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Contents
Important information ................................................................................................................. 1
For safe operation ....................................................................................................................... 2
Contents ....................................................................................................................................... 7
1. Before use ................................................................................................................................ 8
1.1 Check the product ............................................................................................................. 8
2. Name and structure of each section ................................................................................... 10
3. Installation .............................................................................................................................. 11
3.1 Wiring ................................................................................................................................ 12
3.2 Test operation .................................................................................................................. 16
3.3 Connection to vacuum system (chamber) .................................................................... 17
4. Operation ................................................................................................................................ 18
4.1 Air-flush closed operation .............................................................................................. 20
4.1.1 Start-up ...................................................................................................................... 20
4.1.2 Shut-down .................................................................................................................. 20
4.2 Air-flush opened operation ............................................................................................. 21
4.2.1 Preparation ................................................................................................................ 21
4.2.2 Start-up and shut-down ............................................................................................ 22
4.2.3 When returning to air-flush closed operation ....................................................... 22
5. Maintenance and inspection ................................................................................................ 23
5.1 Daily maintenance and inspection ................................................................................ 23
5.2 Maintenance ..................................................................................................................... 24
6. Problems and remedies ........................................................................................................ 25
7. Disposal .................................................................................................................................. 25
8. Specifications ........................................................................................................................ 26
8.1 Specifications .................................................................................................................. 26
8.2 Dimensions ...................................................................................................................... 27
.............................................................................................................................................. 27
8.3 Performance data ............................................................................................................ 28
9. Warranty and After-sales service ........................................................................................ 30
9.1 Warranty ........................................................................................................................... 30
9.2 After-sales and service ................................................................................................... 30
Vacuum Pump Check Sheet For Repair ................................................................................. 31
Summary of Contents for DIS-90
Page 28: ...27 8 2 Dimensions...
Page 29: ...28 8 3 Performance data Inlet Pressure Pa Pumping Speed L min...
Page 30: ...29 Memo...
