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B 40

Water cooling connection

Alcatel Vacuum Technology France - ATP User’s Manual

1/1

GB 00412 - Edition 01 - March 97

Water characteristics

Connection

Connect the cooling
circuit with a rigid
stainless steel or copper
pipe (int. diam. 4 mm -
ext. diam. 6 mm) (supplied
by customer).

The water flow rate is
0.2 to 1 l/min for water
at 15°C at an ambient
temperature of 25°C.

It is recommended to use cooling water with the following
characteristics:
- pH between 7.5 and 11
- Hardness < 7 milli-équivalent/dm

- Resistivity > 1500

Ω

.cm

- Solid pollution < 100 mg/dm

- Max pressure = 7 bars
- Temperature:
10 < T < 25°C (Std and C) and 0 < T

≤

65°C (HPC).

Содержание Adixen ATP 100

Страница 1: ...SERIES POMPES TURBOMOLECULAIRES TURBOMOLECULAR PUMPS Manuel utilisateur User s manual R alisation Publication Alcatel Vacuum Technology France Manuel Utilisateur Ed 11 Date 03 2007 R f rence 102710 10...

Страница 2: ...xperienced subsidiaries distributors and agents The first step was the founding of Alcatel Vacuum Products Hingham MA in the United States thirty years ago reinforced today by 2 others US subsidiaries...

Страница 3: ...in using it we advise you to read this manual carefully before any intervention on your pump and to pay particular attention to the equipment installation and start up section APPLICATIONS INDUSTRY C...

Страница 4: ...versions A 30 ACT controllers control modes A 40 Accessories A 50 Integrable controllers A 60 Technical characteristics of pumps A 70 Dimensions of pumps A 80 Controller technical characteristics A 90...

Страница 5: ...ical connections B 50 ACT 200 T and 600 T Remote Control connector wiring B 60 ACT 200 T and 600 T controller start up B 70 ACT 1000 T electrical connections B 80 ACT 1000 T Remote Control connector w...

Страница 6: ...the pump using the controller front panel C 30 Displaying the data concerning ACT 200 T and 600 T pumping C 40 ACT 200 T and 600 T Remote Control connector Ext safety contact operation C 50 Controllin...

Страница 7: ...aring replacement E 40 ATP 150 400 900 bearing replacement E 50 Cleaning parts E 60 Pump running in for ATP 80 100 150 400 E 70 Maintenance counters for ACT 200 T and 600 T controllers E 80 ATP 900 pu...

Страница 8: ...omolecular pump operating principle A 20 The differents versions A 30 ACT controllers control modes A 40 Accessories A 50 Integrable controllers A 60 Technical characteristics of pumps A 70 Dimensions...

Страница 9: ...ation with nitrogen purge HPC high pressure version for semiconductor applications ATP turbomolecular pumps ACT Controllers Main characteristics Alphanumeric display Membran keyboard Monitoring of tes...

Страница 10: ...ange DN 63 ISO K DN 100 ISO K DN 100 ISO K DN 160 ISO K DN 200 ISO K DN 63 CF F DN 100 CF F DN 100 CF F DN 160 CF F DN 200 CF F natural convection x x Cooling type air x x x x x water x x x x x The pu...

Страница 11: ...ctional diagram In molecular operation the gas molecules of the vacuum system arrive at the pump intake They are trapped between the rotating disks of the rotor and the stationary disks of the stator...

Страница 12: ...rent types of speed the nominal speed which corresponds to the maximum rotation speed of the pump or 27000 rpm the reduced speed or STANDBY speed adjustable between 6000 and 27000 rpm The inverted dyn...

Страница 13: ...provide increased bearing protection effective bearing protection when the purge is stopped during equipment calibration a reduction in the purge gas flow rate a long bearing service life in the prese...

Страница 14: ...replicate the monitoring parameters available in the form of dry contacts The RS232 serial link is used to control and monitor the pump using a computer The RS485 serial link allows many pump install...

Страница 15: ...control modes Alcatel Vacuum Technology France ATP User s Manual GB 00400 Edition 02 February 99 2 2 The ACT 600 T and ACT 1000 T controllers are 1 2 rack units START STOP STATUS STAND BY ENTER PREVI...

