2 Lot Processing
2-5
2.2 Device Data Switching
Probing conditions set for each individual device are called
“device data”, and are stored to a “Device data file” that has a
device name (file name) of up to 16 alphanumeric or symbol
characters. (A device data file can also store alignment model
images, wafer map, sampling die data and pad position data
for a device.)
To change the target device or the device data, or to create a
new device data file, touch the <Device Parameter Settings>
button on the Prober Status or Lot Information/Loader Status
screen. The [Device Parameter Settings] screen page 1/4
(second screen shown on left) is displayed.
Touch the <Device> area to select and modify the device
name. Touch the [ENT] key to complete your input. If a device
data file with the entered device name already exists on the
internal hard disk (HD), floppy disk (FD) or MO, the
parameters will be overwritten with the new settings.
To check the settings for the Device parameters, use the
<Previous Page> and <Next Page> buttons to browse through
the parameter display pages. Touch the <Setting End> button
to complete the editing of the device data and return to the
previous screen.
If a device data file with the entered device name could not be
found on the HD, FD or MO, the third screen shown on the left
will be displayed.
Touch the <New Device> button if you wish to create a device
data file for a new device. The [New Device Data Copy]
screen (bottom screen shown on left) will be displayed.
“Alignment Image”, “Probing Die Data”, “Sampling Die Data”
and “Pad Position Data” buttons on this screen change color
each time they are touched, with the “Copy”/”No” label to their
right toggled at the same time. These specify whether or not
to copy these data from the current device data to the new
device data.
Touching the <ENT> button will return you to the [Device
Parameter Settings] screen page 1/4, allowing you to change
the parameter settings again.
