, dilution gas
DGR 2 Regulating valve, dilution gas
CWM Cooling water flow meter