Страница 16: ...r supply cut GB 00401 Edition 02 February 99 1 2 Pump accessories Exhaust Venting valves DN 25 DN 40 Powered and controlled by the ACT 101923 Powered by the mains and controlled by the ACT 240V 50 60H...

Страница 17: ...T 1000 T Flange DN 1 DN 2 P N S S ALU Material 063268 063269 063270 063267 062900 068912 062901 068911 062902 062904 062905 062906 062903 062725 062907 062909 062908 062910 066659 066660 63 ISO K 25 I...

Страница 18: ...gic control controlled by serial link or dry contacts and power supply ACT 200 T Brick only and all the necessary securities The Board version must be supplied with DC ACT 200 T Board ACT 200 T Brick...

Страница 19: ...TP 80 and ATP 100 pumps in local or by remote control OEM Board P N P0022E4 Power supply cable OEM Board ATP 80 100 To connect the PC Board it is necessary to separately order specific connection cabl...

Страница 20: ...haust flange ISO KF DN 25 DN 25 DN 25 DN 40 DN 40 Standard version characteristics ATP 80 ATP 100 ATP 150 ATP 400 ATP 900 Limit pressure measured acc to Pneurop standard mbar 5x10 9 5x10 9 5x10 10 8x1...

Страница 21: ...osives versions Characteristics ATP 80 C ATP 100 C ATP 150 C ATP 400 C ATP 900 C Limit pressure without purge meas according to Pneurop standard mbar 5x10 9 5x10 9 5x10 10 8x10 10 5x10 10 Limit pressu...

Страница 22: ...ard mbar 5x10 8 5x10 8 Limit pressure with purge meas according to Pneurop standard mbar 8x10 6 5x10 5 N2 purge flow rate SCCM 50 Maximum pressure at inlet in continuous operation mbar 1x10 1 2x10 2 M...

Страница 23: ...5 4 12 1 13 119 9 1 8 24 1 118 102 H 55 8 49 5 C 6 7 7 77 3 C 73 6 113 45 3 F 113 12 R 2 6 2 F Inlet flange R H C F N D A DN 63 ISO K 130 151 5 102 95 DN 63 CF F 145 166 5 117 113 5 8 92 1 7 5 DN 100...

Страница 24: ...23 210 7 28 132 49 8 87 4 85 4 91 5 12 1 26 2 1 8 7 5 175 9 97 122 1 16 116 35 5 13 4 103 2 134 15 5 221 7 132 148 5 130 12 17 2 20 4 5 Grease DN 25 ISO KF N2 PURGE DN 16 ISO KF DN 25 ISO KF DN 100 IS...

Страница 25: ...17 2 189 5 F F Inlet flange R H C F E N T D A DN 100 ISO K 181 6 247 4 146 9 130 12 DN 100 CF F 183 1 248 9 148 4 148 5 16 16 8 6 130 2 3 75 DN 160 ISO K 151 1 216 9 116 4 180 12 DN 160 CF F 168 1 233...

Страница 26: ...83 6 81 3 13 4 168 17 8 15 5 H 240 Inlet flange R H C F E N T D A DN 200 ISO K 145 8 211 5 118 5 240 12 DN 200 CF F 165 8 231 5 138 5 253 2 20 24 8 6 231 9 7 5 ASA 6 177 8 243 5 150 4 279 4 19 8 20 6...

Страница 27: ...00 ISO K 181 6 247 4 148 4 130 12 DN 100 CF F 183 1 248 9 148 4 148 5 16 16 8 6 130 2 3 75 DN 160 ISO K 151 1 216 9 116 4 180 12 DN 160 CF F 168 1 233 9 133 4 198 16 20 8 6 181 1 6 ASA 6 161 1 225 9 1...

Страница 28: ...8 2 15 5 81 3 8 6 6 1 4 9 6 Inlet flange R H C F E N T D A DN 200 ISO K 145 8 211 5 118 5 240 12 DN 200 CF F 165 8 231 5 138 5 253 2 20 24 8 6 231 9 7 5 ASA 6 177 8 243 5 150 4 279 4 19 8 20 6 241 3 2...

