-31-
Vacuum Pump Check Sheet For Repair
(for disassembly, inspection and repair)
※ Please inform the following items completely for safety precautions against our maintenance
staff. Fill in the item below and attached to the repair pump.
Date of issue : Year Month Date
Customer’s name :
Person in charge:
TEL : FAX:
Representative Distributor :
Person in charge:
TEL : FAX:
Product Name : Serial No.(MFG.No):
Purchased Date: Year Month
1.
Request item
□
Repair order during the warranty period(No Charge)
□
Evaluation pump disassembly inspection required or inspection for pump required(No
charge)
□
Immediate repairing is required、(Charge)
□
Periodical inspection or over haul(Charge)
□
Repair order is required and estimation is required before start repairing、
2.
Trouble situation
□ Unusual sound □ Pressure degradation □ Irregular action □ Others
3.
Purpose of the usage(Device’s name if necessary)
4.
Evacuated gas (Type of the gas)
(1)Hazardous situations for injury □Yes □No
(2)Type of the gas・Name of the gas
5.
Operational situation
(1)Operational elapsed time: hr □ 24hrs consecutive operation
□ On Off operation
(2)Installation place:
(3)Ambient temperature:
(4)Operational pressure:
6.
Miserenious information. Please describe any information if necessary.
7.
Send to
□Ulvac Kiko,Inc. CS Center. Yokohama Service Dep.
【Address】1-10-4,
Kitashinyokohama, Kohoku-ku, Yokohama City, Kanagawa Prf, Japan
TEL:045-533-0509 FAX:045-533-0512
□Ulvac Kiko,Inc. CS Center. Miyazaki Service Dep.
【Address】291-7,
Chausubaru, Saito City, Miyazaki Prf. Japan
TEL:0983-42-4135 FAX:0983-43-2159
※
Use this paper by recopying for every information. When sending your information without
this check sheet, repairing may not be acceptable.
Summary of Contents for DIS-90
Page 28: ...27 8 2 Dimensions...
Page 29: ...28 8 3 Performance data Inlet Pressure Pa Pumping Speed L min...
Page 30: ...29 Memo...