YK11-0016-DI-002-08
ii
IMPORTANT
Author's copyright of this instruction manual belongs to
Components Division of ULVAC, Inc.
It is prohibited to copy a part and/or this entire manual without
authorization by Components Division of ULVAC, Inc.
It is prohibited to use this instruction manual except for
explanation when using the PMB100D, PMB300D, PMB600D,
PMB1200D and PMB2400D and other purpose Components
Division of ULVAC, Inc. agreed.
It is prohibited to hand over and disclose this instruction manual to third
parties without agreement by Components Division of ULVAC, Inc.
0.1 Safety Symbol Marks
We display symbol marks regarding the safety in this manual and on the product to make clear
items to observe. Descriptions attached to the symbol are classified as illustrated below;
0.2 Meanings of Safety Symbol Marks
DANGER
If the user makes a mistake in handling, it indicates an imminent
possibility that the user is subject to death or heavy injury.
WARNING
If the user makes a mistake in handling, it indicates a possibility that
the user is subject to death or heavy injury.
CAUTION
If the user makes a mistake in handling, it indicates a possibility
that the user is subject to moderate injury or it leads to significant
damage of the machine. It indicates a possibility that damage of the
machine is caused and the normal operation is impaired.
IMPORTANT
[IMPORTANT] description shall be given where there is particular
information to notice for the operation or maintenance work of the
product.
Training for the electrical safety is required as there is a risk of
electrical shock.
Check and ensure that the pump is sufficiently cooled down as this
section keeps high temperature after having stopped the pump.
Summary of Contents for PMB100D
Page 2: ......
Page 3: ...Declaration of Conformity...
Page 39: ...YK11 0016 DI 002 08 12 2 4 Dimensional drawing Fig 11 Dimensional drawing PMB100D...
Page 40: ...YK11 0016 DI 002 08 13 Fig 12 Dimensional drawing PMB300D...
Page 41: ...YK11 0016 DI 002 08 14 Fig 13 Dimensional drawing PMB600D...
Page 42: ...YK11 0016 DI 002 08 15 Fig 14 Dimensional drawing PMB1200D...
Page 43: ...YK11 0016 DI 002 08 16 Fig 15 Dimensional drawing PMB2400D...
Page 62: ...YK11 0016 DI 002 08 35...
Page 65: ...YK11 0016 DI 002 08 38...
Page 72: ...YK11 0016 DI 002 08 45...
Page 84: ...YK11 0016 DI 002 08 57 Fig 28 PMB300D Optional attachment figure...
Page 85: ...YK11 0016 DI 002 08 58 Fig 29 PMB600D Optional attachment figure...
Page 86: ...YK11 0016 DI 002 08 59 Fig 30 PMB1200D Optional attachment figure...
Page 89: ...YK11 0016 DI 002 08 62 Fig 33 Dimensional drawing PMB2400D Horizontal exhaust model...
Page 99: ...YK11 0016 DI 002 08 72...
Page 105: ...YK11 0016 DI 002 08 78...
Page 119: ......