Страница 29: ...122 4 128 4 ACT 600T PREVIOUS ENTER STAND BY STATUS STOP FAULT START 112 5 3 Electrical characteristics ACT 200T and ACT 600T Dimensions ACT 200T ACT 600T Characteristics ACT 200T ACT 600T Weight kg...

Страница 30: ...Characteristics ACT 1000T Weight kg 8 5 Dimensions HxLxP mm 132 5x219x453 Power supply 100 120 V 200 240 V 50 60 Hz Maximum power W 800 Ambient operating temperature T 50 C Customer mains circuit bre...

Страница 31: ...imensions Board Power supplying Nominal voltage 115 230 V 48 63 Hz Maximum current 5 8 A 3 A Maximum power 100 W Power supplying of ACT 200 T Brick 83 40 64 97 103 TURBO PUMP CABLE RS232 485 Marche Ar...

Страница 32: ...ristics Power supplying of ACT 200 T Board ACT 200 T Board Dimensions Connector type Molex Series 30 69 P N 09 91 0700 equipped with 7 contacts P N 08 050 0106 DC voltage necessary to supply the board...

Страница 33: ...RS485 SUBD 9pts m le Marche Arr t Entr e secteur Fusibles T250 6 3A 5x20 Integrable Brick Board controller technical characteristics ACT 600 T Brick Dimensions Board Power supplying ON OFF Fuses T250V...

Страница 34: ...ristics Power supplying of ACT 600 T Board ACT 600 T Board Dimensions Connector type Molex Series 30 69 P N 09 91 0700 equipped with 7 contacts P N 08 050 0106 Voltages delivered by the board 72 V 4 A...

Страница 35: ...ecure the power line with an external time delay fuse depending on the power supply 1 A for 100 115 V 0 5 A for 200 220 240 V Functions of these integrable controllers see B 140 Installed with M3 scre...

Страница 36: ...trical connections B 50 ACT 200 T and 600 T Remote Control connector wiring B 60 ACT 200 T and 600 T controller start up B 70 ACT 1000 T electrical connections B 80 ACT 1000 T Remote Control connector...

Страница 37: ...ned to comply with current EEC regulations Any modification of the product made by the user is liable to lead to non compliance with the regulations or even to put into doubt the EMC electromagnetic c...

Страница 38: ...stance of 3 m from the product inlet The units containing control circuits are designed to guarantee normal safety conditions taking their normal operating environment into account use in rack In spec...

Страница 39: ...ns The vacuum pump is also a compressor incorrect use may be dangerous Study the user manual before starting up the pump The access to the rotor of a turbomolecular pump with an unconnected intake is...

Страница 40: ...the pump and its anchor point The equipment attachment devices should be sufficiently rigid to prevent potential risks in the event of failure of a rotary component or a violent shock on the pump exce...

Страница 41: ...DN16 purge fitting A built in safety valve controls the pressure and guarantees a flow rate of 50 SCCM Install the screen filter or compact filter accessory on the pump connect the pump to the install...

Страница 42: ...eel or copper pipe int diam 4 mm ext diam 6 mm supplied by customer The water flow rate is 0 2 to 1 l min for water at 15 C at an ambient temperature of 25 C It is recommended to use cooling water wit...

Страница 43: ...tor Connector plug delivered with the controller Connect the RS232 485 serial link cable to the connector cable supplied by customer Fuse access 15 1 30 16 44 41 39 31 REMOTE CONTROL connector plug fa...

Страница 44: ...the input controlled by voltage When a voltage is applied on these inputs the pump is running see terminal plug wiring The wiring of an external contact allows to signal an external safety when the co...

Страница 45: ...2 41 40 39 OV OV 15 V Max 50 mA 10V 44 43 Used to monitor the selected parameter in the Set Analog output menu see B 70 A 0 10V analog output is used to monitor variations in certain pump parameters s...

Страница 46: ...rs for the application using the various menus Parameter setting access Selection Validation used to access the parameter setting mode used to exit the various menus without validating the functions u...

Страница 47: ...maximum operating time before regreasing the bearings Ball bearings life time counter Modify the access code Enter the access code and validate SPEED 6 75V 27000rpm I motor ATP 80 100 2 5A 10V ATP 15...

