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248
5975 Series MSD Troubleshooting and Maintenance Manual
9
Parts
KF25 O-ring assembly (for turbo pump outlet)
0100-1551
4
Micro-Ion Vacuum Gauge vacuum gauging electronics
G3170-80001
2
Performance turbomolecular pump
G3170-89062
2
Standard turbomolecular pump
G3170-89061
Turbo pump seal with shield
0905-1613
3
Turbo power supply only
G3170-60600
Turbo separate power supply-control wiring harness
G3170-60835
5
Analyzer chamber (manifold)
G3170-20560
Manifold EMC gasket
G3170-80031
Table 20
Turbo pump MSD vacuum system components (
Figure
59
) (continued)
Item
Description
Part number
Содержание 5975C TAD VL MSD
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Страница 56: ...56 5975 Series MSD Troubleshooting and Maintenance Manual 2 General Troubleshooting...
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Страница 230: ...230 5975 Series MSD Troubleshooting and Maintenance Manual 8 Electronics...
Страница 249: ...Parts 9 5975 Series MSD Troubleshooting and Maintenance Manual 249 Figure 59 Turbo pump and related parts 1 2 3 4 5...
Страница 253: ...Parts 9 5975 Series MSD Troubleshooting and Maintenance Manual 253 Figure 61 Analyzer parts 7 under clips 3 4 5 6...
Страница 256: ...256 5975 Series MSD Troubleshooting and Maintenance Manual 9 Parts Figure 62 EI source 1 9 10 12 11 4 8 5 3 3 7 7 2...
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