Ulvac PMB100D, Instruction Manual

Page: 24 / 119

YK11-0016-DI-002-08
Contents-2
3.2 Lubrication ...................................................................................................................................... 26
3.2.1 Lubrication to the Lubrication chamber. ................................................................................... 26
3.3 Inlet port Piping ............................................................................................................................... 29
3.4 Outlet port Piping ............................................................................................................................ 30
3.5 Electrical Connection ...................................................................................................................... 32
3.6 Water Piping ................................................................................................................................... 39
4. Operation .............................................................................................................................................. 41
4.1 Caution on Operation ..................................................................................................................... 41
4.2 Operation Start ............................................................................................................................... 42
4.2.1 Test run ..................................................................................................................................... 42
4.2.2 Run ........................................................................................................................................... 43
4.3 Operation Stop ................................................................................................................................ 44
5. Option ................................................................................................................................................... 46
5.1 Special motors ................................................................................................................................ 46
5.2 Inlet and outlet flange ..................................................................................................................... 46
5.3 Oil type ............................................................................................................................................ 46
5.4 Motor control equipment (water-cooled type with atmospheric pressure operating specification
inverter) (optional) ................................................................................................................................. 46
5.5 Motor control equipment (air-cooled type with atmospheric pressure operating specification
inverter) ................................................................................................................................................. 52
5.6 Separate Evacuation of Lubricating Chamber ............................................................................... 53
5.6.1 Preparation ............................................................................................................................... 54
5.6.2 Water Piping, Electrical Connection and Lubrication. .............................................................. 54
5.6.3 Checking lubricating oil level .................................................................................................... 54
5.6.4 Oiling mechanical seal ............................................................................................................. 54
5.6.5 Pumping ................................................................................................................................... 54
5.6.6 Checking rotational direction .................................................................................................... 54
5.6.7 Operation .................................................................................................................................. 55
5.6.8 Pumping start operation ........................................................................................................... 55
5.6.9 Shutdown operation ................................................................................................................. 55
5.7 Optional attachment figure ............................................................................................................. 56
6. Maintenance and Check ...................................................................................................................... 63
6.1 Maintenance ................................................................................................................................... 63
6.2 Regular Check ................................................................................................................................ 64
6.2.1 Pump Oil Level Check .............................................................................................................. 65
6.2.2 Vacuum Pump Oil Check ......................................................................................................... 65
6.2.3 Oil Leak Check ......................................................................................................................... 67
6.2.4 Oil Leak form the Mechanical Seal .......................................................................................... 67