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Maintaining
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5
Note:
Venting interrupts electrical power to the turbomolecular pump. Nevertheless,
the pump continues to operate briefly, until rotational speed decreases to less than
50%, at which point its vent valve opens.
6.
Disconnect the appropriate front panel gas and electrical connections.
7.
Unscrew the probe’s two knurled thumbscrews, and retract it from the source
(
Figure 5-7 Probe Assembly in Position on the Source
STOP
Attention:
If you are cleaning only the sample and cone gas nozzles, you
need not vent the system.
Caution:
The probe might be too hot to handle. Allow time for it to cool.
STOP
Attention:
Never remove a probe before it cools to below 100 °C and the
source heater cools to below 50 °C. Doing so shortens the life of the probe
heater. To reduce cooling time, continue flowing API gas.
Thumbscrew
Clip
Clip
Fastener
Fastener
Source Enclosure Cover
Source
Summary of Contents for Micromass ZQ 2000
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