Страница 48: ...erval Parity Data length Number of STOP bits Data separating character Number of controller in a multiple link None None Even Odd 8 bits 7 or 8 1 bit 1 or 2 44 comma 0 to 255 0 0 to 255 SPEED PARITY D...

Страница 49: ...cuum Technology France ATP User s Manual 4 4 GB 00415 Edition 02 Feburary 99 Serial link setting continued Number of controller in a sequence in the case of the multiple link 0 0 to 255 ADDRESS RS 232...

Страница 50: ...rial link cable to the connector cable supplied by customer Connect the venting valve accessory see B 90 If the unit is remote controlled make the various connections on the REMOTE CONTROL terminal bl...

Страница 51: ...d for the pump to operate When the contact is closed the pump is started up and accelerates to reach its nominal or reduced speed depending on parameter settings If the contact is open the pump is no...

Страница 52: ...tart 19 20 The contact is opened when a functional fault appears or when the STOP control is activated In the latter case the pump is reset to atmospheric pressure The contact can be used to control a...

Страница 53: ...nfigure the parameters for the application using the various menus Parameter setting access Selection Validation used to access the parameter setting mode used to exit the various menus without valida...

Страница 54: ...ctory configuration Alcatel reserved Modify the time before opening the air inlet valve Modify the air inlet valve opening time Change to storage mode the timer is blocked 6000 to 27000 tr mn 0 to 59m...

Страница 55: ...nk Authorizes or does not authorize the echo of characters received on the link Data separating character Authorizes transmission at pre set intervals on the serial link 300 600 1200 2400 4800 9600 7...

Страница 56: ...98 Configuring the display screen DISPLAY in revolutions minute in mA of the pump C of the controller C of the bearings hours of the controller hours The date and time The rotation speed The motor cur...

Страница 57: ...1 2 3 4 5 GND Ground V RS 485 DTR Data terminal ready TD Transmission data Reception data RD Data set ready DSR V RS 485 6 7 8 9 Connection examples RS232 type serial link with a single controller Mu...

Страница 58: ...r error e g non hexadecimal character Err3 context error Err4 checksum error Specifies the address of the device for networking adrADRaaa CR LF adr address of the device before the command aaa new add...

Страница 59: ...a reply string S is a character whose ascii value is the checksum on 7 bits of all the character ascii values from the beginning of the reply string to the character before S The 8th bit of S MSB Mos...

Страница 60: ...ored in user memory Enables DataLogger operation only with RS232 adrDLR CR LF adr sssss nnnnn iiii ttttt uuuu o www ppp vvv Returns current values sssss current speed in tr mn nnnnn speed set point in...

Страница 61: ...g character with leading zeros condition 020 nnn 255 adr ok is the desired character adr ErrX if error Allows the user to distinguish between the first character in a command string for which cannot b...

Страница 62: ...ssss hhhhh g ccccc eeeee ddddd pppp qqqq Returns current values nnnnn nominal speed set point in rpm sssss stand by speed set point in rpm hhhhh alert level for pump bearing maintenance in hours g reg...

Страница 63: ...e use of the RPM command Used to select possible user choices adrOPT1 n CR LF choice of parameters on the analog output n 0 real pump speed n 1 pump current n 2 temperature of pump body n 3 temperatur...

Страница 64: ...ally stored in user memory Saves the internal parameters in user s memory adrSAV CR LF adr ok Saves the current context except for running in cycles If this command is sent when the pump is being supp...

Страница 65: ...s on the analog output a 0 real pump speed a 1 pump current a 2 temperature of pump body a 3 temperature of internal electronics u Returns the choice of temperature unit u 0 degrees Centigrade u 1 deg...

Страница 66: ...time in hours adrSET11 eeeee CR LF electronic working time in hours adrSET12 g CR LF regreasing counter 0 to 2 max adrSET13 ddddd CR LF start delay max 14459s that is 240mn 59s adrSET14 pppp CR LF ti...

Страница 67: ...not connected 0 running in 1 zzzzzz alert bits sssss current speed value in rpm 5 reserved future use iiii current value in mA 4 reserved future use www reserved pwm value 3 variable drive temperatur...

