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Electronics
8
5975 Series MSD Troubleshooting and Maintenance Manual
221
Diffusion pump control
The power regulator ensures that the diffusion pump heater receives constant
power, even if there are fluctuations in the AC line voltage. It measures the
voltage across the heater and the current through it, multiplies them together,
and compares the result with a standard value. Any discrepancy is applied as
an error signal to adjust the power.
If the power distribution board senses a malfunction in the diffusion pump
power regulator, it shuts off power to the diffusion pump. See
Turbo pump control
Your MSD is equipped with a turbo pump with an integrated controller.
The AC board sends control signals to, and receives turbo pump status
information from, the turbo pump controller. The turbo pump controller
provides power to the turbo pump and regulates pump speed. If the pump fails
to reach 80% speed within 7
minutes after beginning pumpdown or if the
speed drops below 50% during operation, the controller shuts off the turbo
pump and the AC board shuts off the foreline pump.
Figure 51
Diffusion pump control
Hi vac power cable
Diffusion pump harness
Diffusion pump heater cable
Fan
Diffusion
pump
Heater
Sensors
HI VAC Power
Harness
CAL
valve
MSD electronics module
(AC board)
Fore-
line
gauge
Содержание 5975C TAD VL MSD
Страница 1: ...Agilent Technologies Agilent 5975 Series MSD Troubleshooting and Maintenance Manual...
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Страница 56: ...56 5975 Series MSD Troubleshooting and Maintenance Manual 2 General Troubleshooting...
Страница 82: ...82 5975 Series MSD Troubleshooting and Maintenance Manual 3 CI Troubleshooting...
Страница 196: ...196 5975 Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System...
Страница 230: ...230 5975 Series MSD Troubleshooting and Maintenance Manual 8 Electronics...
Страница 249: ...Parts 9 5975 Series MSD Troubleshooting and Maintenance Manual 249 Figure 59 Turbo pump and related parts 1 2 3 4 5...
Страница 253: ...Parts 9 5975 Series MSD Troubleshooting and Maintenance Manual 253 Figure 61 Analyzer parts 7 under clips 3 4 5 6...
Страница 256: ...256 5975 Series MSD Troubleshooting and Maintenance Manual 9 Parts Figure 62 EI source 1 9 10 12 11 4 8 5 3 3 7 7 2...
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