PREFACE
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DANGER
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The system contains high voltage parts that can cause death or severe injury upon contact.
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Electrical parts, control parts and moving parts inside the system should be handled by service
engineers only.
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Be sure to turn off the power before performing work inside the system.
WARNINGS
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Contact with a moving chuck may result in serious injury.
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Check that the chuck is stopped before working on or around the chuck.
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When working with the front door open, serious injury may be caused by the moving chuck.
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Check that the chuck is stopped before working with the front door open.
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Dropping of the head stage may result in serious injury.
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When closing the head stage, keep your hands clear of the underside of the head stage.
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Contact with a moving wafer transfer robot may result in serious injury.
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Keep the loader cover closed during operation.
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Contact with a moving transfer arm may result in serious injury.
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Keep the loader cover closed during operation.
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[ When using the optional HF test head manipulator ]
Dropping of the upright head stage may result in serious injury.
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When working with the test head in an upright position, activate the upright position retention
stopper.
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[ When using the optional hot chuck ]
When working with the head stage or the chuck access door open, contact with the hot chuck
may result in a burn.
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Do not touch the hot chuck when manually handling wafers on the hot chuck.
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The hot chuck will remain hot for some time after the power has been turned off. Check that the
chuck is well cooled before touching it.
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[ When using the optional cold chuck ]
When working with the head stage or the chuck access door open, contact with the cold chuck
may result in frostbite.
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Do not touch the cold chuck when manually handling wafers or performing maintenance on the
cold chuck.
CAUTION
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When relocating or disassembling the system, contact ACCRETECH. Failure to do so
may void warranty.
