l
Make sure that the system does not leak
If the system is equipped with a solenoid gate valve at the intake:
CAUTION
Do not open gate valve if booster is running.
Use "Automatic Load Lock" mode or "External Signal" on tool in-
terface to start/stop booster (refer to Busch PLC manual).
Risk of primary pump damage.
u
Open the solenoid gate valve
Switching the system off
If the system is equipped with a solenoid gate valve at the intake:
u
Close the solenoid gate valve
l
Switch off the vacuum pump
l
Shut off the nitrogen supply
l
Shut off the cooling water supply
If the system is equipped with a solenoid gate valve in the cooling wa-
ter circuit:
u
Close the solenoid gate valve
l
Make sure that the system is currentless
Maintenance
DANGER
In case the vacuum pump has conveyed gases that have been
contaminated with foreign materials that are dangerous to health,
the oil and condensates will also be contaminated.
These foreign materials can infiltrate the pores, recesses and other
internal spaces of the vacuum pump.
Danger to health when the vacuum pump is dismantled.
Danger to the environment.
Always wear protective clothing when carrying out maintenance
work.
Before any maintenance work, the inlet and outlet piping as well
as the vacuum pump itself must be flushed with nitrogen.
CAUTION
Only authorized personnel may carry out dismantling work on the
vacuum pump. Before work begins, the operator of the vacuum
pump must fill in a form or a “Declaration of Contamination of Va-
cuum Equipment and Components” that provides information on
possible dangers and appropriate measures.
If this form has not been filled in completely and signed, the va-
cuum pump may not be dismantled.
CAUTION
Before maintenance work is started, a safety area of at least 610
[mm] around the machine must be set up.
CAUTION
The surface temperature of the vacuum pump can exceed 50°C
when the vacuum pump is in operation.
Danger of burns!
Before starting maintenance work, make sure that the vacuum pump
has been switched off and that it cannot be switched on again acciden-
tally. Follow the shutdown procedure in the section “Lock Out/ Tag
Out procedure”:
–
stop the pump with the LCD control (press on STOP button during
10s)
–
press on emergency stop button
–
switch off the main circuit breaker
–
switch off the customer’s power supply
–
switch off the water and nitrogen quick connections (inlet first,
then outlet)
–
put the label or warning board “Maintenance processing” on or
next to the pump
CAUTION
The oil temperature can reach a value of 100°C!
Danger of burns!
l
Make sure that the oil circuit has been emptied before moving the
vacuum pump
l
Make sure that there are no cleaning tools in the pump anymore
according to local and national regulations
Before pulling off the different connections, make sure that the intake
and exhaust lines of the vacuum pump correspond to atmospheric
pressure
When the maintenance work has been finished, follow the procedure
“Safety Lockout procedure”:
–
take off the label or warning board “Maintenance processing”
–
check the oil level according to the chapter “Checking the oil le-
vel”
–
switch on the main circuit breaker
–
release the emergency stop button
–
switch on the water and nitrogen quick connections (outlet first,
then inlet)
–
make sure that the “Necessary installation instructions” are follo-
wed
–
start the pump with the LCD control (press on START button)
Maintenance program
NOTE
: The maintenance intervals depend a lot on the individual opera-
ting conditions. The intervals given below should be considered initial
guidelines which ought to be shortened or extended as appropriate. In
particularly heavy duty operation such as high dust loads in the envi-
ronment or in the process gas, it may become necessary to shorten the
maintenance intervals significantly.
Weekly:
l
Check the oil level and the colour of the oil (see “Checking the
oil”)
l
Check the cooling water flow (see “Checking the cooling water”)
l
Check the nitrogen flow (see “Checking the nitrogen”)
l
Inspect the vacuum pump for oil leaks - if there are leaks, repair
the vacuum pump (Busch)
l
Inspect the vacuum pump for leaks of cooling water - if there are
leaks, repair the vacuum pump (Busch)
Maintenance
BC 0600 F
Page 16
0870767449 (En)
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