Ulvac PMB100D, Instruction Manual

Page: 106 / 119

YK11-0016-DI-002-08
79
Trouble Causes Processing Method Reference
Oil leaks to
the outside
of the
pump.
1
Deterioration of the O-ring
of the Case and Cover.
Conduct the overhaul.
6.2.3
6.4
2 Oil inlet is loose. Tighten again the Oil inlet. -
The motor
current
value is
abnormal.
1
Foreign substance entered
inside the Pump impaired
the Motor rotation. Conduct the overhaul.
Removal of foreign substance
inside the Pump.
6.2.8
6.4
3
There is a leak in the pipe
connecting with the Pump.
Use a Leak detector or the like
to find out the leak position and
stop it.
2.6
4
The rotor is in contact with
each other
Conduct the overhaul. 6.4
2
Pressure is over the
maximum pumping
pressure. Check pressure on intake and
exhaust sides.
Check the backing pump.
2.2
2.6
Oil of the
reservoir
through an
oil level
gauge of
the cover on
the motor
side.
1
Oil leak from the
Mechanical seal
Drain out oil of the reservoir, and
it relubricates the cover on the
motor side.
or
If the oil pooled 0.15mL/Hour or
more, You need Replace the
Mechanical seal.
3.2.2
6.2.4
Air leak
from the
Mechanical
seal during
Pump
operation
stop
1
Is it after long time stop?
Did it stop long time?
Lubricate the Mechanical seal
and run the unit a while, or
rotate it by the hand.
Check again the leak after that.
3.2.2