Страница 68: ...2 1 ON 1 2 3 4 5 GND Screen Connect 7 to 8 if load impedance necessary between A et B B or V A or V 6 7 8 9 RS 485 Link 1 2 3 4 5 GND RS 232 Link Screen TD Terminal or computer RD Terminal or compute...

Страница 69: ...resistor LED diode or indicator 5 to 30 V ON Fault Stand by Reserved GND Ext safety Mode Stand by ON OFF Analogical output Outputs Inputs Not used Output contacts signalisation They are open collecto...

Страница 70: ...cessary for pump s starting High Status mode selected Low Impulse mode selected This mode is valid for the two following commands External safety 10 Mode 11 Stand by 12 Start Stop 13 Analog output 14...

Страница 71: ...ication software which allows pump control and monitoring using a micro computer see C 61 Refer to Diagnosis and Troubleshooting of the manual Faults monitoring The potentiometer R 15 allows to set th...

Страница 72: ...mode operation Detection of rotation Warning Electronic boards have been designed to comply with the electrical safety and electromagnetic compatibility rules but they cannot be the purpose of a certi...

Страница 73: ...on Standard wiring A4 A5 output by contact ON OFF Without remote control outer safeties Buttons command The buttons of the front of panel are operational Pump Start Stop remote control by impulse cont...

Страница 74: ...Board type 3 3 GB 00422 Edition 02 March 00 The faults are indicated by red light indicator which signals controller temperature increasing pump temperature increasing incorrect connection between pum...

Страница 75: ...up Safety instructions C 10 Turbomolecular pump operation in a pumping application C 20 Controlling the pump using the controller front panel C 30 Displaying the data concerning ACT 200 T and 600 T pu...

Страница 76: ...on There is a risk of seizing if the pump rotates in an axis perpendicular to its axis of rotation First pump start up Safety instruction for use When the pump is new or after a prolonged shut down of...

Страница 77: ...top close E1 stop the primary pump stop the ATP stop the cooling system ATP PPM E1 Enceinte vider The chamber and pipes are at atmospheric pressure the pumps are switched off the valves are closed Cha...

Страница 78: ...r start up the PPM primary pump start up the ATP water cooling system open the E2 valve The pressure in the chamber 1mbar the secondary pumping can be started up close E2 open E1 and E3 start up the n...

Страница 79: ...0 C Bake out collar accessory operation Refill the chamber with air Shut off the pumps by closing the E3 valve E1 remains open and open an air inlet on the chamber Stop pumping The pumps are shut off...

Страница 80: ...100 The rotation speed monitoring indicator lights go off The pump motor is no longer powered the pump decelerates FAULT FAULT FAULT Red lit The pump is faulty This fault is accompanied by an audible...

Страница 81: ...f air the pump can be started up but the valve will be closed beforehand In the event of a power cut the valve is opened immediately without delay even if it has been programmed at a value other than...

Страница 82: ...or replacing the bearings Displaying the data concerning the pumping 400H FAULT 1 D01 EXTERNAL SAFETY 420H WARNING 1 W01 ATH MAINTENANCE ENTER ENTER DISPLAY DISPLAY SETUP RUNNING IN STATUS VER FAULT...

Страница 83: ...the red fault indicator light and inhibits the pump start up The output contact 7 8 is kept open Before pressing on START the external safety input is not controlled After pressing on START and during...

Страница 84: ...ote Control connector Ext safety input operation Alcatel Vacuum Technology France ATP User s Manual GB 00428 Edition 02 February 99 2 2 Wiring example to control a roughing pump 31 39 8 7 41 32 Remote...

Страница 85: ...ons are validated for ACT 200 200T 600T cabinet Board and Brick version Realize the necessary connections see B 110 RS 232 485 0 1 RS 232 485 TURBO PUMP CABLE REMOTE CONTROL Communication software is...

Страница 86: ...Vacuum Technology France ATP User s Manual ATP User s Manual Maintenance Diagnosis and troubleshooting ACT 200 T and 600 T D 10 Diagnosis and troubleshooting ACT 1000 T D 20 ATP 80 100 150 400 Mainten...

Страница 87: ...pump can be used without indicators No message Check the pump status 200T Imax 1 2 A 600T Imax 0 8 A Rotation speed 0 rpm The controller tempera ture is increasing and the warning ACT TEMP can appear...

