Inlet pressure (Pa)
Inlet pressure (mbar)
Pumping
speed (l/s)
0
500
400
300
200
100
1000
900
800
700
600
10
-5
10
-4
10
-3
10
-2
10
-1
1
10
-3
10
-6
10
-4
10
-2
10
-1
1
10
10
2
Pumping speed versus inlet pressure
Gas : N
2
ATP900 C
ATP400 C
ATP150 C
ATP100 C
ATP80 C
Upper limits for continuous
operation
(Water cooled pump).
GB 00466 - Edition 01 - March 97
Pumping curves
G 10
2/4
Alcatel - High Vacuum Technology - ATP User’s Manual
