3 Automatic Needle Alignment
3-23
3.5 Checking/Correcting Probe Mark Position
X, Y : Image center position from wafer center
Z : Current height from chuck origin
T : Card degree against wafer at the time of
wafer alignment
C : Die coordinate value under camera
DX, DY : Distance from lower left corner of the die
of the pad under cross mark
Site No : Target side number of the die under camera
Image center cross mark
Probe mark position correcting screen
After the end of contact height determination,
pushing <Image Display Change> button makes
Chuck move to below the alignment camera and
the display will change to the view of the serial No.
1 pad of the probe-contacted die as shown at left.
For checking probe marks on the other pads,
operate Joy Stick to bring in the pads.
<Zero Reset>
For resetting to zero the indicated values of X, Y
and Z (except for T)
For a multi-site card, operate Joy Stick in INDEX
mode to jump to another site quickly. At this time,
the indication "Site No." changes, too. However, if
you have skipped to a die that was not positioned
under the card at the contact height determination,
its site No. disappears.
After the probe mark check, push <EXIT> button;
the display changes to the wafer map indication
screen and probing starts.
If adjustment of the probe mark position is
necessary, push <Needle Position Change> button;
the display changes to the screen shown at left with
the prompt "Set CROSS MARK on needle mark
center and push <DATA-IN> SW.!!".
Bring the probe mark to under the cross mark with
Joy Stick and push <Data-in> button, and then shift
the cross mark to the center of the die and push
<Data-in> button again; now the indicated X/Y
values become the probe mark position adjustment
amounts, and the display returns to the original
screen as shown upper left.
Remark:
If you have missed the original probe-mark position determined through the automatic pad
alignment after repeated corrections and you cannot identify the correcting direction and
amounts, push <Data-in> on a probe mark, when the indicated X/Y values represent the
distance from the original probe mark. Then shift Chuck with Joy Stick until the values become
zero, where the original probe mark exists. After this, determine the correcting direction and
amounts and push <Data-in> second time.