Страница 88: ...p maintenance time will be reached The controller temperature is high between 60 and 70 C for ACT 600 T 65 and 75 C for ACT 200 T but does not exceed the authorized limit Pump temperature is between 7...

Страница 89: ...overcurrent or Hall sensor default Pump not connected Not used The controller stops the motor The pump can t restart Starting current too high The pump can t start up Test the external safety devices...

Страница 90: ...wered sensor in the unit Overheat signal by the dimmer switch sensor in the unit Hall sensor default Motor out of order Pump no connected The controller is not powered Check the pump status 0RPM The c...

Страница 91: ...ps the motor Valves are affected and pump can t restart The controller stops the motor Valves are not affected The controller stops the motor Valves are not affected Fault is displayed message The fau...

Страница 92: ...incorrect The controller supplies power to the pump but the data are not saved The pump is not powered and generate power to the controller The defect appears briefly before the power cut The control...

Страница 93: ...rd is not working The controller is help up The controller is blocked The controller is not working Momentaneaously the controller is not working Call the ALCATEL Customer Service Call the ALCATEL Cus...

Страница 94: ...0 6000 4000 Relubrication schedule hours 2000 10 20 30 40 50 Housing temperature C In continuous operation at ultimate pressure no process In cycle less than 1 hour at maximum inlet pressure no proces...

Страница 95: ...ation schedule hours 2000 10 20 30 40 50 Housing temperature C ATP 900 Example For use at 20 C housing temperature in continuous operation at ultimate pressure the maintenance frequency is 8000h t Use...

Страница 96: ...900 Pumps lubrication E 30 ATP 80 100 bearing replacement E 40 ATP 150 400 900 bearing replacement E 50 Cleaning parts E 60 Pump running in for ATP 80 100 150 400 E 70 Maintenance counters for ACT 200...

Страница 97: ...check the pumping conditions of the installation toxicity possible corrosion of the pumped gases Depending on the case we recommend to purge the pumping installation with dry nitrogen before any inte...

Страница 98: ...ubrication syringe refer to the maintenance component references F 10 Avoid introducing foreign matter into the pump during these operations Lubrication must be performed with the pump switched off PU...

Страница 99: ...ts until the syringe plunger comes to a stop against the black jumper Introduce the lubrication syringe needle into the drilled screw located at the center of the rotor until it comes to a stop agains...

Страница 100: ...in the lubrication syringe refer to the maintenance component references F 10 Avoid introducing foreign matter into the pump during these operations Lubrication must be performed with the pump switch...

Страница 101: ...replacing its o ring contained in the syringe packaging Unfasten the lubricating plug on the pumping cell side Repeat the same operations this time removing the black jumper from the syringe keep the...

Страница 102: ...operation is used to fine tune the distribution of the grease in the bearings It consists of pump operation cycles at different speeds to distribute gradually and regularly the grease through the ball...

Страница 103: ...e succes sive running in sequences The standby indicator flashes ENTER ENTER Selection of start stop running in program Orange lit Orange flashing Twice Let the pump operate 10 minutes at atmospheric...

Страница 104: ...e DISPLAY menu is possible We advise you against stopping the running in procedure The controller displays and the program is stopped Remedy to the problem and start again the running in operation PRO...

Страница 105: ...The user will have to perform the regreasings or ball bearing replacement and to increase the maintenance counter Example of operation with a maintenance frequency fixed to 5000h Counter 0 5000 1 1000...

Страница 106: ...of the W01 GREASING message and lighting of Fault light W01 message erasing and Fault light extinction Choice of maintenance frequency 1 after 1st lubrication 2 after 2nd lubrication Access to MAINTEN...

Страница 107: ...EARINGS counter is automatically reset to 0 after program 1 running in W02 message erasing and Fault light extinction Access to MAINTENANCE menu by pressing on key PREVIOUS to validate ENTER DISPLAY S...

Страница 108: ...our Service Centers it is necessary to reset the TIME BEARINGS counter as follows PREVIOUS to validate ENTER DISPLAY SETUP RUNNING IN TIME BEARINGS ACTUAL 45000 TIME BEARINGS ACTUAL 45000 SET ANALOG...

