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5975 Series MSD Troubleshooting and Maintenance Manual
6
Vacuum System
High Vacuum Pump
Diffusion pump system
The diffusion pump supports a maximum flow rate into the MSD of
1.5
mL/min. The diffusion pump uses baffling to prevent vapor from migrating
into the analyzer chamber. Foreline pressure is monitored by the foreline
gauge. The AC board controls the diffusion pump heater.
Turbo pump system
The 5975 Series MSD can have one of two turbo pumps. Both pumps are
referred to as turbo pumps.
Both turbo pumps have screens to keep debris out of the pump, but no baffle is
necessary. Pump speed is controlled by the turbo controller; there is no
foreline gauge.
Содержание 5975C TAD VL MSD
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Страница 56: ...56 5975 Series MSD Troubleshooting and Maintenance Manual 2 General Troubleshooting...
Страница 82: ...82 5975 Series MSD Troubleshooting and Maintenance Manual 3 CI Troubleshooting...
Страница 196: ...196 5975 Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System...
Страница 230: ...230 5975 Series MSD Troubleshooting and Maintenance Manual 8 Electronics...
Страница 249: ...Parts 9 5975 Series MSD Troubleshooting and Maintenance Manual 249 Figure 59 Turbo pump and related parts 1 2 3 4 5...
Страница 253: ...Parts 9 5975 Series MSD Troubleshooting and Maintenance Manual 253 Figure 61 Analyzer parts 7 under clips 3 4 5 6...
Страница 256: ...256 5975 Series MSD Troubleshooting and Maintenance Manual 9 Parts Figure 62 EI source 1 9 10 12 11 4 8 5 3 3 7 7 2...
Страница 270: ...270 5975 Series MSD Troubleshooting and Maintenance Manual 9 Parts...