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General Maintenance
4
5975 Series MSD Troubleshooting and Maintenance Manual
117
To Reinstall a Micro-Ion Vacuum Gauge
Material needed
•
KF16 O-ring 0905-1463
Procedure
1
Place the KF16 O-ring in the groove on the analyzer chamber flange.
Replace it if it is worn or damaged.
2
Hold the gauge flange against the chamber flange with the O-ring. Push the
clamp over both flanges.
3
Insert the long screw, add the thumbnut, and tighten.
4
Attach the cable to the back of the gauge.
Содержание 5975C TAD VL MSD
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Страница 249: ...Parts 9 5975 Series MSD Troubleshooting and Maintenance Manual 249 Figure 59 Turbo pump and related parts 1 2 3 4 5...
Страница 253: ...Parts 9 5975 Series MSD Troubleshooting and Maintenance Manual 253 Figure 61 Analyzer parts 7 under clips 3 4 5 6...
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