Страница 109: ...g has been started up Then do the following cycles STANDBY menu allows speed adjustment It consists of pump operation cycles at different speeds to distribute gradually and regularly the grease throug...

Страница 110: ...ment 1st phase 6 cycles START STOP to 6000 RPM and leave running for 4h to 6000 RPM 2nd phase 2 cycles START STOP to 10000 RPM and leave running for 4h to 10000 RPM 3rd phase 2 cycles START STOP to 16...

Страница 111: ...er will have to perform the regreasings or ball bearing replacement and to increase the BEARING MAINT and BEARING LIMIT counters Example of operation with a maintenance frequency fixed to 5000h 0 5000...

Страница 112: ...STOCK PARAMETERS DATE SPEED START BEARING RS232 AN OUT RESET AIR INLET STOCK BEARING 5000H MAINT 0 LIMIT 5000 BEARING 5000H MAINT 1 LIMIT 5000 Display of the D37 GREASING BEARING message and lighting...

Страница 113: ...NLET STOCK PARAMETERS DATE SPEED START BEARING RS232 AN OUT RESET AIR INLET STOCK BEARING 15000H MAINT 2 LIMIT 15000 BEARING 15000H MAINT 0 LIMIT 15000 Display of the D24 message and lighting of Fault...

Страница 114: ...GB 00450 Edition 08 February 98 Chapter F Alcatel Vacuum Technology France ATP User s Manual ATP User s Manual Maintenance components 1 1 Maintenance parts F 10...

Страница 115: ...e P N ATP 80 100 056993 ATP 150 ATP 400 900 101924 Pump type P N ATP 80 100 ATP 150 101930 ATP 400 900 Pump type P N ATP 80 100 062698 ATP 150 063078 ATP 400 063076 ATP 900 062992 1 Seal kit 2 Tool ki...

Страница 116: ...after the pump serial number and in compliance with the table below in order to obtain a correct assembly set Shaft diam reference pumping cell side side opposite the cell 3 Ceramic bearing kit The k...

Страница 117: ...V 50 60 HZ 200V 50 60 HZ 115V 50 60 HZ 100V 50 60 HZ 12V DC ACT 600T 6 3A Description Fuse 5 x 20 T 250V Fuse 5 x 20 T 250V Fuse 6 x 32 T 250V F 10 Alcatel Vacuum Technology France ATP User s Manual 3...

Страница 118: ...GB 00465 Edition 08 February 98 Chapter G Alcatel Vacuum Technology France ATP User s Manual ATP User s Manual 1 1 Appendix Pumping curves G10...

Страница 119: ...ual 0 500 400 300 200 100 1000 900 800 700 600 10 5 10 6 10 4 10 3 10 2 10 1 1 10 3 10 4 10 2 10 1 1 10 10 2 Inlet pressure Pa Inlet pressure mbar Pumping speed l s Pumping speed versus inlet pressure...

Страница 120: ...5 10 4 10 3 10 2 10 1 1 10 3 10 6 10 4 10 2 10 1 1 10 102 Pumping speed versus inlet pressure Gas N2 ATP900 C ATP400 C ATP150 C ATP100 C ATP80 C Upper limits for continuous operation Water cooled pump...

Страница 121: ...Manual 0 Inlet pressure Pa Inlet pressure mbar Pumping speed l s 0 500 400 300 200 100 1000 900 800 700 600 10 4 10 3 10 2 10 6 10 5 10 1 1 10 3 10 4 10 2 10 1 1 10 10 2 Pumping speed versus inlet pr...

Страница 122: ...Vacuum Technology ATP User s Manual Inlet pressure Pa Inlet pressure mbar Flow rate sccm 1 10 10 2 103 104 10 5 10 4 10 3 10 2 10 1 1 101 10 3 10 2 10 1 1 10 10 2 10 3 Flow rate versus inlet pressure...

Страница 123: ...l 81 3 6431 7130 Fax 81 45 544 0049 KOREA Alcatel Vacuum Technology Korea 447 Banwol dong Hawsung si 445 330 Kyungki do South Korea Tel 82 031 206 6277 Fax 82 031 204 6279 NETHERLANDS ALCATEL Vacuum T...

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