
2. Maintenance of the Cooler Unit Section
191
ML-2350A/2351A
Chapter 1 How to Perform Maintenance
Introduction Part
Operating Part
Maintenance Part
Appendixes
Installation
and
Preparation
Part
Changing the Water Filter and Secondary Cooling Water
The water filter has a function to filter the secondary cooling water to keep its purity.
Change the water filter and the secondary cooling water every 6 months.
⇒
For the secondary cooling water, use deionized water or purified water. If tap
water, industrial water, ground water, or ultra pure water (resistivity: 16 MΩ•cm or
more) is used, corrosion and clogging will occur, resulting in a failure.
Item required
Secondary cooling water (12 liters), water feed pump, and water filter (new product)
1
Draining the Secondary Cooling Water
(1) Open the lid of the cooling water
tank and take out the floating panel.
⇒
Keep the panel clean during the
exchanging work.
(2) Pump out the tank.
2
Changing the Water Filter
(1) Pull out the water filter upward because
this water filter is an insertion type.
(2) Insert a new water filter.
3
Supplying the Secondary Cooling Water
(1) Supply the cooling water, with the attached hand pump, till it reaches HIGH-line
on the water level label.
(2) Return the floating panel in the tank.
Return the lid of the cooling water tank and secure it.
The Laser front (With front door opened)
Lid
Floating
panel
Water level label
Cooling water tank
Water filter
Содержание ML-2350A-CE
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