Ulvac PMB100D, Instruction Manual

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YK11-0016-DI-002-08
2
1.1.4 ! Warning Explosion
Factors Avoidance methods and measures
Pressure inside the pump rises up and
the pump explodes.
Ensured pressure value of the Pump is
0.03MPaG
(0.3 kg/ cm
2
G)(Gauge pressure).
Check the Exhaust side pressure of the
pump.
If it was over 0.03 MPaG (0.3 kg/cm 2 G)
(Gauge pressure) take away anything
in and around the exhaust outlet that
hampers gas passage.
1.1.5 ! Caution High temperature
Factors Avoidance methods and measures
Getting burnt on touching the high
temperature part.
The Pump gets high temperature
during operation.
As the surface temperature is high, you
have a risk of getting burnt by
accidentally touching it with the hand
or the like. Refrain from touching the
pump during operation. Wait until the
temperature sufficiently cools down
after having stopped the pump to
conduct check or something.
1.1.6 ! Caution Leakage of hot cooling water
Factors Avoidance methods and measures
Kept operating without supplying the
cooling water. Boiled hot vapor jet out
the cooling water outlet.
Put a Flow meter in the line to set the
interlock so that the Pump stops when
cooling water was blocked out.
If you kept operating without supplying
the water, immediately stop the Pump
and keep away from it.
Stop the Pump and ensure that the
Pump temperature got cooled down to
take out the Pump and check it.